• 접착 및 계면
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• 제19권4호
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• pp.154-162
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• 2018

필름 형태의 Polydimethylsiloxane (PDMS)은 표면 개질을 하기 위해 Plasma 처리 또는 Corona 처리를 하여 표면을 -OH기로 활성화시키는 공정이나, 피착제와 PDMS 필름의 접착 또는 Adhesion promoter와 축합 반응을 통해 PDMS 표면을 다른 작용기로 개질시키는 공정, Grafting polymerization을 이용하는 PDMS 개질 공정이 주로 이용된다. 그러나 Plasma나 Corona 처리 후에 친수성이 오래가지 못하고, 보관에 어려움이 있다. 따라서, 본 연구에서는 코팅 공정을 통하여서 PDMS표면 개질을 하기 위해서, 먼저 새로운 형태의 실란 기능화 아크릴 고분자 전구체를 합성하고 이를 Hydroxyl-terminated PDMS와의 축합 반응을 통해 아크릴 고분자와 PDMS 고분자가 결합된 형태의 표면 개질제를 제조한 후, 이를 PDMS 필름 위에 코팅하였다. 제조한 표면 개질제의 구조와 분자량을 확인하기 위하여 1H-NMR과 GPC를 분석하였고, 표면 개질제가 코팅된 PDMS표면 특성 변화를 확인하기 위하여 XPS, ATR, WCA를 이용하여 표면 특성을 조사하였으며, PDMS 필름과의 부착을 확인하기 위해 Cross cutting test를 진행하였다. 그 결과 PDMS 필름 표면이 아크릴 고분자층이 형성된 것으로 확인하였고, PDMS 필름과 표면 개질제와의 부착성 (4 - 5B) 또한 우수한 것을 확인하였다.

• 한국전기전자재료학회논문지
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• 제19권2호
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• pp.181-184
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• 2006

Nd:YAG($\lambda$=266 nm, pulse) laser beam was irradiated on the PDMS surface to improve its chemical reaction, wettability, adhesive property. The various surface modification methods of PDMS were already studied using oxygen plasma, ozone and corona discharge. The surface modification using laser has the advantage of the simple experiment that only directly irradiated laser beam on the PDMS surface in the air. After the laser treatment, the PDMS surface was investigated using a contact angle measuring instrument. The contact angle was decreased with a increase of the surface oxygen content. In conclusion, the wettability of PDMS surface was improved by the laser treatment without changing of its bulk characteristics.

• 한국정보전자통신기술학회논문지
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• 제15권5호
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• pp.321-327
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• 2022

본 논문에서는 UV/Ozone 처리를 통해 Polydimethylsiloxane(PDMS) 표면에 주름 구조를 형성하고, 물리화학적 특성 분석을 통해 줄금 구조 형성 메커니즘을 밝혔다. 30분의 UV/Ozone 처리를 통해 PDMS 표면에 주름 구조를 형성하였으며, 주사전자현미경의 단면 촬영으로 PDMS 표면의 주기적인 주름 형성을 확인할 수 있었다. 또한, XPS 스펙트럼 분석을 통해 PDMS 표면에 SiOx의 실리카 경질 표면이 UV/Ozone에 의해 만들어지는 것을 확인하였고, PDMS 표면의 경질층과 내부의 연질층 사이의 탄성 계수 불일치는 PDMS의 주름 형성의 팽윤 메커니즘을 확인시켜 준다. 본 연구 결과는 UV/Ozone 처리에 의한 PDMS 표면의 주름 구조 형성 메커니즘의 이해도를 향상시킬 뿐만 아니라, 향후 UV/Ozone 조사 조건에 따라 주름 구조의 진폭과 주기를 조정하는데 기초 연구로 쓰일 수 있을 것이다.

• 한국생산제조학회지
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• 제24권1호
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• pp.38-42
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• 2015

Polydimethylsiloxane (PDMS) is a widely used material for replicating micro-structures because of its transparency, deformability, and easy fabrication. At the nanoscale, however, it is hard to fill a nanohole template with uncured PDMS. This paper introduces several simple methods by changing the surface energy of a nanohole template and PDMS elastomer for replicating 100nm-scale structures. In the case of template, pristine anodic aluminum oxide (AAO), hydrophobically treated AAO, and hydrophillically treated AAO are used. For the surface energy change of the PDMS elastomer, a hydrophilic additive and dilution solvent are added in the PDMS prepolymer. During the molding process, a simple casting method is used for all combinations of the treated template and modified PDMS. The nanostructured PDMS surface was investigated with a scanning electron microscope after the molding process for verification.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.223-223
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• 2012

Surface engineering plays a significant role in fabricating highly functionalized materials applicable to industrial and biomedical fields. Surface wrinkles and folds formed by ion beam or plasma treatment are buckling-induced patterns and controlled formation of those patterns has recently gained considerable attention as a way of creating well-defined surface topographies for a wide range of applications. Surface wrinkles and folds can be observed when a stiff thin layer attached to a compliant substrate undergoes compression and plasma treatment is one of the techniques that can form stiff thin layers on compliant polymeric substrates, such as poly (dimethylsiloxane) (PDMS). Here, we report two effective methods using plasma modification techniques for controlling the formation of surface wrinkles and folds on flat or patterned PDMS substrates. First, we show a method of creating wrinkled diamond-like carbon (DLC) film on grooved PDMS substrates. Grooved PDMS substrates fabricated by a molding method using a grooved master prepared by photolithography and a dry etching process were treated with argon plasma and subsequently coated with DLC film, which resulted in the formation of wrinkled DLC film aligning perpendicular to the steps of the pre-patterned ridges. The wavelength and the amplitude of the wrinkled DLC film exhibited variation in the submicron- to micron-scale range according to the duration of argon plasma pre-treatment. Second, we present a method for controlled formation of folds on flat PDMS substrates treated with oxygen plasma under large compressive strains. Flat PDMS substrates were strained uniaxially and then treated with oxygen plasma, resulting in the formation of surface wrinkles at smaller strain levels, which evolved into surface folds at larger strain levels. Our results demonstrate that we can control the formation and evolution of surface folds simply by controlling the pre-strain applied to the substrates and/or the duration of oxygen plasma treatment.

• KIEE International Transactions on Electrophysics and Applications
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• 제4C권4호
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• pp.142-144
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• 2004

To use Poly-dimethylsiloxane (PDMS) for the electrokinetic flow channel, the PDMS surface must be modified to be hydrophilic. With $O_2$ plasma treatment, it is difficult to maintain hydrophilicity for more than one day. In this paper, we present the chemical modification of the PDMS surface using 2-Hydroxyethyl methacrylate (HEMA) to prolong hydrophilicity lifetime. The oxide radicals generated temporarily on the PDMS surface by $O_2$ plasma are grafted with HEMA. Once the PDMS samples have been grafted, they demonstrate improved hydrophilicity retainment and electroosmotic flow characteristics compared to the untreated PDMS and the oxidized PDMS following the $O_2$ plasma process. This phenomenon was verified by the contact angles, Fourier transform infrared (FTIR) spectra and electro osmotic flow rates observed for more than 300 hours.

• Transactions on Electrical and Electronic Materials
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• 제3권4호
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• pp.10-15
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• 2002

Surface states of polydimethylsiloxane (PDMS) treated by plasma were investigated by the analysis by x-ray photoelectron spectroscopy (XPS) and surface voltage decay. Plasma treatment causes the silica-like(SiO$\_$x/, x=3∼4) oxidative layer, which is confirmed with XPS, and lowers surface resistivity from 1.78$\times$1014 Ω/square to 1.09$\times$10$\^$13/ Ω/square with increasing the plasma treatment time. By measuring the decay time constant of surface voltage, the calculated surface resistivity was compared with the value directly measured by a voltage-current method, so good agreement between two methods was obtained. It was observed that the plasma treatment led to decrease of the thermal activation energy of the surface conduction from 31.0 kJ/mol of untreated specimen to 21.8 kJ/mol. It is found that our results allow the examination of effects of plasma on electrical properties of PDMS.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1480-1481
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• 2008

In this paper, we present surface treatments for achieving bonds between PMMA and PDMS substrates. Silane primer is used for the formation of hydroxyl group on PMMA surfaces. The formed hydroxyl groups enhance the bonding strength of PDMS-PMMA substrates without channel clogging and structure deformation. The bonding strength on the different surface treatments (include oxygen plasma, 3-APTES, and corona discharge) is evaluated to find optimal bonding condition. The maximum bonding strength at the optimal surface treatment is over 300 kPa. The surface treatment using silane primer can be used to the bonding process of Micro-TAS and Lab-on-a-Chip.

• 멤브레인
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• 제19권1호
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• pp.54-62
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• 2009

부탄올을 투과증발 공정으로 분리하기 위하여 복합공정에 의하여 투과증발막을 제조하였다. 상업용 poly(dime-thylsiloxane) (PDMS) 막을 plasma 처리시키거나, polysulfone, poly(ether imide) 막을 지지체로 사용하여 plasma 처리 및 PDMS 코팅의 복합공정을 적용하였다. 헥산계열과 실란계열 유기 화합물을 사용하여 PDMS막을 plasma 처리하였을 경우 막 표면의 소수성을 증가시켜서 부탄을 선택도가 12.56까지 향상되었다. 반면에 투과량은 막 표면의 소수성 증대와 free volume의 변화로 인해 $1.15kg/m^2{\cdot}hr$까지 감소되어 선택도와 반대의 성향을 나타내었다. 막의 소수성이 증가함에 따라 접촉각과 상대적 sorption 비가 증가하였고, 부탄을 선택도도 향상되었다. PDMS 코팅 용액에서 prepolymer의 함량이 높을수록 부탄올 선택도가 증가하였다. PDMS 코팅과 plasma 처리 공정의 순서에 따른 영향을 조사하였다. 부탄올과 노르말 헥산으로 plasma 처리할 경우 plasma처리, PDMS 코팅 순으로 제조된 막의 분리 성능이 우수하였고 hexamethyldisilane과 hex-amethyldisilazane을 사용한 경우에는 역순으로 제조된 막의 분리 성능이 더 우수한 것으로 나타났다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2015년도 추계학술대회 논문집
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• pp.169-169
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• 2015

Poly(dimethysiloxane, PDMS)은 그 다양한 사용분야 때문에 지속적으로 연구분야에서 연구주제가 되고 있었다. 본 논문에서는 산소 플라즈마 처리에 의한 PDMS/기판에서의 접착강도를 peel 테스트를 통하여 정량적으로 측정하였다.