• Title/Summary/Keyword: Optical Fabrication

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Fabrication and Characterization of LPCVD LPCVD $P_2O_5-SiO_2$ Filmsfor Integrated Optics (2):-Comparison Between TMPate and $PH_3$ as a Dopant of P in PSG Films- (LPCVD $P_2O_5-SiO_2$ 집적광학박막의 제작 및 특성연구(2): TMPate와 $PH_3$의 비교)

  • 정환재;이형종;이용태;전은숙;김순창;양순철
    • Korean Journal of Optics and Photonics
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    • v.6 no.3
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    • pp.233-238
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    • 1995
  • '#65279;We made $P_2O_5-SiO_2$ films on silicon for integrated optics application by low pressure chemical vapor deposition using TEOS(tetraethylorthosilicate), TMPite(trimethylphosphite) and phosphine($PH_3$). And We studied and compared between TMPite and PH, as a dopant of P in PSG films in the aspect of the de,position characteristics. Deposition rate of TMPate-PSG films was $55 \AA/min$ which was smaller than 90 A/min , that of $PH_3-PSG$ films. Thickness deviation of TMPate-PSG films was 2% and that of PH3-PSG was 4.5%. So TMPate-PSG films had a good quality in thickness uniformity. The range of refractive index was controlled from 1.445 to 1.468 at 633 nm in TMPate-PSG films and it was controlled from 1.456 to 1.476 in $PH_3-PSG$ films.

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Fabrication and Modulation Characteristic of TE-selective P-I-i-I-N GaAs/Al0.35Ga0.65As waveguide phase modulator (TE 모드의 위상변화만을 일으키는 P-I-i-I-N GaAs/Al0.35Ga0.65As 도파로 위상변조기의 제작 및 변조 특성)

  • Kim, Sun-Pil;Lee, Sang-Sun;Lee, Seok;Woo, Deok-Ha;Kim, Sun-Ho
    • Korean Journal of Optics and Photonics
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    • v.14 no.2
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    • pp.184-188
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    • 2003
  • We fabricated a P-I-i-I-N $GaAs/Al_{0.35}Ga_{0.65}As$waveguide phase modulator with significant phase shift for the TE mode but negligible for the TM mode. We selected the P-I-i-I-N structure to cause a phase shift about the TM mode. The wavelength of $\lambda=1.55$\mu\textrm{m}$ was measured for both the TE and TM modes, respectively. As a result, the measured phase shift efficiency ($\Delta\phi$) by using the Fabry-Perot resonance method was $7.9^{\circ}/V.mm$ for TE-polarized light. Also, no modulation was observed for TM-polarized light.

Widely Tunable Double-Ring-Resonator Add/Drop Filter (광대역 파장가변 이중 링 공진기 Add/Drop 필터)

  • Lee, Dong-Hyun;Lee, Tae-Hyung;Park, Joon-Oh;Kim, Su-Hyun;Chung, Young-Chul
    • Korean Journal of Optics and Photonics
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    • v.18 no.3
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    • pp.216-220
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    • 2007
  • A widely tunable add/drop filter composed of double ring resonators is implemented with high-index-contrast polymer waveguide. To enhance the productivity, directional couplers are designed to have good fabrication tolerance. The refractive indices of the core and cladding in the 1550 nm wavelength are 1.51 and 1.378, respectively. Drop response in comparison with neighborhood peak gets enhanced by more than 2.9 dB at the wavelength where both rings resonate. This filter can be used to build widely tunable laser diode through hybrid-integration with reflective SOA.

Surface Morphology and Quantum Size Effect of ZnS Thin Film Grown by Solution Growth Technique (용액성장된 ZnS 박막의 표면형상 및 양자사이즈효과)

  • Lee, Jong-Won;Lee, Sang-Uk;Jo, Seong-Ryong;Kim, Seon-Tae;Park, In-Yong
    • Korean Journal of Materials Research
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    • v.12 no.1
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    • pp.36-43
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    • 2002
  • In this study, the nanosized ZnS thin films that can be used for fabrication of blue light-emitting diodes, electro-optic modulators, and n-window layers of solar cells were grown by the solution growth technique (SGT), and their surface morphology and film thickness and grain size dependence on the growth conditions were examined. Based on these results, the quantum size effects of ZnS were systematically investigated. Governing factors related to the growth condition were the concentration of precursor solution, growth temperature, concentration of aq. ammonia, and growth duration. X-ray diffraction patterns showed that the ZnS thin film obtained in this study had the cubic structure ($\beta$-ZnS). With decreasing growth temperature and decreasing concentration of precursor solution, the surface morphology of film was found to be improved. Also, the film thickness depends largely on the ammonia concentration. In particular, this is the first time that the surface morphology dependence of ZnS film grown by SGT on the ammonia concentration is reported. The energy band gaps of samples were determined from the optical transmittance values, and were shown to vary from 3.69 eV to 3.91 eV. These values were substantially higher than 3.65 eV of bulk ZnS. It was also shown that the quantum size effect of SGT grown ZnS is larger than that of the ZnS films grown by most other growth techniques.

Biochip System for Environmental Monitoring using Nanobio Technology (나노바이오기술을 이용한 환경모니터링용 바이오칩 시스템)

  • Kim, Young-Kee;Min, Jun-Hong;Oh, Byung-Keun;Choi, Jeong-Woo
    • KSBB Journal
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    • v.22 no.6
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    • pp.378-386
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    • 2007
  • Bio-sensing devices, which are basically integrated and miniaturized assay systems consisted of bioreceptor and signal transducer, are advantageous in several ways. In addition to their high sensitivity, selectivity, simplicity, multi-detection capability, and real time detection abilities, they are both very small and require relatively inexpensive equipments. Two core technologies are required to develop bio-sensing devices; the fabrication of biological receptor module (both of receptor development and immobilisation of them) and the development of signal transducing instruments containing signal generation technique. Various biological receptors, such as enzymes, DNA/RNA, protein, and cell were tried to develop bio-sensing devices. And, the signal transducing instruments have also been extensively studied, especially with regard to electrochemical, optical, and mass sensitive transducers. This article addresses bio-sensing devices that have been developed in the past few years, and also discusses possible future major trends in these devices.

Preparation and Characterization of Multilayer Microcapsules using Biocompatible Polymers (생체적합성 고분자를 사용한 다층 조립 구조 캡슐의 제조와 특성)

  • Jeon, Woohong;Kim, Gwang Yeon;Kim, Gue-Hyun;Ha, Chang-Sik
    • Korean Chemical Engineering Research
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    • v.48 no.2
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    • pp.178-184
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    • 2010
  • The aim of this work is the fabrication of polyelectrolyte microcapsules composed of biocompatible polymers such as chitosan, heparin and alginate, to encapsulate the fluorescein isothiocyanate(FITC)-albumin, and to investigate the protein release behavior therefrom. Polyelectrolyte capsules with 4-layer structures could be prepared with biocompatible materials by oppositely charged adsorption using melamin-foramide as a template. Transmission electron microscope(TEM), scanning electron microscope(SEM) and optical microscope confirmed hollow capsule structures. Protein release before and after encapsulation was monitored with a UV-Vis spectrometer. Microcapsules have different behaviors depending on the kind of polyelectrolyte polymers, chitosan-heparin capsules or chitosan-alginate capsules. In conclusion, the polyelectrolyte multilayer shells can be switched between an open and closed state by means of tuning the pH value.

The Characteristics of High Temperature Crystallized Poly-Si for Thin Film Transistor Application (박막트랜지스터 응용을 위한 고온 결정화된 다결정실리콘의 특성평가)

  • 김도영;심명석;서창기;이준신
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.53 no.5
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    • pp.237-241
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    • 2004
  • Amorphous silicon (a-Si) films are used in a broad range of solar cell, flat panel display, and sensor. Because of the greater ease of deposition and lower processing temperature, thin films are widely used for thin film transistors (TFTs). However, they have lower stability under the exposure of visible light and because of their low field effect mobility ($\mu$$_{FE}$ ) , less than 1 c $m^2$/Vs, they require a driving IC in the external circuits. On the other hand, polycrystalline silicon (poly-Si) thin films have superiority in $\mu$$_{FE}$ and optical stability in comparison to a-Si film. Many researches have been done to obtain high performance poly-Si because conventional methods such as excimer laser annealing, solid phase crystallization and metal induced crystallization have several difficulties to crystallize. In this paper, a new crystallization process using a molybdenum substrate has been proposed. As we use a flexible substrate, high temperature treatment and roll-to-roll process are possible. We have used a high temperature process above 75$0^{\circ}C$ to obtain poly-Si films on molybdenum substrates by a rapid thermal annealing (RTA) of the amorphous silicon (a-Si) layers. The properties of high temperature crystallized poly-Si studied, and poly-Si has been used for the fabrication of TFT. By this method, we are able to achieve high crystal volume fraction as well as high field effect mobility.

MoO3/p-Si Heterojunction for Infrared Photodetector (MoO3 기반 실리콘 이종접합 IR 영역 광검출기 개발)

  • Park, Wang-Hee;Kim, Joondong;Choi, In-Hyuk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.30 no.8
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    • pp.525-529
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    • 2017
  • Molybdenum oxide ($MoO_3$) offers pivotal advantages for high optical transparency and low light reflection. Considering device fabrication, n-type $MoO_3$ semiconductor can spontaneously establish a junction with p-type Si. Since the energy bandgap of Si is 1.12 eV, a maximum photon wavelength of around 1,100 nm is required to initiate effective photoelectric reaction. However, the utilization of infrared photons is very limited for Si photonics. Hence, to enhance the Si photoelectric devices, we applied the wide energy bandgap $MoO_3$ (3.7 eV) top-layer onto Si. Using a large-scale production method, a wafer-scale $MoO_3$ device was fabricated with a highly crystalline structure. The $MoO_3/p-Si$ heterojunction device provides distinct photoresponses for long wavelength photons at 900 nm and 1,100 nm with extremely fast response times: rise time of 65.69 ms and fall time of 71.82 ms. We demonstrate the high-performing $MoO_3/p-Si$ infrared photodetector and provide a design scheme for the extension of Si for the utilization of long-wavelength light.

A Study on the Fabrication of Multi-Walled Nanotubes (MWCNT) Based Thin Film and Chemical Sensor Operation Characteristics (Multi-Walled Carbon Nanotubes (MWCNT) 인쇄박막의 제작과 화학센서 동작 특성에 관한 연구)

  • Noh, Jae Ha;Choi, Junseck;Ko, Dongwan;Seo, Joonyoung;Lee, Sangtae;Jung, Jung-Yeul;Chang, Jiho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.33 no.3
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    • pp.181-185
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    • 2020
  • Hazardous and noxious substance (HNS) detection sensors were fabricated using multi-walled carbon nanotubes (MWCNTs) and various binder materials for ion batteries. To obtain uniformly printed films, the printing precision according to the substrate cleaning method was monitored, and the printing paste mixing ratio was investigated. Binders were prepared using styrene butadiene rubber + carboxymethyl cellulose (SBR+CMC), polyvinylidene fluoride + n-methyl-2-pyrrolidene (PVDF+NMP), and mixed with MWCNTs. The surface morphology of the printed films was examined using an optical microscope and a scanning electron microscope, and their electrical properties are investigated using an I-V sourcemeter. Finally, sensing properties of MWCNT printed films were measured according to changes in the concentration of the chemical under the various applied voltages. In conclusion, the MWCNT printed films made of (SBR+CMC) were found to be feasible for application to the detection of hazardous and noxious chemicals spilled in seawater.

Sensing Technologies for Grain Crop Yield Monitoring Systems: A Review

  • Chung, Sun-Ok;Choi, Moon-Chan;Lee, Kyu-Ho;Kim, Yong-Joo;Hong, Soon-Jung;Li, Minzan
    • Journal of Biosystems Engineering
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    • v.41 no.4
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    • pp.408-417
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    • 2016
  • Purpose: Yield monitoring systems are an essential component of precision agriculture. They indicate the spatial variability of crop yield in fields, and have become an important factor in modern harvesters. The objective of this paper was to review research trends related to yield monitoring sensors for grain crops. Methods: The literature was reviewed for research on the major sensing components of grain yield monitoring systems. These major components included grain flow sensors, moisture content sensors, and cutting width sensors. Sensors were classified by sensing principle and type, and their performance was also reviewed. Results: The main targeted harvesting grain crops were rice, wheat, corn, barley, and grain sorghum. Grain flow sensors were classified into mass flow and volume flow methods. Mass flow sensors were mounted primarily at the clean grain elevator head or under the grain tank, and volume flow sensors were mounted at the head or in the middle of the elevator. Mass flow methods used weighing, force impact, and radiometric approaches, some of which resulted in measurement error levels lower than 5% ($R^2=0.99$). Volume flow methods included paddle wheel type and optical type, and in the best cases produced error levels lower than 3%. Grain moisture content sensing was in many cases achieved using capacitive modules. In some cases, errors were lower than 1%. Cutting width was measured by ultrasonic distance sensors mounted at both sides of the header dividers, and the errors were in some cases lower than 5%. Conclusions: The design and fabrication of an integrated yield monitoring system for a target crop would be affected by the selection of a sensing approach, as well as the layout and mounting of the sensors. For accurate estimation of yield, signal processing and correction measures should be also implemented.