Construction and Evaluation of $O_3$ Condensation System for Oxide Thin Film
(산화 박막 성장을 위한 $O_3$ 농축 시스템의 구축 및 평가)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2003.07b
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- pp.1192-1195
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- 2003