• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.117-117
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• 2008

In MIM capacitor, poly-Si bottom electrode is replaced with metal bottom electrode. Noble metals can be used as bottom electrodes of capacitors because they have high work function and remain conductive in highly oxidizing conditions. In addition, they are chemically very stable. Among novel metals, Ru (ruthenium) has been suggested as an alternative bottom electrode due to its excellent electrical performance, including a low leakage of current and compatibility to high dielectric constant materials. Chemical mechanical planarization (CMP) process has been suggested to planarize and isolate the bottom electrode. Even though there is a great need for development of Ru CMP slurry, few studies have been carried out due to noble properties of Ru against chemicals. In the organic chemistry literature, periodate ion ($IO_4^-$) is a well-known oxidant. It has been reported that sodium periodate ($NaIO_4$) can form $RuO_4$ from hydrated ruthenic oxide ($RuO_2{\cdot}nH_2O$). $NaIO_4$ exist as various species in an aqueous solution as a function of pH. Also, the removal mechanism of Ru depends on solution of pH. In this research, the static etch rate, passivation film thickness and wettability were measured as a function of slurry pH. The electrochemical analysis was investigated as a function of pH. To evaluate the effect of pH on polishing behavior, removal rate was investigated as a function of pH by using patterned and unpatterned wafers.

• Clean Technology
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• v.18 no.1
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• pp.89-94
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• 2012

In this study, we investigated the activity of Pd and Pt supported on acidic Fe-ZSM5 supports for selective catalytic oxidation of ammonia ($NH_3$-SCO). Among the catalysts, Pt/Fe-ZSM5 catalyst exhibited superior $NH_3$-SCO activity to Pd/Fe-ZSM5 catalyst. We also tested Pt/Fe-ZSM5 catalysts with different Fe loading using ion-exchange method to prepare Fe-ZSM5 supports, which resulted in the increased catalytic performance with smaller Fe content: $NH_3$ was oxidized completely at low temperature ($250^{\circ}C$). The physicochemical properties of Fe-ZSM5 were investigated to figure out the relationship between the characteristics of the catalysts and the catalytic activity on $NH_3$-SCO by Inductively coupled plasma-atomic emissions spectrometer (ICP-AES), $N_2$ sorption, X-ray diffraction (XRD), temperature programmed desorption of $NH_3$ ($NH_3$-TPD) technique.

• 한국신재생에너지학회:학술대회논문집
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• 2010.11a
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• pp.115.2-115.2
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• 2010

Autothermal reforming(ATR) processes of hydrocarbon liquids such as diesel fuels are spotlighted as methods to produce hydrogen for Fuel cell. However, the use of heavy hydrocarbons as feedstocks for hydrogen production causes some problems which increase the catalyst deactivation by the carbon deposition. Coking can be inhibited by increasing the water dissociation on the catalyst surface. This results in catastrophic failure of whole system. Performance degradation of diesel autothermal reforming leads to increase of undesirable hydrocarbons at reformed gases and subsequently decrease the performance. In this study, perovskite-based catalysts were investigated as alternatives to substitute the noble metal catalyst for the ATR of diesel. The investigated perovskite structure was based on LaCrO3. and metals were added at the A-site to enhance oxygen ion mobility, transition metals were doped on the B-site to enhance the reformation. Substituted Lanthanum chromium perovskite were made by aqueous combustion synthesis, which can produce high surface area. And for the homogeneous fuel supply, we made ultrasonic injection system for reforming. We compared durability of evaporation system and ultrasonic system for fuel injection.

• Corrosion Science and Technology
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• v.11 no.6
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• pp.232-241
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• 2012

This work focused on corrosion of carbon steel bolted GECM/Al parts in tap water and NaCl solutions. In tap water and NaCl solutions, open circuit potential of GECM and its potentials in a series of carbon steel bolt>Ti>Al became active. Regardless of test materials, open circuit potentials in tap water were noble, and increasing NaCl concentration, its potentials became active. Immersion test of single specimen showed that no corrosion occur in Ti and GECM. In tap water, carbon steel bolt didn't show red corrosion product and in chloride solutions, corrosion rate in 1% NaCl solution was greater than its rate in 3.5% NaCl solution and red corrosion product in 1% NaCl solution was earlier observed than that in 3.5% NaCl solution. It seems that this behavior would be related to zinc-coatings on the surface of carbon stee l bolt. On the other hand, aluminium was corroded in tap water and chloride solutions. Corrosion of aluminium in tap water was due to the presence of chloride ion in tap water by sterilizing process.

• Applied Chemistry for Engineering
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• v.32 no.6
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• pp.664-670
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• 2021

Stainless steel was applied as bipolar plate (BP) of polymer electrolyte membrane fuel cell (PEMFC) due to high mechanical strength, electrical conductivity, and good machinability. However, stainless steel was corroded and increased contact resistance resulting PEMFC performance decrease. Although the corrosion resistance could be improved by surface treatment such as noble metal coating, there is a disadvantage of cost increase. The stainless steel corrosion behavior and passive layer influence on PEMFC performance should be studied to improve durability and economics of metal bipolar plate. In this study, SUS316L bipolar plate of 25 cm² active area was manufactured, and experiments were conducted for corrosion behavior at an anode and cathode. The influence of SUS316L BP corrosion on fuel cell performance was measured using the polarization curve, impedance, and contact resistance. The metal ion concentration in drained water was analyzed during fuel cell operation with SUS316L BP. It was confirmed that the corrosion occurs more severely at the anode than at the cathode for SUS316L BP. The contact resistance was increased due to the passivation of SUS316L during fuel cell operation, and metal ions continuously dissolved even after the passive layer formation.

• Journal of the Korean institute of surface engineering
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• v.49 no.6
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• pp.539-548
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• 2016

The non-noble 1D nanofibers(NFs) prepared by electrospinning and calcination method were used as oxygen evolution reaction (OER) electrocatalyst for water electrolysis. The electrospinning process and rate of solution composition was optimized to prepare uniform and non-beaded PVP polymer electrospun NFs. The diameter and morphology of PVP NFs changed in accordance with the viscosity and ion conductivity. The clean metal precursor contained electrospun fibers were synthesized via the optimized electrospinning process and solution composition. The calcined $CuCo_2O_4$ NFs catalyst showed higher activity and long-term cycle stability for OER compared with other $Co_3O_4$, $NiCo_2O$ NF catalysts. Furthermore, the $CuCo_2O_4$ NFs maintained the OER activity during long-term cycle test compared with commercial $CuCo_2O_4$ nanoparticle catalyst due to unique physicochemical and electrochemical properties by1D nanostructure.

• Applied Chemistry for Engineering
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• v.19 no.1
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• pp.1-16
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• 2008

Titanium dioxide ($TiO_2$) is one of the most researched semiconductor oxides that has revolutionised technologies in the field of environmental purification and energy generation. It has found extensive applications in heterogenous photocatalysis for removing organic pollutants from air and water and also in hydrogen production from photocatalytic water-splitting. Its use is popular because of its low cost, low toxicity, high chemical and thermal stability. But one of the critical limitations of $TiO_2$ as photocatalyst is its poor response to visible light. Several attempts have been made to modify the surface and electronic structures of $TiO_2$ to enhance its activity in the visible light region such as noble metal deposition, metal ion loading, cationic and anionic doping and sensitisation. Most of the results improved photocatalytic performance under visible light irradiation. This paper attempts to review and update some of the information on the $TiO_2$ photocatalytic technology and its accomplishment towards visible light region.

• Journal of Life Science
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• v.20 no.6
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• pp.838-844
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• 2010

A fibrinolytic enzyme of Streptomyces corcohrussi from soil sediment was purified by chromatography using DEAE-Sephadex A-50 and Sephadex G-50. The analysis of SDS-polyacrylamide gel suggested that the purified enzyme is a homogeneous protein and the molecular mass is approximately 34 kDa. The purified enzyme showed activity of 0.8 U/ml in a plasminogen-rich fibrin plate, while its activity in a plasminogen-free fibrin plate was only 0.36 U/ml. These results suggested that the purified enzyme acts as a plasminogen activator. The fibrinolytic activity of the enzyme under the supplementation of protease inhibitors, $\varepsilon$-ACA, t-AMCHA and mercuric chloride in the enzyme reaction was less than 24%, indicating that it could be modulated by the plasmin and/or fibrinogen inhibitors involved in the fibrinogen-to-fibrin converting process. As time passed, $Zn^{2+}$, a heavy metal ion, inhibited the activity to 34.1%. The optimum temperature of the purified enzyme was approximately $50^{\circ}C$ and over 92% of the enzyme activity was maintained between pH 5.0 and 8.0. Therefore, our results provide a potential fibrinolytic enzyme as a noble thrombolytic agent from S. corcohrussi.

• Restorative Dentistry and Endodontics
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• v.22 no.1
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• pp.1-33
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• 1997

The objective of this study was to analyze the in vitro and in vivo corrosion products of low and high copper amalgams. The four different types of amalgam alloy used in this study were Fine cut, Caulk spherical, Dispersalloy, and Tytin. After each amalgam alloy and Hg were triturated according to the directions of the manufacturer by means of the mechanical amalgamator(Amalgam mixer. Shinhung Co. Korea), the triturated mass was inserted into a cylindrical metal mold which was 12mm in diameter and 10mm in height. The mass was condensed by 150Kg/cm compressive force. The specimen was removed from the mold and aged at room temperature for about seven days. The standard surface preparation was routinely carried out by emery paper polishing under running water. In vitro amalgam specimens were potentiostatically polarized ten times in a normal saline solution at $37^{\circ}C$(potentiostat : HA-301. Hukuto Denko Corp. Japan). Each specimen was subjected to anodic polarization scan within the potential range -1700mV to+400mV(SCE). After corrosion tests, anodic polarization curves and corrosion potentials were obtained. The amount of component elements dissolved from amalgams into solution was measured three times by ICP AES(Inductive Coupled Plasma Atomic Emission Spectrometry: Plasma 40. Perkim Elmer Co. U.S.A.). The four different types of amalgam were filled in occlusal and buccal class I cavities of four human 3rd molars. After about five years the restorations were carefully removed after tooth extraction to preserve the structural details including the deteriorated margins. The occlusal surface, amalgam-tooth interface and the fractured surface of in vivo amalgam corrosion products were analyzed. In vivo and in vitro amalgam specimens were examined and analyzed metallographically by SEM(Scanning Electron Microscope: JSM 840. Jeol Co. Japan) and EDAX(Energy Dispersive Micro X-ray Analyser: JSM 840. Jeol Co. Japan). 1. The following results are obtained from in vitro corrosion tests. 1) Corrosion potentials of all amalgams became more noble after ten times passing through the in vitro corrosion test compared to first time. 2) After times through the test, released Cu concentration in saline solution was almost equal but highest in Fine cut. Ag and Hg ion concentration was highest in Caulk spherical and Sn was highest in Dispersalloy. 3) Analyses of surface corrosion products in vitro reveal the following results. a)The corroded surface of Caulk spherical has Na-Sn-Cl containing clusters of $5{\mu}m$ needle-like crystals and oval shapes of Sn-Cl phase, polyhedral Sn oxide phase. b)In Fine cut, there appeared to be a large Sn containing phase, surrounded by many Cu-Sn phases of $1{\mu}m$ granular shapes. c)Dispersalloy was covered by a thick reticular layer which contained Zn-Cl phase. d)In Tytin, a very thin, corroded layer had formed with irregularly growing Sn-Cl phases that looked like a stack of plates. 2. The following results are obtained by an analysis of in vivo amalgam corrosion products. 1) Occlusal surfaces of all amalgams were covered by thick amorphous layers containing Ca-P elements which were abraded by occlusal force. 2) In tooth-amalgam interface, Ca-P containing products were examined in all amalgams but were most clearly seen in low copper amalgams. 3) Sn oxide appeared as a polyhedral shape in internal space in Caulk spherical and Fine cut. 4) Apical pyramidal shaped Sn oxide and curved plate-like Sn-Cl phases resulted in Dispersalloy. 5) In Tytin, Sn oxide and Sn hydroxide were not seen but polyhedral Ag-Hg phase crystal appeared in internal space which assumed a ${\beta}_l$ phase.