Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 6 Issue 3
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- Pages.35-39
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- 2007
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- 1738-2270(pISSN)
Electrical and Optical Properties of Al-doped ZnO Thin Films
Al-doped ZnO 투명 전도성 박막(TCO)의 전기적 광학적 특성
- Hong, Youn-Jeong (Dept. of Advanced Materials Engineering, Korea University of Technology and Education) ;
- Lee, Kyu-Mann (Dept. of Advanced Materials Engineering, Korea University of Technology and Education) ;
- Kim, In-Woo (AMLCD Division, Samsung Electronics)
- Published : 2007.09.30
Abstract
ITO(Indium Tin Oxide) is the most attractive TCO(Transparent Conducting Oxide) materials for LCD, PDP, OLEDs and solar cell, because of their high optical transparency and electrical conductivity. However due to the shortage of indium resource, hard processing at low temperature, and decrease of optical property during hydrogen plasma treatment, their applications to the display industries are limited. Thus, recently the Al-doped ZnO(AZO) has been studied to substitute ITO. In this study, we have investigated the effect of different substrate temperature(RT,