Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2002.05b
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- Pages.7-11
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- 2002
Etching characteristics of gold thin films using inductively coupled $Cl_2/Ar$ plasma
$Cl_2/Ar$ 유도 결합 플라즈마에 의한 gold 박막의 식각특성
Abstract
In this study, Au thin films were etched with a