• 한국재료학회지
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• 제11권11호
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• pp.997-1000
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• 2001

Conducting perovskite oxide, $(Ba,Sr)RuO_3(BSR)$, which has many advantages for $(Ba,Sr)TiO_3(BST)$ due to their similarity in crystal structure, lattice constant and chemical composition, was prepared on n-type Si (100) by liquid delivery metalorganic chemical vapor deposition(LDMOCVD). The deposition characteristics of BSR were controlled by gas-phase mass-transfer in the experiment. The BSR films deposited at 50$0^{\circ}C$ and oxygen flow rate of 100 sccm(standard cc/min) showed an average roughness of 22 $\AA$and resistivity of 810 $\mu$$\Omega$-cm. The roughness of BSR films with oxygen flow rate showed a close relationship with the resistivity of films. BSR (110) peak shifted toward lower Bragg angle with increase of x in the$(Ba_x,Sr_{1-x})TiO_3$. The resistivity of BSR films increased from 810 to 924 $\mu$$\Omega$-cm with increase of Ba content(x).

• 대한전자공학회논문지
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• 제16권1호
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• pp.26-32
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• 1979

실리콘의 dry oxidation과 wet oxidation공정의 특성을 실험적으로 조사하였다. 산화온도는1,100℃, 1.150℃, 1.200℃를 사용하였고, 산소의 유량은 0.2 liter/min으로 부터 2.8 liter/min까지 변화시켰다. 산화막의 두께를 측정하여 0.1μ ∼ 1.0μ 을 성장시키는데 필요한 온도, 시간, 산소의 유량을 도표로 나타냈다. 산화막의 특성을 조사하기 위하여 유전 상수 절연파괴 전압, fixed surface charge density (Qss/q), mobile ciarge densify (Q /q)를 측정하였다. 측정 결과로부터 산화막이 MOS transistor에도 적합한 양질이라는 결론을 얻었다.

• 한국대기환경학회지
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• 제23권5호
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• pp.557-562
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• 2007

The purpose of this paper is to investigate the reforming characteristics and maximum operating condition for the hydrogen production by methane reforming using the compression ignition engine induced partial oxidation. An dedicated compression engine used for methane reforming was decided operating range. The partial oxidation reforming was investigated with oxygen enrichment which can improve hydrogen production, compared to general reforming. Parametric screening studies were achieved as $O_2/CH_4$ ratio, total flow rate, and intake temperature. When the variations of $O_2/CH_4$ ratio, total flow rate, and intake temperature were 1.24, 208.4 L/min, and $400^{\circ}C$, respectively, the maximum operating conditions were produced hydrogen and carbon monoxide. Under the condition mentioned above, synthetic gas were $H_2\;22.77{\sim}29.22%,\;CO\;21.11{\sim}23.59%$.

• 반도체디스플레이기술학회지
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• 제4권4호
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• pp.13-17
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• 2005

The behavior of ozone in $NH_4OH$ was investigated to evaluate the solution as a cleaning chemical of the silicon wafer. The solubility of ozone in DI(Deionized) water increased as the oxygen flow-rate decreased and ozone generator power increased. Ozone in DI water showed solubility of 100 ppm or higher at room temperature. Ozone concentration was stabilized at the range of ${\pm}2ppm$ by controlling oxygen flow rate and ozone generator power. On the contrary, the solubility of ozone in $NH_4OH$ was very low and strongly depended on the concentration of $NH_4OH$ and pH. The redox potential of ozone was saturated within 10 minutes in DI water and decreased rapidly with the addition of $NH_4OH$. The behavior of ozone in $NH_4OH$ is well explained by redox potential calculation.

• 대한의용생체공학회:의공학회지
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• 제30권3호
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• pp.199-204
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• 2009

Iridium oxide films (IROFs) have been extensively studied as a material for electrical stimulation of neurons, as iridium oxide has higher charge storage capacity than other metal films. More recently, sputtered iridium oxide film (SIROF) has been studied, because it can be made more conveniently than activated iridium oxide film (AIROF). Typically, the SIROFs are grown at temperatures from 400 to 600 $^{\circ}C$. However, such high temperatures cannot be used when the iridium oxide (IrOx) film is to be deposited on a flexible polymer material, such as polyimide. In this paper, we show that we can still obtain excellent characteristics in SIROFs grown without heating (cold SIROF), by optimizing the growth conditions. We show that the oxygen flow rate is a critical parameter for controlling the surface properties of a cold SIROF. At an oxygen flow rate of 12 seem, the cold SIROF exhibited a charge storage capacity (CSC) of 60 mC/cm$^2$, which is comparable to or better than other published values for iridium oxide films including heated SIROFs. The film produced under these conditions also had the minimum impedance value of all cold SIROFs deposited for this study. A stability test and biocompatibility test also demonstrated the superiority of the optimized cold SIROF.

• 한국응용과학기술학회지
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• 제21권1호
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• pp.45-50
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• 2004

The effects of reaction temperature and flow rate of reactants on the methane conversion, product selectivity, product ratio, and carbon deposition were investigated with 13wt% Ni/MgO catalyst. Reaction temperatures were changed from 600 to $850^{\circ}C$, and reactants flow rates were changed from 100 to 200 mL/mim. There were no significant changes in the methane conversion observed in the range of temperatures used. It is possibly stemmed from the nearly total exhaustion of oxygen introduced. The selectiveties of hydrogen and carbon monoxide did not largely depend on the reaction temperature. The selectivities of hydrogen and carbon monoxide were 96 and 90%, respectively. Carbon deposition observed was the smallest at $750^{\circ}C$ and the largest at $850^{\circ}C$. It is found that the proper reaction temperature is $750^{\circ}C$. The best reactant flow rate was 150 ml/min.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2010년도 제39회 하계학술대회 초록집
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• pp.168-168
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• 2010

Transparent conduction oxides (TCOs) films is extensively reported for optoelectronic devices application such as touch panels, solar cells, liquid crystal displays (LCDs), and organic light emitting diodes(OLEDs). Among the many TCO film, indium tin oxide(ITO) is in great demand due to the growth of flat panel display industry. However, indium is not only high cost but also its deposits dwindling. Therefore, many studies are being done on the transparent conductive oxides(TCOs). We fabricated a target of IZTO(In2O3:ZnO:SnO2=70:15:15 wt.%) reduced indium. Then, IZTO thin films were deposited on glass substrates by pulsed DC magnetron sputtering with various oxygen flow ratio. The substrate temperature was fixed at the room temperature. We investigated the electrical, optical, structural properties of IZTO thin films. The electrical properties of IZTO thin films were dependent on the oxygen partial pressure. As a result, the most excellent properties of IZTO thin films were obtained at the 3% of oxygen flow rate with the low resistivity of $7.236{\times}10^{-4}{\Omega}cm$. And also the optical properties of IZTO thin films were shown the good transmittance over 80%. These IZTO thin films were used to fabricated organic light emitting diodes(OLEDs) as anode and the device performances studied. The OLED with an IZTO anode deposited at optimized deposition condition showed good brightness properties. Therefore, IZTO has utility value of TCO electrode although it reduced indium and we expect it is possible for the IZTO to apply to flexible display due to the low processing temperature.

• Journal of Mechanical Science and Technology
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• 제19권11호
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• pp.2068-2076
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• 2005

The influence of oxygen concentration and CO$_{2}$ as diluent in oxidizer side on soot characteristics was studied by Laser Induced Incandescence, Time Resolved LII and Transmission Electron Microscopy photography in non-premixed co flowing flames. Through the comparison of TEM photographs and the decay rate of LII signal, suitable two delay times of TIRE-LII method and signal sensitivity ($\Delta$S$_{TIRE-LII/) were determined. The effects of O$_{2}$ and CO$_{2}$ as diluent in oxidizer side on soot formation are investigated with these calibrated techniques. The O$_{2}$+CO$_{2}$, N$_{2}$, and [Ar+CO$_{2}$] mixture in co-flow were used to isolate CO2 effects systematically. The number concentration of primary particle and soot volume fraction abruptly decrease by the addition of CO$_{2}$ to the co-flow. This suppression is resulted from the short residence time in inception region because of the late nucleation and the decrease of surface growth distance by the low flame temperature due to the higher thermal capacity and the chemical change of CO$_{2}$ including thermal dissociation. As the oxygen concentration increases, the number concentration of soot particles at the inception region increases and thus this increase of nucleation enhances the growth of soot particle.

• 한국어병학회지
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• 제16권2호
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• pp.91-102
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• 2003

The present study was investigated the effects of chlorine dioxide ($CIO_2$) on the rcspimtory metabolism of olive flounder (Parolichlhys olivaceus) imtermittently exposed to seawater chlorinated by $CIO_2$:. Oxygen consumption of flounder before and after once or twice $CIO_2$-treatment with 12 hr- or/and 24 hr-interval were serially measured with automatic intenniteent-flow respirometer system (AIRS). The oxygen consumption rates of flowKier exposed to 0.10 and 0.20 ppm$CIO_2$, were not different from the control fish prior to the once or twice chlorinations . On the other hand, the respiratory metabolic rates of flounder exposed to 0.30 ppm$CIO_2$ were significantly increased 15% and 22 - 23% after the once and twice chlorinations compared to the control fish. respectively. The flounder exposed In 0.40 and 0.50 ppm$CIO_2$: died within 4 hr and I hr. respectively. The elevation( respiratory metabolism in flounder exposed toO.30 ppm$CIO_2$ and above is considered due to physiological stress caused by $CIO_2$ exposure.

• 한국수소및신에너지학회논문집
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• 제34권1호
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• pp.38-46
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• 2023

Carbon neutrality policies have been strengthened to reduce emissions, and the importance of technology road maps has been emphasized. In the global industrial boiler market, carbon neutrality is implemented through fuel diversification of methane-hydrogen mixture gas. However, various problems such as flashback and flame unstability arise. There is a limit to implementing the actual system as it remains in the early stage. Therefore, it is necessary to secure the source technology of methane-hydrogen hybrid combustion system applicable to industrial fields. In this study, control program for methane-hydrogen fuel conversion was developed to expect various parameters. After determining the hydrogen mixing ratio and the input air flow, the fuel conversion control algorithm was constructed to get the parameters that achieve the target oxygen concentration in the exhaust gas. LabVIEW program was used to derive correlations among hydrogen mixing rate, oxygen concentration in exhaust gas, input amount of air and heating value.