• Title/Summary/Keyword: Nickel in-diffusion

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Sheet Resistance and Microstructure Evolution of Cobalt/Nickel Silicides with Annealing Temperature (코발트/니켈 복합실리사이드의 실리사이드온도에 따른 면저항과 미세구조 변화)

  • Jung Young-soon;Cheong Seong-hwee;Song Oh-sung
    • Korean Journal of Materials Research
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    • v.14 no.6
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    • pp.389-393
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    • 2004
  • The silicide layer used as a diffusion barrier in microelectronics is typically required to be below 50 nm-thick and, the same time, the silicides also need to have low contact resistance without agglomeration at high processing temperatures. We fabricated Si(100)/15 nm-Ni/15 nm-Co samples with a thermal evaporator, and annealed the samples for 40 seconds at temperatures ranging from $700^{\circ}C$ to $1100^{\circ}C$ using rapid thermal annealing. We investigated microstructural and compositional changes during annealing using transmission electron microscopy and auger electron spectroscopy. Sheet resistance of the annealed sample stack was measured with a four point probe. The sheet resistance measurements for our proposed Co/Ni composite silicide was below 8 $\Omega$/sq. even after annealing $1100^{\circ}C$, while conventional nickel-monosilicide showed abrupt phase transformation at $700^{\circ}C$. Microstructure and auger depth profiling showed that the silicides in our sample consisted of intermixed phases of $CoNiSi_{x}$ and NiSi. It was noticed that NiSi grew rapidly at the silicon interface with increasing annealing temperature without transforming into $NiSi_2$. Our results imply that Co/Ni composite silicide should have excellent high temperature stability even in post-silicidation processes.

Cyclic Oxidation Behavior of Fe-Cr-Al Joint Brazed with Nickel-Base Filler Metal (Ni계 합금으로 브레이징된 Fe-Cr-Al 합금 접합부의 주기산화거동)

  • Mun, Byeong-Gi;Choe, Cheol-Jin;Park, Won-Uk
    • 연구논문집
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    • s.29
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    • pp.141-149
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    • 1999
  • Brazing of Fe-Cr-Al alloy was carried out at $1200^{\circ}C$ in vacuum furnace using nickel-based filler metals : BNi-5 powder(Ni-Cr-Si-Fe base alloy} and MBF-50 foil (Ni-Cr-Si-B). The effect of boron content on the stability of oxide scale on the brazed joint was investigated by means of cyclic oxidation test performed at $1050^{\circ}C$ and $1200^{\circ}C$. Apparently, the joints brazed with MBF-50 containing boron showed relatively stable oxidation rates compared to boron-free BNi-5 at both temperatures. However, it was considered that the slower weight loss of MBF-50 brazed specimen wasn’t resulted from the low oxidation rate but from the spallation of oxide layer. The oxide layer consisted of thick spinel oxide on the surface and $Al_2 O_3$ internal oxide layer along the interface between mother alloy and braze, the mother alloy was also eroded seriously by the formation of spinel oxides such as $FeCr_2 O_4$ and $NiCr_2 O_4$ on the surface, likely to be induced by the change of oxide forming mechanism due to diffusion of boron from the braze. On the contrary, the joint brazed with BNi-5 showed the good oxidation resistance during the cyclic oxidation test. It seems that the oxidation can be retarded by the formation of stable $Al_2 O_3$ layer at the surface.

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Synthesis of Carbon Nanotubes and Nanofibers on a Substrate Coated with Metal Nitrates using an C2H4 Inverse Diffusion Flame (메탈나이트레이트가 도포된 기판과 C2H4 역확산화염을 이용한 탄소나노튜브 및 탄소나노섬유의 합성)

  • Lee, Gyo-Woo;Jurng, Jong-Soo;Hwang, Jung-Ho
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.27 no.10
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    • pp.1480-1488
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    • 2003
  • Synthesis of carbon nanomaterials on a substrate coated with metal nitrates using an ethylene fueled inverse diffusion flame was illustrated. The effects of radial distance, residence time of the substrate, and hydrocarbon composition on the synthesis of carbon nanomaterials were investigated. The effects of catalyst metal particles were also studied using SUS304 substrates coated with Fe(NO$_3$)$_3$ (ferric nitrate, nonahydrate) and Ni(NO$_3$)$_2$(nickel nitrate, hexahydrate), and Cu substrate. Carbon nanomaterials, with diameters ranging from 30 - 70 nm, were observed on the substrate for both cases of using substrates only and using them with metal nitrates. In case of using the substrate with metal nitrates, the formation and growth of carbon nanomaterials were occurred in the lower temperature region than that of using the substrates only due to the easy activation of the metal particles coated on the surface of the substrates.

Crystal Growth, Spectral, Magnetic, Antibacterial and Antifungal Studies of Co(II) and Ni(II) Complexes of 4-Nitrobenzoic Acid

  • Roy, Sunalya M.;Sudarsanakumar, M.R.;Dhanya, V.S.;Suma, S.;Kurup, M.R. Prathapachandra
    • Journal of the Korean Chemical Society
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    • v.58 no.3
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    • pp.258-266
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    • 2014
  • Single crystals of cobalt(II) and nickel(II) complexes of 4-nitrobenzoic acid have been successfully grown by gel diffusion technique. The grown crystals were characterized by elemental analysis, FT-IR and UV-Visible spectroscopy. The structure of the grown crystals was elucidated using single crystal X-ray diffraction studies. The title compounds $[Co(Pnba)_2(H_2O)_4]{\cdot}2H_2O$ 1 and $[Ni(Pnba)_2(H_2O)_4]{\cdot}2H_2O$ 2 where PnbaH=4-nitrobenzoic acid, crystallize in centrosymmetric triclinic space group P-1. Magnetic susceptibility measurements reveal that the compounds are paramagnetic in nature. The mechanical strength of the grown crystals was determined by Vicker's microhardness studies. The ligand (4-nitrobenzoic acid) and the complexes have been screened for their biological activity against various bacteria and fungi. The activity data show that the biological activity of the complexes is higher than that of the ligand.

Thermal Stability Improvement of Ni-Silicide on the SOI Substrate Doped B11 for Nano-scale CMOSFET (나노급 CMOSFET을 위한 SOI기판에 도핑된 B1l을 이용한 니켈-실리사이드의 열안정성 개선)

  • Jung, Soon-Yen;Oh, Soon-Young;Lee, Won-Jae;Zhang, Ying-Ying;Zhong, Zhun;Li, Shi-Guang;Kim, Yeong-Cheol;Lee, Ga-Won;Wang, Jin-Suk;Lee, Hi-Deok
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.19 no.11
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    • pp.1000-1004
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    • 2006
  • In this paper, thermal stability of Ni-silicide formed on the SOI substrate with $B_{11}$ has been characterized. The sheet resistance of Ni-silicide on un-doped SOI and $B_{11}$ implanted bulk substrate was increased after the post-silicidation annealing at $700^{\circ}C$ for 30 min. However, in case of $B_{11}$ implanted SOI substrate, the sheet resistance showed stable characteristics after the post-silicidation annealing up to $700^{\circ}C$ for 30 min. The main reason of the excellent property of $B_{11}$ sample is believed to be the retardation of Ni diffusion by the boron and bottom oxide layer of SOI. Therefore, retardation of Ni diffusion is highly desirable lot high performance Ni silicide technology.

LiNbO3 integrated optic devices with an UV-curable polymer buffer layer

  • Jeong, Woon-Jo;Kim, Seong-Ku;Park, Gye-Choon;Lee, Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.05b
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    • pp.111-118
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    • 2002
  • A new lithium niobate optical modulator with a polymer buffer layer on Ni in-diffused optical waveguide is proposed for the fist time, successfully fabricated and examined at a wavelength of 1.3 mm. By determining the diffusion parameters of Ni in-diffused waveguide to achieve more desirable mode size which is well matched to the mode in the fiber, the detailed results on the achievement of high optical throughput are reported. In addition, the usefulness of polymer buffer layer which can be applicable to a buffer layer in Ni in-diffused waveguide devices is demonstrated. Several sets of channel waveguides fabricated on Z-cut lithium niobate by Ni in-diffusion were obtained and on which coplanar traveling-wave type electrodes with a polymer-employed buffer layer were developed by a conventional fabrication method for characterizing of electro-optical performances of the proposed device. The experimental results show that the measured half-wave voltage is of ~10 V and the total measured fiber-to-fiber insertion loss is of ~6.4 dB for a 40 mm long at a wavelength of =1.3 mm, respectively. From the experimental results, it is confirmed that the polymer-employed buffer layer in LiNbO3 optical modulator can be a substitute material instead of silicon oxide layer which is usually processed at a high temperature of over $300^{\circ}C$. Moreover, the fabrication tolerances by using polymer materials in LiNbO3 optical modulators are much less strict in comparison to the case of dielectric buffer layer.

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Reliability study of Sn-Zn lead-free solder for SMT application (표면실장 적용을 위한 Sn-Zn 무연 솔더의 신뢰성 연구)

  • Yun, Jeong-Won;Jeong, Seung-Bu
    • Proceedings of the KWS Conference
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    • 2005.11a
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    • pp.219-221
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    • 2005
  • Sn-9Zn solder balls were bonded to Cu, ENIG (Electroless Nickel/Immersion Gold) and electrolytic Au/Ni pads, and the effect of aging on their joint reliability was investigated. The interfacial products were different from the general reaction layer formed in a Sn-base solder. The intermetallic compounds formed in the solder/Cu joint were $Cu_{5}Zn_{8}$ and $Cu_{6}Sn_{5}$. After aging treatment, voids formed irregularly at the bottom side of the solder because of Sn diffusion into the $Cu_{5}Zn_{8}$ IMC. In the case of the solder/ENIG joint, $AuZn_{3}$ IMCs were formed at the interface. In the case of the Au/Ni/Cu substrate, an $AuZn_{3}$ IMC layer formed at the interface due to the fast reaction between Au and Zn. In addition, the $AuZn_{3}$ IMC layer became detached from the interface after reflow. When the aging time was extended to 100 h, $Ni_{5}Zn_{21}$ IMC was observed on the Ni substrate.

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Improvement in Microstructure Homogeneity of Sintered Compacts through Powder Treatments and Alloy Designs

  • Hwang, K.S.;Wu, M.W.;Yen, F.C.;Sun, C.C.
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09b
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    • pp.824-825
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    • 2006
  • Homogeneous microstructures of the PM compacts are difficult to attain when mixed elemental powders are used. This study examined the microstructures of pressed-and-sintered and MIM products that contain Ni and Mo.Ni-rich areas, which were lean in carbon and were soft and were found easily in regular specimens. Gaps or cracks near the Ni-rich or Mo-rich areas were also frequently observed. This problem worsened when Ni and Mo particles were large and were irregular in shape. By using ball milling treatment and ferroalloy powders, the microstructure homogeneity and mechanical properties were improved. The addition of 0.5wt%Cr further improved the distribution of Ni because Cr reduced the repulsion effect between nickel and carbon. With the elimination of Ni-rich areas, more bainites and martensites were formed and mechanical properties were significantly improved.

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Analysis of High Vacuum System Based on the Applications of Vacuum Materials

  • Kim, Hyung-Taek
    • Transactions on Electrical and Electronic Materials
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    • v.14 no.6
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    • pp.334-338
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    • 2013
  • In this study, the outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for these vacuum systems were suggested based on the simulation results. The baking-out effects of the modeled systems and materials on the performance of the vacuum system were also analyzed. The simulation predicted that the overall outgassing effect was more significant in the turbomolecular pump system than in the diffusion pump system and that the utilization of a booster pump has a greater effect on the evacuation time than on the ultimate pressure.

[ $Ni_3Al-Fe-Cr$ ] Alloy Processed by Combined Mechanical Alloying - Reactive Synthesis

  • Orban, Radu L.;Lucaci, Mariana
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09b
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    • pp.1316-1317
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    • 2006
  • The paper investigates the possibility to avoid extrinsic embrittlement of $Ni_3Al$, also increasing the high temperature strength, by alloying with both Fe - of a high strengthening effect and Cr - able to remove a part of diffused oxygen along the grain boundaries. As Cr homogenization in $Ni_3Al$ is difficult because of its low diffusion coefficient, for its improving a mechanical alloying (MA) step before the compound synthesis by Self-propagating High-temperature Synthesis (SHS) was adopted. The obtained better homogenization resulted in higher mechanical resistance and deformability than of the unalloyed $Ni_3A/Ni_3Al$ alloys of the same composition obtained without MA step.

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