Surface Reactions on the Bi4-xLaxTiO3O12 Thin Films Etched in Inductively Coupled CF4/Ar Plasma (유도결합 CF4/Ar 플라즈마에 의한 Bi4-xLaxTiO3O12 박막의 식각 표면 반응)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.16 no.5
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- pp.378-384
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- 2003