• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.88-88
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• 2010

We synthesized molybdenum thin films deposited by RF magnetron sputtering and physicochemical analysis was performed. The physical and chemical properties of these films were examined with X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). The obtained film at the oxygen ratio of 0% showed crystallinity of cubic Mo(110) phase. After the oxygen ratio increased more than 5% in the sputter gas, the molybdenum films were formed as an amorphous phase. The thickness of the Mo thin film was drastically decreased from 1000 nm to ca 70 nm after introduction of oxygen in the sputter gas confirmed by spectroscopic ellipsometer (SE) and scanning electron spectroscopy (SEM). The calculated band gap of the film deduced from SE data increased from 3.17 to 3.63 eV by addition of oxygen in the sputter gas. The roughness of the Mo film was examined with atomic force microscopy (AFM) and it was dramatically decreased by introducing of oxygen during sputtering. XPS results revealed that the ratio of metallic Mo species in the film decreased by the contents of Mo(VI) species increased at the ratio of oxygen increased in the sputter gas and fully oxidized at low content of oxygen in the sputter gas.

• 한국표면공학회지
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• 제38권5호
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• pp.193-197
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• 2005

Highly c-axis oriented Zinc oxide (ZnO) films were successfully deposited at room temperature by oxygen ion-assisted pulsed filtered vacuum arc. The effect of oxygen gas ratio ($O_{2}/O_{2}+Ar$ on the preferred orientation, surface morphology and resistivity of the ZnO films were investigated. Highly crystalline ZnO films with (002) orientation were obtained at over $13\%$ of oxygen gas ratio. Increasing oxygen gas ratio up to $80\%$ was found to improve crystallinity of the films. From hall measurements, it was found that the film has n-type characteristic and carrier concentration and its mobility were closely related with oxygen gas ratio. Minimal resistivity of $3.6{\times}10^{-3}{\Omega}{\cdot}cm$ was obtained in the range of $20\%$ to $40\%$ of oxygen gas ratio.

• 한국전기전자재료학회논문지
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• 제18권10호
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• pp.909-916
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• 2005

The structural and electrical property of RF magnetron sputtered ZnO thin film have been studied as a function of RF power, substrate temperature, oxygen/argon gas ratio and film thickness at constant sputtering power, sputtering working pressure and target-substrate distance. To analyze a crystallo-graphic properties of the films, $\theta$/2$\theta$ mode X-ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity and surface roughness highly depended on oxygen/argon gas ratio. The resistivity of ZnO thin film(6000 ${\AA}$) rapidly increased with increasing oxygen ratio and the resistivity value of $9 {\ast} 10^7 {\Omega}cm$ was obtained at a working pressure of 10 mTorr with the same oxygen/argon gas ratio. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with the same oxygen/argon gas ratio showed the excellent roughness value of 28.7 ${\AA}$. With increase of the substrate temperature, The C-axis preferred orientation of ZnO thin film increases and the resistivity decreases due to deviation from the stoichiometric ZnO due to oxygen deficiency.

• Journal of Advanced Marine Engineering and Technology
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• 제18권2호
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• pp.91-96
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• 1994

Intake gases other than air, which is composed of oxygen, nitrogen, carbon dioxide, and argon, are used to study their effects on the performance of the diesel engine experimentally. The engine is operated at constant speed and fixed fuel injection timing, and cylinder pressure and heat release rate are measured at various intake gas compositions. The results show that increase of oxygen concentration improves the performance of the engine generally. The adverse effect is observed when the oxygen concentration is increased over the critical oxygen concentration of this test, mainly because of the over-shortened ignition delay. Increase of carbon dioxide concentration degardes the performance of the engine, mainly due to the lower specific heat ratio of carbon dioxide. Adding argon gas to the intake gas improves the overall performance. Finally, it is found that two most influencing factors affecting the performance of the diesel engine in this study are ignition delay and speific heat ratio of the intake gas.

• 대한기계학회논문집B
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• 제21권12호
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• pp.1690-1700
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• 1997

Entrained coal gasification tests with Datong coal were performed to assess the influence of oxygen/coal ration and pressure. When gasification condition in oxygen/coal ratio has changed from 0.5 to 1.0, optimal gasification condition from low pressure runs was oxygen/coal ratio of approximately 0.9 where CO was produced about 40% and H, about 20%. Under the pressure condition of 12-14 atmospheres, optimal oxygen/coal ratio value was in the region of 0.6 where CO was produced about 55% and H2about 25%. From these results, it was found that the oxygen/ coal ratio for the maximum production of CO and H, was decreasing with the increase in gasifier pressure and also, with increasing oxygen content, carbon conversion was increased. For the Chinese Datong coal, cold gas efficiency was in the range of 40-80%.

• 한국전기전자재료학회논문지
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• 제14권12호
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• pp.1008-1015
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• 2001

Thin films of vanadium oxide(VO$\_$x/) have been deposited by r.f. magnetron sputtering from V$_2$O$\_$5/ target in gas mixture of argon and oxygen. The oxygen/(oxygen+argon) partial pressure ratio is changed from 0% to 8%. Crystal structure, chemical composition, bonding, optical and electrical properties of films sputter-deposited under different oxygen gas pressures are characterized through XPS, AES, RBS, FTIR, optical absorption and electrical conductivity measurements. V$_2$O$\_$5/ and lower oxides co-exist in sputter-deposited films and as the oxygen partial pressure is increased the films become more stoichiometric V$_2$O$\_$5/. The increase of O/V ratio with increasing oxygen gas pressure is attributed to the partial filling of oxygen vacancies through diffusion. It is observed that the oxygen atoms located on the V-O plane of V$_2$O$\_$5/ layer participate more readily in the oxidation process. With increasing oxygen gas pressure indirect and direct optical band gaps are increased, but thermal activation energies are decreased.

• 한국자동차공학회논문집
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• 제2권2호
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• pp.49-58
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• 1994

A study on the performance of a Diesel engine with various intake gas compositions other than that of air are performed experimentally. In this study, the concentrations of each of oxygen, nitorgen, carbon dioxide, and argon are changed and their effects on the performance of the engine are investigated parametrically. The experiments are performed at constant engine speed condition, and main measured parameters are cylinder pressure, intake gas compositions, fuel consumption rate. Increase of oxygen concentration up to 24% improved the performance of the engine generally. The adverse effect was observed when the oxygen concentration was increased over 24%. Increase of carbon dioxide concentration degraded the performance of the engine, mainly due to the lower specific heat ratio of carbon dioxide. Adding argon gas to the intake gas improved the overall performance. Finally, it is found that two most influencing factors affecting the performance of the Diesel engine in this study of intake gas composition variation are ignition delay and specific heat ratio of the intake gas.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.390-395
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• 2003

The effect of recirculated exhaust gas on exhaust emissions under four kinds of nozzle tip with the different fuel consumption rate are experimentally investigated by using an once-through boiler with FGR system. The purpose of this study is to develop the FGR control system for reducing NOx in a boiler. Intake and exhaust oxygen concentrations, and equivalence ratio are applied to discuss the effect of FGR rate on exhaust emissions at various fuel consumption rates. It is found that NOx emissions are decreased, while soot emissions are increased owing to the drop of intake and exhaust oxygen concentrations, and the rise of equivalence ratio as FGR rates are elevated.

• 전력전자학회논문지
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• 제6권5호
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• pp.377-385
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• 2001

물을 전기분해하여 얻은 일정 부피비를 갖는 수소와 산소 혼합가스를 수산화가스로 명명하며, 이를 역반응시켜서 열 에너지원으로 사용하고 있다. 수산화가스는 경제성, 안전성 및 환경친화적인 고유한 특성을 지니고 있어서 현재 가스용접기에 적용하고 있으며 여러 가지 응용분야에 적용할 수 있도록 연구 중에 있다. 본 논문에서는 수산화가스의 특성에 관하여 고찰하고 발생기용 전원에 대하여 소개하고 이 중에서 아직까지 적용되지 않은 펄스전원을 적용하여 여러 가지 운전주파수에서 비교분석 하였다.

• Journal of Ceramic Processing Research
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• 제13권spc2호
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• pp.407-410
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• 2012

The properties of Al-doped ZnO (AZO) films were investigated as a function of H2/(Ar + H2) gas ratio using an AZO (2 wt% Al2O3) ceramic target in a radio frequency (RF) magnetron sputtering system. The deposition process was done at 200 ℃ and in 2 × 10-2Torr working pressure and with various ratios of H2/(Ar + H2) gas. During the AZO film deposition process, partial H2 gas affected the AZO film characteristics. The electron resistivity (~ 9.21 × 10-4 Ωcm) was lowest and mobility (~17.8 ㎠/Vs) was highest in AZO films when the H2/(Ar + H2) gas ratio was 2.5%. When the H2/(Ar + H2) gas ratio was increased above 2.5%, the electron resistivity increased and mobility decreased with increasing H2/(Ar + H2) gas ratio in AZO films. The carrier concentration increased with increasing H2/(Ar + H2) gas ratio from 0% to 7.5%. This phenomenon was explained by reaction of hydrogen and oxygen and additional formation of oxygen vacancy. The average optical transmission in the visible light wavelength region over 90% and an orientation of the deposition was [002] orientation for AZO films grown with all H2/(Ar + H2) gas ratios.