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CMOS 소자 응용을 위한 Plasma doping과 Silicide 형성

  • Choe, Jang-Hun;Do, Seung-U;Seo, Yeong-Ho;Lee, Yong-Hyeon
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.456-456
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    • 2010
  • CMOS 소자가 서브마이크론($0.1\;{\mu}m$) 이하로 스케일다운 되면서 단채널 효과(short channel effect), 게이트 산화막(gate oxide)의 누설전류(leakage current)의 증가와 높은 직렬저항(series resistance) 등의 문제가 발생한다. CMOS 소자의 구동전류(drive current)를 높이고, 단채널 효과를 줄이기 위한 가장 효율적인 방법은 소스 및 드레인의 얕은 접합(shallow junction) 형성과 직렬 저항을 줄이는 것이다. 플라즈마 도핑 방법은 플라즈마 밀도 컨트롤, 주입 바이어스 전압 조절 등을 통해 저 에너지 이온주입법보다 기판 손상 및 표면 결함의 생성을 억제하면서 고농도로 얕은 접합을 형성할 수 있다. 그리고 얕은 접합을 형성하기 위해 주입된 불순물의 활성화와 확산을 위해 후속 열처리 공정은 높은 온도에서 짧은 시간 열처리하여 불순물 물질의 활성화를 높여주면서 열처리로 인한 접합 깊이를 얕게 해야 한다. 그러나 접합의 깊이가 줄어듦에 따라서 소스 및 드레인의 표면 저항(sheet resistance)과 접촉저항(contact resistance)이 급격하게 증가하는 문제점이 있다. 이러한 표면저항과 접촉저항을 줄이기 위한 방안으로 실리사이드 박막(silicide thin film)을 형성하는 방법이 사용되고 있다. 본 논문에서는 (100) p-type 웨이퍼 He(90 %) 가스로 희석된 $PH_3$(10 %) 가스를 사용하여 플라즈마 도핑을 실시하였다. 10 mTorr의 압력에서 200 W RF 파워를 인가하여 플라즈마를 생성하였고 도핑은 바이어스 전압 -1 kV에서 60 초 동안 실시하였다. 얕은 접합을 형성하기 위한 불순물의 활성화는 ArF(193 nm) excimer laser를 통해 $460\;mJ/cm^2$의 에니지로 열처리를 실시하였다. 그리고 낮은 접촉비저항과 표면저항을 얻기 위해 metal sputter를 통해 TiN/Ti를 $800/400\;{\AA}$ 증착하고 metal RTP를 사용하여 실리사이드 형성 온도를 $650{\sim}800^{\circ}C$까지 60 초 동안 열처리를 실시하여 $TiSi_2$ 박막을 형성하였다. 그리고 $TiSi_2$의 두께를 측정하기 위해 TEM(Transmission Electron Microscopy)을 측정하였다. 화학적 결합상태를 분석하기 위해 XPS(X-ray photoelectronic)와 XRD(X-ray diffraction)를 측정하였다. 접촉비저항, 접촉저항과 표면저항을 분석하기 위해 TLM(Transfer Length Method) 패턴을 제작하여 I-V 특성을 측정하였다. TEM 측정결과 $TiSi_2$의 두께는 약 $580{\AA}$ 정도이고 morphology는 안정적이고 실리사이드 집괴 현상은 발견되지 않았다. XPS와 XRD 분석결과 실리사이드 형성 온도가 $700^{\circ}C$에서 C54 형태의 $TiSi_2$ 박막이 형성되었고 가장 낮은 접촉비저항과 접촉저항 값을 가진다.

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Discrimination of Geographical Origin for Astragalus Root (Astragalus membranaceus) by Capillary Electrophoresis and Near-Infrared Spectroscopy (Capillary electrophoresis 및 근적외선분광분석기를 이용한 황기의 원산지 판별)

  • Kim, Eun-Young;Kim, Jung-Hyun;Lee, Nam-Yun;Kim, Soo-Jeong;Rhyu, Mee-Ra
    • Korean Journal of Food Science and Technology
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    • v.35 no.5
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    • pp.818-824
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    • 2003
  • Capillary electrophoresis (CE) and near-infrared spectroscopy (NIRS) were performed to discriminate astragalus roots (Astragalus membranaceus) according to geographical origin (domestic or foreign). Two-hundred-and-four astragalus roots were extracted with 30% methanol in 0.1 M phosphate buffer (pH 2.5) and separated in a uncoated fused-silica $(50\;{\mu}m{\times}27\;cm)$ capillary. Conditions for optimal analysis included: temperature $-45^{\circ}C$, voltage -14 kV, and pressure injection time -8 sec. The optimal separation buffer was 0.1 M phosphate buffer (pH 2.5) containing 40 mM hexane sulfonic acid with 20% 2-methoxy ethanol. Raw NIR spectra were obtained using NIRS, and modified partial least square regression was used to develop the prediction model. The correlation coefficient and standard error of prediction were 0.915 and 14.3%, respectively. Under the optimal conditions established for CE and NIRS, the geographical origins of the astragalus roots were correctly identified in 80 and 97%, respectively. Astragalus roots that were not discriminated by NIRS were correctly discriminated by CE. Hence, CE and NIRS are potential methods for discriminating the geographical origins of astragalus roots that complement one another.

Gastrointestinal and Hepatic First-pass Effects of Triflusal in Rats (흰쥐에서 트리플루살의 위장관 및 간 초회통과효과)

  • Cho, Hea-Young;Jeong, Tae-Jin;Lee, Yong-Bok
    • Journal of Pharmaceutical Investigation
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    • v.31 no.4
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    • pp.265-271
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    • 2001
  • In order to elucidate the influence of intestinal and hepatic first-pass effect on the pharmacokinetics of triflusal, the biotransformation of triflusal in the gastrointestinal tract and liver was designed. Moreover, we tried to establish an HPLC method applicable for bioassay and available to pharmacokinetics, not only with the simultaneous determination of triflusal and its active metabolite, 2-hydroxy-4-trifluoromethyl benzoic acid (HTB), but also with improving sensitivity. After the administration of triflusal (10 mg/kg) and HTB (10 mg/kg) into femoral vein, portal vein (only triflusal) and oral route (only triflusal), pharmacokinetic parameters were investigated from the plasma concentration-time profiles of triflusal and HTB in rats. An HPLC method was developed for the simultaneous determination of triflusal and HTB in rat plasma, urine and bile. The HPLC analysis was carried out using a C18 column and acetonitrile-methanol-water (25:10:65, v/v/v) as the mobile phase and UV detection at 234 nm. Furosemide was used as the internal standard. The calibration curves were linear over the concentration range $0.05-5.0\;{\mu}g/ml$ for triflusal and $0.2-200.0\;{\mu}g/ml$ for HTB with correlation coefficients greater than 0.999 and with intra-day or inter-day coefficients of variation not exceeding 10.0%. This assay procedure was applied to the study of metabolite pharmacokinetics of triflusal and HTB in rats. It was supposed that triflusal was almost metabolized in vivo because urinary and biliary excreted amounts of triflusal could be ignored as it was lower than 1.2% of the administered dose. According to the gastrointestinal and hepatic biotransformation pathways of triflusal, it was found that triflusal was hydrolyzed by about 5% in intestine and metabolized by about 53% in liver, and that the bioavailability of triflusal after oral administration of triflusal was 0.44, and also that the fraction of total elimination rate of triflusal which formed HTB in liver $(F_{mi},\;%)$ was about 98%. These results showed that triflusal was almost metabolized in liver, and the total elimination of triflusal in the body was dependent to the formation rate of HTB from triflusal in liver.

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Phototoxic effect of blue light on the planktonic and biofilm state of anaerobic periodontal pathogens

  • Song, Hyun-Hwa;Lee, Jae-Kwan;Um, Heung-Sik;Chang, Beom-Seok;Lee, Si-Young;Lee, Min-Ku
    • Journal of Periodontal and Implant Science
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    • v.43 no.2
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    • pp.72-78
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    • 2013
  • Purpose: The purpose of this study was to compare the phototoxic effects of blue light exposure on periodontal pathogens in both planktonic and biofilm cultures. Methods: Strains of Aggregatibacter actinomycetemcomitans, Fusobacterium nucleatum, and Porphyromonas gingivalis, in planktonic or biofilm states, were exposed to visible light at wavelengths of 400.520 nm. A quartz-tungsten-halogen lamp at a power density of $500mW/cm^2$ was used for the light source. Each sample was exposed to 15, 30, 60, 90, or 120 seconds of each bacterial strain in the planktonic or biofilm state. Confocal scanning laser microscopy (CSLM) was used to observe the distribution of live/dead bacterial cells in biofilms. After light exposure, the bacterial killing rates were calculated from colony forming unit (CFU) counts. Results: CLSM images that were obtained from biofilms showed a mixture of dead and live bacterial cells extending to a depth of $30-45{\mu}m$. Obvious differences in the live-to-dead bacterial cell ratio were found in P. gingivalis biofilm according to light exposure time. In the planktonic state, almost all bacteria were killed with 60 seconds of light exposure to F. nucleatum (99.1%) and with 15 seconds to P. gingivalis (100%). In the biofilm state, however, only the CFU of P. gingivalis demonstrated a decreasing tendency with increasing light exposure time, and there was a lower efficacy of phototoxicity to P. gingivalis as biofilm than in the planktonic state. Conclusions: Blue light exposure using a dental halogen curing unit is effective in reducing periodontal pathogens in the planktonic state. It is recommended that an adjunctive exogenous photosensitizer be used and that pathogens be exposed to visible light for clinical antimicrobial periodontal therapy.

Studies on the Anti Oralmicrobial Activity and Selected Functional Component of Small Red Bean Extract (팥 추출물의 구강세균에 대한 항균성 및 일부 기능성 성분에 대한 연구)

  • Kang, So-Jin;Han, Young-Sook
    • Korean journal of food and cookery science
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    • v.28 no.1
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    • pp.41-49
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    • 2012
  • This purpose of this study was to develop a tea with small red bean which have been known to have effect regarding anti-obesity, fatigue recovery, edema recovery, blood circulation, etc. In order to provide baseline data for small red bean tea we investigated the general components, antioxidative effect and proanthocyanidin analysis in small red beans[Phaseolus angularis W.F. Wight.]. Physicochemical analysis(pH, sugar content, salinity, turbidity), color, anti oralmicrobial activity, content of saponin and sensory test of small red bean with different boiling time in 8 minutes(SR1), 16 minutes(SR2), 24 minutes(SR3), 32 minutes(SR4), 40 minutes(SR5) was also measured. It was shown that the crude fat, carbohydrate, moisture, crude protein, crude ash content of small red bean were 1.0%, 63.9%, 12.8%, 18.7%, 3.6%. DPPH free radical scavenging activity, the total phenolic compounds content and flavonoid content increased significantly (p<0.001). The results of analyzed proanthocyanidin was distinguished by characteristic UV-visible spectra with absorption maximum at 320 nm($t_R$ 7.589 min). As the boiling time(8 minutes:SR1, 16 minutes:SR2, 24 minutes:SR3, 32 minutes:SR4, 40 minutes:SR5) of small red beans increaseds, the pH significantly decreased(p<0.001). The sugar content, salinity and turbidity significantly increased(p<0.001). Moreover, Hunter L, a and b values, crude saponin also increased(p<0.001). The results of analyzed activity against oral bacteria, S. mutans, S. sobrinus, P. intermedia and P. gingivalis showed a higher antibacterial activities than E. coli and S. aureus. MIC was measured that S. mutans, S. sobrinus, P. intermedia and P. gingivalis showed a lower MICs than E. coli and S. aureus. The results regarding sensory test measures, In case of color, refreshing taste and overall quality, SR3 had the highest preference overall among tested samples. In cases conceming odor and taste, SR5 had the highest preference and with regards to sweetness and saltyness, SR4 had the highest preference.

Thermal Stability of Mechanically Alloyed Al-(6~3wt.%)Cr-(3~6wt/%)Zr Alloys (기계적 합금화법으로 제조된 Al-(6~3wt.%)Cr-(3~6wt.%)Zr 합금의 열적 안정성)

  • Yang, Sang-Seon;Lee, Gwang-Min
    • Korean Journal of Materials Research
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    • v.10 no.6
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    • pp.403-408
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    • 2000
  • The Al-Cr-Zr composite metal powders were prepared by mechanical alloying and consolidated by vacuum hot pressing. The microstructural characteristics and the thermal stability of the MA Al-Cr-Zr alloys were evaluated by means of microhardness measurement, XRD and TEM in order to develop high temperature, high strength aluminum alloys. The mechanical alloying was conducted in attritor with 300rpm for 20 hours. The density of the vacuum hot pressed Al-Cr-Zr alloy reached at 97% of theoretical one. After exposing at $300^{\circ}C$ for 100 hours, there is almost no variation in hardness change of the MA alloys. Even after exposing at $ 500^{\circ}C$ for 100 hours, the hardness of the alloy was decreased within 6% of the initial value. The fine stable $Al_3Zr\;and\; Al_{13}Cr_2$ intermetallics were formed at the stage of consolidation and heat treatment in aluminum matrix. The good thermal stability of the MA Al-Cr-Zr alloy can ab attributed to the role of the dispersoids, inhibiting grain growth of nanocrystalline, and the final grain size after heat treatment was less than 150nm.

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NIRS Analysis of Liquid and Dry Ewe Milk

  • Nunez-Sanchez, Nieves;Varo, Garrido;Serradilla-Manrique, Juan M.;Ares-Cea, Jose L.
    • Proceedings of the Korean Society of Near Infrared Spectroscopy Conference
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    • 2001.06a
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    • pp.1251-1251
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    • 2001
  • The routine analysis of milk chemical components is of major importance both for the management of animals in dairy farms and for quality control in dairy industries. NIRS technology is an analytical technique which greatly simplifies this routine. One of the most critical aspects in NIRS analysis of milk is sample preparation and analysis modes which should be fast and straightforward. An important difficulty when obtaining NIR spectra of milk is the high water content (80 to 90%) of this product, since water absorbs most of the infrared radiation, and, therefore, limits the accuracy of calibrating for other constituents. To avoid this problem, the DESIR system was set up. Other ways of radiation-sample interaction adapted for liquids or semi-liquids exist, which are practically instantaneous and with limited or null necessity of sample preparation: Transmission and Folded Transmission or Transflectance. The objective of the present work is to compare the precision and accuracy of milk calibration equations in two analysis modes: Reflectance (dry milk) and Folded Transmission (liquid milk). A FOSS-NIR Systems 6500 I spectrophotometer (400-2500 nm) provided with a spinning module was used. Two NIR spectroscopic methods for milk analysis were compared: a) folded transmission: liquid milk samples in a 0.1 pathlength sample cell (ref. IH-0345) and b) reflectance: dried milk samples in glass fibre filters placed in a standard ring cell. A set of 101 milk samples was used to develop the calibration equations, for the two NIR analysis modes, to predict casein, protein, fat and dry matter contents, and 48 milk samples to predict Somatic Cell Count (SCC). The calibrations obtained for protein, fat and dry matter have an excellent quantitative prediction power, since they present $r^2$ values higher than 0.9. The $r^2$ values are slightly lower for casein and SCC (0.88 and 0.89 respectively), but they still are sufficiently high. The accuracy of casein, protein and SCC equations is not affected by the analysis modes, since their ETVC values are very similar in reflectance and folded transmission (0.19% vs 0.21%; 0.16% vs 0.19% and 55.57% vs 53.11% respectively), Lower SECV values were obtained for the prediction of fat and dry matter with the folded transmission equations (0.14% and 0.25% respectively) compared to the results with the reflectance ones (0.43% and 0.34% respectively). In terms of accuracy and speed of analytical response, NIRS analysis of liquid milk is recommended (folded transmission), since the drying procedure takes 24 hours. However, both analysis modes offer satisfactory results.

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Effect of Elevated Ultraviolet-B Radiation on Yield and Differential Expression of Proteome in Perilla (perilla frutescens L.) (잎들깨 수량과 단백질체 발현에 미치는 UV-B의 영향)

  • Hong, Seung-Chang;Hwang, Seon-Woong;Chang, An-Cheol;Shin, Pyung-Gyun;Jang, Byoung-Choon;Lee, Chul-Won
    • Korean Journal of Environmental Agriculture
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    • v.25 no.1
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    • pp.7-13
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    • 2006
  • Plastichouse cultivation for crops and vegetables in the winter has been widely popularized in Korea. In the vinylhouse Ultraviolet B penetration is lower than in the field, and so some problems, as plant overgrowth and outbreak of disease, occurred frequently. The effect of artificial supplement ultraviolet B $(UV-B:280{\sim}320nm)$ radiation on the physiological responses and yield of perilla (perilla frutescens) was investigated UV-B ray was radiated on perilla with the 10th leaf stage at the distance of 90, 120 and 150 cm from the plant canopy for 30 days after planting in the vinylhouse. The production of fresh perilla leaves was high in the order of plastic house, ambient+50% of supplemental UV-B, ambient ambient+100% of supplemental UV-B. Enhanced UV-B radiation affected the intensity of thirty-three proteins in 2-dimensional electrophoretic analysis of proteins and ten proteins out of them seemed to be responsive to UV-B : a protein was, ATP synthase CF1 alpha chain, down regulated and nine proteins (Chlorophyll a/b bindng protein type I, Chlorophyll a/b binding protein type II precursor, Photosystem I P700 chlorophyll a apoprotein A2, DNA recombination and repair protein recF, Galactinol synthase, S-adenosyl-L-methionine, Heat shock protein 21, Calcium-dependent protein kinase(CDPK)-like, Catalase) were up-regulated.

THE EFFICACY OF PROGRAMMED CRYO-PRESERVATION UNDER PRESSURE IN RAT PERIODONTAL LIGAMENT CELLS (압력 저속 냉동 방법의 쥐 치아 치주인대세포 보존 효율 평가)

  • Lee, Young-Eun;Kim, Eui-Seong;Kim, Jin;Han, Seung-Hoon;Lee, Seung-Jong
    • Restorative Dentistry and Endodontics
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    • v.34 no.4
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    • pp.356-363
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    • 2009
  • The purpose of this study was to evaluate the viability of periodontal ligament cells in rat teeth using slow cryo-preservation method under pressure by means of MTT assay and WST-1 assay. Eighteen teeth of Sprague-Dawley white female rats of 4 week-old were used for each group. Both sides of the first and second maxillary molars were extracted as atraumatically as possible under Tiletamine anesthesia. The experimental groups were group 1 (Immediate control), group 2 (Cold preservation at $4^{\circ}C$for 1 week), group 3 (Slow freezing), group 4 (Slow freezing under pressure of 3 MPa). F-medium and 10% DMSO were used as preservation medium and cryo-protectant. For cryo-preservation groups, thawing was performed in $37^{\circ}C$water bath, then MTT assay and WST-1 assay were processed. One way ANOVA and Tukey method were performed at the 95% level of confidence. The values of optical density obtained by MTT assay and WST-1 were divided by the values of eosin staining for tissue volume standardization. In both MTT and WST-1 assay, group 4 showed significantly higher viability of periodontal ligament cells than group 2 and 3 (p < 0.05), but showed lower viability than immediate control group. By the results of this study, slow cryo-preservation method under pressure suggests the possibility for long term cryo-preservation of the teeth.

The Study on the Relationship between Changes of Rumen Microflora and Bloat in Jersey Cow (저지종 젖소의 반추위 내 미생물 균총 변화와 고창증 발병간의 상관관계 연구)

  • Kim, Sang Bum;Oh, Jong Seok;Jeong, Ha Yeon;Jung, Young Hun;Park, Beom Young;Ha, Seung Min;Im, Seok Ki;Lee, Sung Sill;Park, Ji Hoo;Park, Seong Min;Kim, Eun Tae
    • Journal of The Korean Society of Grassland and Forage Science
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    • v.38 no.2
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    • pp.106-111
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    • 2018
  • This study was conducted to investigate the relationship between changes of rumen microflora and bloat in Jersey cow. Jersey cows (control age: 42 months, control weight: 558kg; treatment age: 29 months, treatment weight 507kg) were fed on the basis of dairy feeding management at dairy science division in National Institute of Animal Science. The change of microbial population in rumen was analyzed by using next generation sequencing (NGS) technologies due to metabolic disease. The diversity of Ruminococcus bromii, Bifidobacterium pseudolongum, Bifidobacterium merycicum and Butyrivibrio fibrisolvens known as major starch fermenting bacteria was increased more than 36-fold in bloated Jersey, while cellulolytic bacteria community such as Fibrobacter succinogenes, Ruminococcus albus and Ruminococcus flavefaciens was increased more than 12-fold in non-bloated Jersey. The proportion of bacteroidetes and firmicutes was 33.4% and 39.6% in non-bloated Jersey's rumen, while bacteroidetes and firmicutes were 24.9% and 55.1% in bloated Jersey's. In conclusion, the change of rumen microbial community, in particular the increase in starch fermenting bacteria, might have an effect to occur the bloat in Jersey cow.