• Proceedings of the KWS Conference
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• 2004.05a
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• pp.316-318
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• 2004

In recent years, plastic waste has been recognized as a worldwide environmental issue. To solve the disposal problem of the plastic waste, alternative treatment such as the use of biodegradable plastic(polybutylene succinate: PBS) is indeed highly in demand due to its merit of PBS buried in soil decomposed into carbon dioxide and water. In the present study, for the production of further functional PBS with TiO$_2$ as photocatalyst, which shows the decomposition of detrimental organic compound and pollutant under ultraviolet irradiation, we attempted to prepare photocatalytic TiO$_2$ coatings on PBS substrate by HVOF and plasma spraying techniques under various conditions using three kinds of agglomerated powders (P200: 200nm, P30: 30nm, P7: 7nm). The microstructures of coatings were characterized with SEM and XRD analysis, and the photocatalytic efficiency of coatings was evaluated through the photo degradation of gaseous acetaldehyde. Therefore, such functional TiO$_2$-Plastic composite material is expected to considerably contribute to the reduction of aggravated environmental problem.

• Journal of the Semiconductor & Display Technology
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• v.6 no.3
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• pp.35-39
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• 2007

ITO(Indium Tin Oxide) is the most attractive TCO(Transparent Conducting Oxide) materials for LCD, PDP, OLEDs and solar cell, because of their high optical transparency and electrical conductivity. However due to the shortage of indium resource, hard processing at low temperature, and decrease of optical property during hydrogen plasma treatment, their applications to the display industries are limited. Thus, recently the Al-doped ZnO(AZO) has been studied to substitute ITO. In this study, we have investigated the effect of different substrate temperature(RT, $150^{\circ}C$, $225^{\circ}C$, $300^{\circ}C$) and working pressure(10 mTorr, 20 mTorr, 30 mTorr, 80 mTorr) on the characteristics of AZO(2 wt.% Al, 98 wt.% ZnO) films deposited by RF-magnetron sputtering. We have obtained AZO thin films deposited at low temperature and all the deposited AZO thin films are grown as colunmar. The average transmittance in the visible wavelength region is over 80% for all the films and transmittance improved with increasing substrate temperature. Electrical properties of the AZO films improved with increasing substrate temperature.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.1
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• pp.47-52
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• 2009

We studied the electrical characteristics of low-k SiOCH interlayer dielectric(ILD) films fabricated by plasma enhanced chemical vapor deposition (PECVD). BTMSM precursor was evaporated and introduced with the flow rates from 16 sccm to 25 sccm by 1 sccm step with the constant flow rate of 60 sccm $O_2$ in process chamber. The vibrational groups of SiOCH thin films were analyzed by FT!IR absorption lines, and the dielectric constant of the low-k SiOCH thin films were obtained by measuring C-V characteristic curves. The heat treatment on SiOCH thin films reduced the FTIR absorption intensity of the Si-O-$CH_3$ bonding group and Si-$CH_3$ bonding group but increased the intensity of Si-O-Si(C) bonding group. The SiOCH ILD films could have low dielectric constant $k\;{\simeq}\;2$ and also be reduced further by decreasing the $CH_3$ group density and increasing Si-O-Si(C) group density through annealing process.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.154-154
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• 2010

표면 passivation 효과향상 기술은 고효율의 결정질 실리콘 태양 전지를 제작하는데 필수적 요소이다. passivation을 통해서 전자와 전공의 재결합 속도를 낮출 수 있어 $V_{oc}$가 상승하고, 전류 값 증가를 통하여 효율 향상의 결과를 얻을 수 있기 때문이다. passivation을 위해서 다양한 각도로 접근하였다. 첫째는 $SiN_x$를 이용한 passivation효과 실험 둘째는 plasma 분위기에서 $N_2O$를 이용한 passivation효과 실험 그리고 마지막으로 RTO를 이용한 passivation 효과를 실험하였다. 첫 번째 실험은 PECVD를 이용하여 $SiN_x$를 증착한 후 굴절률 1.9 2.66으로 가변 한 결과 $SiN_x$ n=2.66에서 $D_{it}=8.82{\times}10^9$ [$cm^{-2}eV^{-1}$]로 우수한 passivation 효과를 얻을 수 있었다. 두 번째 실험에서는 PECVD를 이용해서 $N_2O$ treatment 후 SiON 증착한 샘플을 이용하여 시간 가변에 따른 passivation 효과를 확인하였다. 그 결과 $N_2O$ 50sccm, 100mTorr, 20W, $400^{\circ}C$ 8min 조건에서 가장 우수한 passivation 효과를 관찰할 수 있었다. 마지막 실험은 RTP를 이용하여 $SiO_2$ 박막에 대한 온도, 시간에 따른 passivation효과를 확인하였다. 그 결과 $O_2$ 3L/min $800^{\circ}C$ 2~3nm 3min 공정에서 lifetime이 220us(n형)의 결과를 얻을 수 있었다. 상기 세 실험결과를 태양전지제작에 응용한다면 고효율의 태양전지 제작이 가능할 것으로 사료된다.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.25 no.6
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• pp.245-251
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• 2015

We have applied mechanical alloying (MA) to produce soft magnetic composite material using a mixture of elemental $Fe_2O_3$-Mg powders. An optimal milling and heat treatment conditions to obtain soft magnetic ${\alpha}$-Fe/MgO composite with fine microstructure were investigated by X-ray diffraction, differential scanning calorimetry (DSC) and vibrating sample magnetometer (VSM) measurement. It is found that ${\alpha}$-Fe/MgO composite powders in which MgO is dispersed in ${\alpha}$-Fe matrix are obtained by MA of $Fe_2O_3$ with Mg for 30 min. The saturation magnetization of ball-milled powders increases with increasing milling time and reaches to a maximum value of 69.5 emu/g after 5 h MA. The magnetic hardening due to the reduction of the ${\alpha}$-Fe grain size by MA was also observed. Densification of the MA powders was performed in a spark plasma sintering (SPS) machine at $800{\sim}1000^{\circ}C$ under 60 MPa. X-ray diffraction result shows that the average grain size of ${\alpha}$-Fe in ${\alpha}$-Fe/MgO nanocomposite sintered at $800^{\circ}C$ is in the range of 110 nm.

• Korean Chemical Engineering Research
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• v.51 no.3
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• pp.388-393
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• 2013

The study was focused to evaluate the possibility for combination membrane of bacterial cellulose (BC) and graphene with high electrical properties. BC with natural polymer matrix was known to have strong physical strength. For the combination of graphene with BC, the surface of graphene was modified with oxygen plasma by changing strength and time of radio waves in room temperature. Water contact angle of modified graphene grew smaller from $130^{\circ}$ to $12^{\circ}$. XPS analysis showed that oxygen content after treatment increased from 2.99 to 10.98%. Damage degree of graphene was examined from $I_D/I_G$ ratio of Raman analysis. $I_D/I_G$ ratio of non-treated graphene (NTG) was 0.11, and 0.36 to 0.43 in plasma treated graphene (PTG), increasing structural defects of PTG. XRD analysis of PTG membrane with BC was $2{\theta}$ same to BC only, indicating chemically combined membrane. In FT-IR analysis, 1,000 to 1,300 $cm^{-1}$ (C=O) peak indicating oxygen radicals in PTG membrane had formed was larger than NTG membrane. The results suggest that BC as an alternation of plastic material for graphene combination has a possibility in some degree on the part like transparent conductive films.

• Childhood Kidney Diseases
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• v.1 no.2
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• pp.179-182
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• 1997

Cyclosporine is an immunosuppressant usually used to prevent renal transplantation rejection. Nephrotoxicity and hypertension are considered as the most frequent side effects of cyclosporine treatment. The neurotoxic effects of cyclosporine such as agitation, anxiety, delirium, depression and psychosis have recently been found. Methylprednisolone may increase as well plasma concentration of cyclosporine, which leads to side effects. Here we report a $Henoch-Sch\"{o}nlein$ nephritis patient treated with cyclosporine and methylprednisolone who has experienced psychosis including visual and auditory hallucination and convulsion.

• Proceedings of the Korean Magnestics Society Conference
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• 2012.11a
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• pp.29-30
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• 2012

• The Korean Journal of Ceramics
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• v.3 no.1
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• pp.21-23
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• 1997

Dependences of total photoyields on incident photon energies were measured using synchrotron radiation light for different chemical-vapor-deposited diamond with differently treated surface. Results show that a considerable amount of gap states are presented for as-grown specimens with H-terminated, that negative electron affinity (NEA) is realized for H-plasma-treated specimens, and that sufficient O-treatment to NEA specimens results in positive electron affinity. The observed electron affinity can be explained in terms of differences in strength of the surface dipole layer formed by difference in the electron negativity among C, H and O atoms.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1914-1916
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• 2003

최근 PDMS를 이용한 미세구조물의 제작을 통한 LOC(lap-on-a-chip) 개발에 대한 연구가 많이 진행되고 있다. 본 연구에서는 PDMS와 여러기판(유리와 실리콘) 사이의 접합 공정에 관한 연구를 하였으며, 특히 PDMS 표면의 물리적, 화학적 변화와 접합 특성과의 관계를 고찰하였다. $O_2$ 플라즈마를 사용하여 표면 처리된 기판의 표면에너지를 접촉각 측정방식으로 측정하였다. 또한 XPS를 이용하여 표면의 화학조성 변화 관찰하였으며, AFM으로 플라즈마 도즈량에 따른 표면 거칠기를 조사하였다.