Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.11a
- /
- Pages.272-275
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- 2002
Characteristics of Oxidation System for Superconductor Thin Film( I )
초전도 박막 제작을 위한 산화 시스템의 특성( I )
- Lim, J.K. (Dongshin Univ.) ;
- Park, Y.P. (Dongshin Univ.) ;
- Yang, D.B. (Dongshin Univ.) ;
-
Kim, J.H.
(KOPTI)
;
- Lee, H.K. (KCCI) ;
- Park, N.B. (Chungju Univ.)
- Published : 2002.11.07
Abstract
An ozone condensation system is evaluated in the viewpoint of an ozone supplier for oxide thin film growth. Ozone is condensed by the adsorption and distillation method. Then their concentrations are analyzed by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is found to be available to the concentration evaluation from dilution to highly condensed ozone. The highest ozone concentration condensed by the adsorption method is evaluated to be 96 mol%. The ozone is supplied for a sufficiently long time to grow oxide thin films.
Keywords
- ozone condensation;
- absolute ozone concentration;
- thermal decomposition method;
- Q-mass analyzing method