• Journal of the Semiconductor & Display Technology
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• v.9 no.1
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• pp.17-21
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• 2010

Currently miniaturized electron-optical columns find their way into electron beam lithography systems. For better lithography process, it is required to make smaller spot size and longer working distance. But, the micro-columns of the multi-beam lithography system suffer from chromatic and spherical aberration, even when the electron beam is exactly on the symmetric axis of the micro-column. The off-axis error of the electron emitting source is expected to become worse with increasing off-axis distance of the focusing spot. Especially the electron beams far from the system optical axis have a non-negligible asymmetric intensity distribution in the micro-column. In this paper, the effect of the off-axis e-beam source is analyzed. To analyze this effect is to introduce a micro-column model of which the e-beam emitting source is aligned with the center of the electron beam by shifting them perpendicular to the system optical axis. The presented solution can be used to analysis the performance of the multi-electron-beam system. The performance parameters, such as the working distances and the focusing position are obtained by the computational simulations as a function of the off-axis distance of the emitting source.

• Structural Engineering and Mechanics
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• v.62 no.1
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• pp.43-54
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• 2017

In this study, the failure behavior of composite material in the biaxial and off-axis loading is studied based on a computational micromechanical model. The model is developed so that the combination of mechanical and thermal loading conditions can be considered in the analysis. The modified generalized plane strain assumption of the theory of elasticity is used for formulation of the micromechanical modeling of the problem. A truly meshless method is employed to solve the governing equation and predict the distribution of micro-stresses in the selected RVE of composite. The fiber matrix interface is assumed to be perfect until the interface failure occurs. The biaxial and off-axis loading of the SiC/Ti and Kevlar/Epoxy composite is studied. The failure envelopes of SiC/Ti and Kevlar/Epoxy composite in off-axis loading, biaxial transverse-transverse and axial-transverse loading are predicted based on the micromechanical approach. Various failure criteria are considered for fiber, matrix and fiber-matrix interface. Comparison of results with the available results in the litreture shows excellent agreement with experimental studies.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2002.10a
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• pp.96-99
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• 2002

In order to determine the in-plane shear properties of unidirectional carbon fiber reinforced aluminum laminate composites, a new Iosipescu shear test fixture was developed, by using a fixture undergoing tensile force for the specimen edge to be subjected to compressive loads assumption, under plane stress. Also, to compare the results, Iosipescu shear test method by the modified Wyoming fixture and the off-axis tensile test were performed to determine the shear properties. Off-axis tension test was performed by using new oblique-shaped tabs proposed by Sun and Chung. [5] The oblique tabs reduced remarkably end-constraint effects of off-axis specimens with a aspect ratio of about eight. It is observed through the experimental results show that there is no significant difference between off-axis test results and those of Iosipescu shear test.

• Current Optics and Photonics
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• v.3 no.5
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• pp.374-381
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• 2019

This study examined a method for designing the optical cavity of a non-dispersive infrared gas detector. The infrared gas detector requires an optical cavity design to lengthen the ray path. However, the optical cavity with multiple reflecting surfaces has off-axis aberration due to the characteristics of the reflecting optical system. The rays were parallelized by using the off-axis parabolic mirror to easily increase the ray path and eliminate off-axis aberration so that the rays are admitted to the effective area of the infrared detector uniformly. A prototype of an infrared gas detector was produced with the designed optical cavity to confirm the performance.

• Journal of the Korean Vacuum Society
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• v.20 no.2
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• pp.106-113
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• 2011

We describe a single shot off-axis digital holography based on a Mach-Zehnder interferometic scheme for measuring temperature distribution of a microheater. The proposed scheme has the capability of reconstructing object phase image which is dependent of the temperature distribution in real time. Experimental results shows that there is a moderate linear relationship between the measured phase and temperature in the range of $20^{\circ}C$ to $60^{\circ}C$. We expect that the proposed system can provide a very reliable and fast solution in various surface temperature distribution measurement applications.

• Proceedings of the KIEE Conference
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• 1995.11a
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• pp.361-363
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• 1995

High quality $Y_1Ba_2Cu_3O_{7-x}$ thin films have been fabricated by pulsed Nd:YAG laser deposition using an unusual 'off-axis' target-substrate geometry. Various properties of superconducting $Y_1Ba_2Cu_3O_{7-x}$ thin films have been studied systematically as a function of oxygen pressure during the deposition, in both 'on-axis' and the unusual 'off-axis' target substrate geometry. In the 'off-axis' geometry, one can completely eliminate the so-called 'laser droplets' form the thin surface and thus obtain smooth high qualify films. It is found that films with optimum structural and electrical properties are obtained at a lower oxygen pressure range during the 'off-axis' deposition when compared with that required in the 'on-axis' deposition geometry.

• Proceedings of the Materials Research Society of Korea Conference
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• 1996.05a
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• pp.62-62
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• 1996

• Radiation Oncology Journal
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• v.14 no.3
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• pp.237-244
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• 1996

Purpose : The accurate dosimetry of independent collimator equipped for 6MV and 15MV X-ray beam was investigated to search for the optimal correction factor. Materials and Methods : The field size factors, beam quality and dose distribution were measured by using 6MV, 15MV X-ray Field size factors were measured from $3{\times}3cm^2$ to $35{\times}35cm^2$ by using 0.6cc ion chamber (NE 2571) at Dmax. Beam qualities were measured at different field sizes, off-axis distances and depths. Isodose distributions at different off-axis distance using $10\times10cm^2$ field were also investigated and compared with symmetric field. Result: 1) Relative field size factors was different along lateral distance with maximum changes in $3.1\%$ for 6MV and $5\%$ for 15MV. But the field size factors of asymmetric fields were identical to the modified central-axis values in symmetric field, which corrected by off-axis ratio at Dmax. 2) The HVL and PDD was decreased by increasing off-axis distance. PDD was also decreased by increasing depth For field size more than $5{\times}cm^2$ and depth less than 15cm, PDD of asymmetric field differs from that of symmetric one ($0.5\~2\%$ for 6MV and $0.4\~1.4\%$ for 15MV). 3) The measured isodose curves demonstrate divergence effects and reduced doses adjacent to the edge close to the flattening filter center was also observed. Conclusion . When asymmetric collimator is used, calculation of MU must be corrected with off-axis and PDD with a caution of underdose in central axis.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.2
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• pp.33-39
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• 1998

A six-beam accelerometer with self-compensated off-axis sensitivity was fabricated onthe selectively diffused (111)-oriented n/n$^{+}$/n silicon substrates by a unique porous silicon micromachining technique, which has self-stip characteristics and highly seletive formation of porous silicon layer during anodic reaction. Also, the characteristics of the fabricated accelerometer were investigated. The sensitivity of the acceleormeter added up outputs of three bridges through a summing circuit was 0.68 mV/g and the nonlinearity was less than 2% of the full scale output. The measured first resonant frequency was 4.236 kHz. When the outputs of three bridges were compared to summing output of bridges obtained through summing circuit, the normal output for Z-axis acceleration exhibited the same value s summing outputs of three bridges without reduction of sensitivity and thus the sensitivity decrease due to additional beam was compensated. Although a maximum off-axis sensitivity in one bridge of the accelerometer showed 17% of normal sensitivity, the off axis sensitivity obtained from summing output of three bridges decreased to 1.0%. Therefore, the self-elimination of off-axis sensitivity can be simply realized by obtaining the output of the sensor through summing circuit.t.

• Current Optics and Photonics
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• v.5 no.4
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• pp.402-408
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• 2021

An off-axis system refers to an optical system in which the optical axis and normal vector at the vertex of each surface do not match. The most important specification in an optical system is its focal length. Among the various methods for measuring the focal length, the most suitable method for the off-axis system is the method that adopts magnification. However, head-mounted display (HMD) optics must be measured while considering the virtual image distance, which is not infinity owing to product characteristics. For the virtual image distance, a camera with a focusing function was used. By measuring HMD optics via this magnification method, the error generated in this measurement was 0.68% of the HMD's focal length, which is within the 1%-3% range of the conventionally permitted design error for the focal length allowed at the optical design stage. Therefore, it can be verified that the measurement accuracy of the method proposed in this study is sufficiently feasible in practice.