• 제목/요약/키워드: Ni film

검색결과 866건 처리시간 0.04초

Reactive Ion Etching of NiFe Film with Organic Resist Mask and Metal Mask by Inductively Coupled Plasma

  • Kanazawa, Tomomi;Motoyama, Shin-Ichi;Wakayama, Takayuki;Akinaga, Hiroyuki
    • Journal of Magnetics
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    • 제12권2호
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    • pp.81-83
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    • 2007
  • Etching of NiFe films covered with an organic photo-resist or Ti was successfully performed by an inductively coupled plasma-reactive ion etching (ICP-RIE) system using $CHF_3/O_2/NH_3$ discharges exchanging $CHF_3$ for $CH_4$ gas gradually. Experimental results showed that the organic photo-resist mask can be applied to the NiFe etching. In the case of the Ti metal mask, it was found that the etching-selectivity Ti against NiFe was significantly varied from 7.3 to ${\sim}0$ by changing $CHF_3/CH_4/O_2/NH_3$ to $CH_4/O_2/NH_3$ discharges used in the ICP-RIE system. These results show that the present RIE of NiFe was dominated by a chemical reaction rather than a physical sputtering.

P-I-N 역구조 페로브스카이트 태양전지 응용을 위한 Nickel oxide 홀전달층의 열처리 온도 연구 (Annealing Temperature of Nickel Oxide Hole Transport Layer for p-i-n Inverted Perovskite Solar Cells)

  • 김기성;김미정;김효정;양정엽
    • Current Photovoltaic Research
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    • 제11권4호
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    • pp.103-107
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    • 2023
  • A Nickel oxide (NiOx) thin films were prepared via sol-gel process on a transparent conductive oxide glass substrate. The NiOx thin films were spin-coated in ambient air and subsequently annealed for 30 minutes at temperatures ranging from 150℃ to 450℃. The structural and optical characteristics of the NiOx thin films annealed at various temperatures were measured using X-ray diffraction, field emission scanning electron microscopy, and ultraviolet-visible spectroscopy. After optimizing the NiOx coating conditions, perovskite solar cells were fabricated with p-i-n inverted structure, and its photovoltaic performance was evaluated. NiOx thin films annealed at 350℃ exhibited the most favorable characteristics as a hole transport layer, resulting in the highest power conversion efficiency of 17.88 % when fabricating inverted perovskite solar cells using this film.

치과용 Ni-Ti파일의 표면특성에 미치는 ta-C코팅효과 (Effects of ta-C Coatings on Surface Characteristics of Dental Ni-Ti Files)

  • 박순균;최한철
    • Corrosion Science and Technology
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    • 제22권5호
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    • pp.368-376
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    • 2023
  • Dental Ni-Ti files must ensure stability and resistance to fatigue fracture. DLC and ta-C were coated to remove defects on the surface and ensure stability, and the surface characteristics were investigated. When coated with DLC, it was black, and in case of ta-C coating, it was blue-black. Scratches, which are defects caused by mechanical processing, were formed on the surface of the un-coated Ni-Ti file from the end of the file along the direction of processing, with the Pro-file appearing in the vertical direction and the K-file appearing in the file direction. Scratches were reduced on the coated surface, and the surface roughness was greatly reduced after coating compared to before coating. The un-coated Ni-Ti file had the lowest hardness, the DLC-coated file had the highest hardness, and ta-C showed relatively high hardness. The elastic modulus of the DLC coating film was high, and the ta-C elastic modulus was low. The adhesion of the DLC coating film tended to be higher than that of ta-C, and the wear loss amount of DLC coating of taC was lower. The corrosion potential of the ta-C coating increased significantly, and the corrosion current density decreased.

전기도금법으로 제조한 Ni 박막의 전기비저항 및 솔더 반응성 (Electrical Resistivity and Solder-Reaction Characteristics of Ni Films Fabricated by Electroplating)

  • 이광용;원혜진;전성우;오택수;변지영;오태성
    • 마이크로전자및패키징학회지
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    • 제12권3호
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    • pp.253-258
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    • 2005
  • 도금전류밀도에 따른 Ni박막의 결정립 크기, 전기비저항, 솔더 wetting angle 및 금속간화합물의 성장속도를 분석하였다. 도금전류밀도를 $5\;mA/cm^2$에서 $40\;mA/cm^2$로 증가시킴에 따라 Ni 박막의 표면 nodule의 크기가 감소하고 결정립이 미세화 되었으며, 전기비저항이 $7.37\mu\Omega-cm$에서 $9.13\mu\Omega-cm$로 증가하였다. $5\;mA/cm^2$$10\;mA/cm^2$에서 도금한 Ni 박막이 $40\;mA/cm^2$에서 형성한 Ni 박막에 비해 전기비저항이 낮고 dense하며 계면 금속간화합물의 성장속도가 느리기 때문에 무연솔더의 UBM 용도로 더 적합할 것이다.

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