Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Laser-Droplet Free high-$T_c$ Superconducting thin films by Pulsed Laser Deposition

PLD를 이용한 레이저 드롭릿 없는 고온 초전도 박막의 형성

  • Hwang, Eui-Hyeon (Department of Electrical Engineering, Korea University) ;
  • Kim, Hui-Kwon (Department of Electrical Engineering, Korea University) ;
  • Moon, Byung-Moo (Department of Electrical Engineering, Korea University)
  • 황의현 (고려대학교 전기공학과) ;
  • 김희권 (고려대학교 전기공학과) ;
  • 문병무 (고려대학교 전기공학과)
  • Published : 1995.11.18
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Abstract

High quality $Y_1Ba_2Cu_3O_{7-x}$ thin films have been fabricated by pulsed Nd:YAG laser deposition using an unusual 'off-axis' target-substrate geometry. Various properties of superconducting $Y_1Ba_2Cu_3O_{7-x}$ thin films have been studied systematically as a function of oxygen pressure during the deposition, in both 'on-axis' and the unusual 'off-axis' target substrate geometry. In the 'off-axis' geometry, one can completely eliminate the so-called 'laser droplets' form the thin surface and thus obtain smooth high qualify films. It is found that films with optimum structural and electrical properties are obtained at a lower oxygen pressure range during the 'off-axis' deposition when compared with that required in the 'on-axis' deposition geometry.

Keywords