Effect of Hydrogen Plasma Pre-treatment on Growth of Carbon Nanotubes by a Microwave PECVD Method (마이크로웨이브 플라즈마 화학기상증착장비를 사용하여 합성한 탄소나노튜브의 니켈 촉매층 수소 플라즈마 전처리조건에 따른 성장특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2005.07a
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- pp.189-190
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- 2005