• Title/Summary/Keyword: Oxidation nanolithography

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Magnetoresistance of Planar Ferromagnetic Junction Defined by Atomic Force Microscopy

  • Yu, D.S.;Jerng, S.K.;Kim, Y.S.;Chun, S.H.
    • Journal of Magnetics
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    • v.14 no.4
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    • pp.172-174
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    • 2009
  • Nanolithography by atomic force microscope local oxidation was applied to the fabrication of planar-type Ni/Ni oxide/Ni junctions from 10 nm-thick Ni films. The junction characteristics were sensitive to the lithography conditions such as the bias voltage. Successful oxidation produced junctions of nonlinear current-voltage characteristics, implying the formation of oxide barriers. Magnetoresistance (MR) at low temperatures resembled that of spin valves.

Anodic Oxidation Lithography via Atomic Force Microscope on Organic Resist Layers (유기 저항막을 이용한 원자힘 현미경 양극산화 패터닝 기술)

  • Kim, Sung-Kyoung;Lee, Hai-Won
    • Polymer(Korea)
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    • v.30 no.3
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    • pp.187-195
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    • 2006
  • Atomic force microscope (AFM)-based anodic oxidation lithography has gained great in forests in fabricating nanometer scale features on semiconductor or metal substrates beyond the limitation of optical lithography. In this article AFM anodic oxidation lithography and its organic resist layers are introduced based on our previous works. Organic resist layers of self-assembled monolayers, Langmuir-Blodgett films and polymer films aye suggested to play a key role in enhancing the aspect ratio of producing features, the lithographic speed, and spatial precision in AFM anodic oxidation lithography.

Nanochannels for Manipulation of DNA Molecule using Various Fabrication Molecule

  • Hwang, M.T.;Cho, Y.H.;Lee, S.W.;Takama, N.;Fujii, T.;Kim, B.J.
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.7 no.4
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    • pp.254-259
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    • 2007
  • In this report, several fabrication techniques for the formation of various nanochannels (with $SiO_2$, Si, or Quartz) are introduced. Moreover, simple fabrication technique for generating $SiO_2$ nanochannels without nanolithography is presented. By using different nanochannels, the degree of stretching DNA molecule will be evaluated. Finally, we introduce a nanometer scale fluidic channel with electrodes on the sidewall of it, to detect and analyze single DNA molecule. The cross sectional shape of the nanotrench is V-groove, which was implemented by thermal oxidation. Electrodes were deposited through both sidewalls of nanotrench and the sealing of channel was done by covering thin poly-dimethiysiloxane (PDMS) polymer sheet.

Surface modification for block copolymer nanolithographyon gold surface

  • Hwang, In-Chan;Bang, Seong-Hwan;Lee, Byeong-Ju;LeeHan, Bo-Ram;Kim, Hyeong-Jun
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2009.11a
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    • pp.33.2-33.2
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    • 2009
  • Block copolymer lithography has attracted great attention for emerging nanolithography since nanoscaleperiodic patterns can be easily obtained through self-assembly process without conventional top-down patterning process. Since the morphologies of self-assembled block copolymer patterns are strongly dependent on surface energy of a substrate, suitable surface modification is required. Until now, the surface modification has been studied by using random copolymer or self-assembled mono layers (SAMs). However, the research on surface modifications has been limited within several substrates such as Si-based materials. In present study, we investigated the formation of block copolymer on Au substrate by $O_2$ plasma treatment with the SAM of 3-(p-methoxy-phenyl)propyltrichloro-silane [MPTS, $CH_3OPh(CH_2)_3SiCl_3$]. After $O_2$ plasma treatment, the chemical bonding states of the surface were analyzed by X-ray photoelectron spectroscopy (XPS). The static contact angle measurement was performed to study the effects of $O_2$ plasma treatment on the formation of MPTS monolayer. The block copolymer nanotemplates formed on Au surface were analyzed by scanning electron microscopy. The results showed that the ordering of self-assembled block copolymer pattern and the formation of cylindrical nano hole arrays were enhanced dramatically by oxygen plasma treatment. Thus, the oxidation of gold surface by $O_2$ plasma treatment enables the MPTS to form the monolayer assembly leading to surface neutralization of gold substrates.

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