• Title/Summary/Keyword: Nd : YAG 레이저

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Analysis of Crack Behavior in a Ceramic Nd:YAG (세라믹 Nd:YAG 레이저 매질의 균열 해석)

  • Kim, Duck-Lae;Kim, Byung-Tai
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.186-186
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    • 2010
  • The crack behavior in the ceramic Nd:YAG at a laser-diode end-pumped Nd:YAG ceramic laser was investigated. The fracture critical temperature difference of the ceramic Nd:YAG is about $355^{\circ}C$. The fracture of the 2 at% and the 4 at.% ceramic Nd:YAG occurred more than 14.9 W and 6.9 W pump powers, respectively, under lasing conditions.

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ITO, PR, 격벽 재료의 레이저 직접 미세가공

  • Lee, Cheon;Lee, Gyung-Chul;Ahn, Min-Young;Lee, Hong-Gyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.80-80
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    • 1999
  • 플라즈마 디스플레이 패널(PDP)의 공정을 간단히 하기 위하여 포토레지스트, ITO, 격벽재료를 Ar+ laser(λ-514 nm, CW)와 Nd:YAG laser(λ=532, 266nm, pulse)로 직접 패터닝 하였다. 레이저에 의한 포토레지스트의 패턴결과, 아르곤 이온 레이저의 포토레지스트 가공의 반응 메카니즘은 레이저 빔의 열에 의한 시료 표면의 국부적인 온도상승에 의한 용융작용이며, 그 결과 식각 후 형성된 패턴의 단면 모양도 레이저빔의 profile과 같은 가우시안 형태를 나타낸다. Nd:YAG 레이저의 4고조파(532nm)를 이용한 경우 200$\mu\textrm{m}$/sce의 주사속도에서 포토레지스트를 패턴하기 위한 임계에너지(threshold energy fluence) 값은 25J/cm2이며, 약 40J/cm2의 에너지 밀도에서 하부기판의 손상이 발생하기 시작하였다. 글미 1은 Nd:YAG 레이저 4고조파를 이용하여 포토레지스트를 식각한 경우 SEM 표면사진(위)과 단차특정기에 의한 단면형상(아래)이다. ITO 막의 레이저에 의한 직접 패턴 결과, ITO 막은 레이저 펄스에 의한 급속 가열 및 증발에 의한 메커니즘으로 식각이 이루어지며, 레이저 파장에 따른 광흡수 정도의 차이에 의해 2고조파 (532nm)에서 ITO 막의 가공 품질이 4고조파(266nm)에 비해 우수하며 패턴의 폭도 출력에 따라 제어가 용이하였다. 그림 2는 Nd:YAG 레이저 2고조파를 이용하여 ITO를 식각한 경우 SEM표면 사진(위)과 단차측정기에 의한 단면형상(아래)이다. 격벽 재료의 레이저에 의한 직접 패턴 결과, Ar+ 레이저(514nm)는 출력 밀도 32NW/cm2에서 격벽을 유리 기판의 경계면까지 식각하였다. Nd:YAG 레이저(532nm)는 laser fluence가 6.5mJ/cm2에서 격벽을 식각하기 시작하였으며, 19.5J/cm2에서 유리기판의 rudraus(격벽 두께 130$\mu\textrm{m}$)까지 식각하였다.

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Dynamical Behavior of Bidirectional Monolithic Nd:YAG Ring Laser (양방향으로 발진하는 일체형 Nd:YAG 고리레이저에서의 출력변조현상)

  • 홍정미;손승현;송홍주;길상근;이재철
    • Korean Journal of Optics and Photonics
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    • v.6 no.2
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    • pp.115-121
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    • 1995
  • 본 논문에서는 일체형, Nd:YAG 고리 레이저에서 서로 반대방향으로 진행하는 두 모드의 비선형적인 상호작용에 의한 출력 불안정 현상을 조사하였다. 실험을 통하여 두 모드가 각각 단일 종모드로 발진함을 확인하였고, 레이저가 발진하는 임계치 부근의 낮은 펌핑수준을 유지하여 다중모드간의 경쟁이나 단방향 발진에 의한 출력 불안정이 아님을 확인하였다. 또한 잘 알려진 시스템 고유의 감쇄진동과 구별되는 현상임을 보였다. 두 모드간의 손실차가 클수록 이 출력의 변조주파수는 증가하고 변조폭이 줄어 들어 안정화 되며 단방향 발진이 일어난다.

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Cleaning of NiP Hard Disk Substrate Using Near-Infrared and Ultraviolet Irradiation of Nd:YAG Laser Pulses (Nd:YAG 레이저의 근적외선과 자외선 펄스를 이용한 NiP 하드디스크 기층의 세척)

  • ;C. P. Grigoropoulos
    • Laser Solutions
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    • v.4 no.2
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    • pp.39-45
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    • 2001
  • This paper introduces a cleaning process for removing submicron-sized particles from NiP hard disk substrates by the liquid-assisted laser cleaning technique. Measurements of cleaning Performance and time-resolved optical diagnostics are Performed to analyze the physical mechanism of contaminant removal. The results reveal that nanosecond laser pulses are effective for removing the contaminants regardless of the wavelength and that a thermal mechanism involving explosive vaporization of liquid dominates the cleaning process.

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Micro-patterning of Multi-layered Magnetic Metal Films Using Nd:YAG Laser (Nd:YAG Laser를 이용한 자성금속 막의 패턴 식각)

  • Chae, Sang-Hun;Seo, Yeong-Jun;Song, Jae-Seong;Min, Bok-Gi;An, Seung-Jun;Lee, Ju-Hyeon
    • Korean Journal of Materials Research
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    • v.10 no.2
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    • pp.171-174
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    • 2000
  • In this study, the laser patterning of sputter-deposited amorphous CoNbZr films has been tried usig Nd: YAG laser. However, the metal film was not removed because of its high reflectance of the alser on the metal surface. To solve this problem, authors tried to screen-print a block polymer on the metal film and then irradiate the laser on the polymer. This is a new method which was suggested by this study. Using this new method, the metal films were effectively removed with the laser power of 114W even though the metal films was not removed with the laser power of 332W using the conventional method. This result leads to the conclusion that the block polymer acts as a laser energy absorbing and transferring layer.

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The Output Characteristics of Low Repetition·High Power Nd:YAG Laser Using LLC Resonant Converter (LLC 공진형 컨버터를 활용한 저 반복·고출력 Nd:YAG 레이저의 출력특성)

  • Lee, Hee-Chang
    • Journal of Advanced Marine Engineering and Technology
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    • v.39 no.3
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    • pp.286-291
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    • 2015
  • LLC resonant converter is used to control laser output power in Nd:YAG laser. Zero voltage switching (ZVS) is implemented to minimize the switching loss which is adopting the LLC resonant converter. In the spot welding processing of metal thin films, the processing quality is decided by the laser beam output energy of single pulse. We decide to the 50 [J] as the single pulse laser beam energy. Laser output power is investigated and experimented by changing the output current. That current is controled by the charging voltage of capacitor. From those results, we obtained the maximum laser output of 58.2 [J] and the conversion efficiency of 2.52% at the discharge voltage of 620V and the discharge current of 861 [A] and the pulse repetition rate of 1 [Hz] at the charging capacitor of 12,000 [${\mu}F$].

Study on the Core Loss Improvement of SiFe Plate in Relation with Laser Pulse Width in the Laser Scribing (레이저 스크라이빙에 있어서 레이저의 펄스폭에 따른 규소강판의 코어손실 개선 연구)

  • Ahn, Seung-Joon;Park, Chul-Geun;Ahn, Seong-Joon
    • Journal of the Korean Magnetics Society
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    • v.15 no.6
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    • pp.320-324
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    • 2005
  • The core loss of $3\%$ SiFe is strongly dependent on silicon content, impurities, permeability, and domain structure of the SiFe. Domain refining has been proved to be very good method for reduction of core loss in high permeability grain oriented SiFe, and laser scribing is well-blown as an effective and industrially important method of domain refinement. In this work, magnetic domain refinement has been carried out by using a pulsed Nd : YAG laser, and the core losses have been measured and analyzed to and optimal parameters of the laser treatment. The laser hem was focused with a spot size of $100{\mu}m$ and pulse energy of 10${\~}$35mJ and the lines were scribed with a period of ${\~}$5mm. The core loss was improved up to $17\%$ with 30 ns-Nd : YAG laser beam in $3\%$ SiFe.

Micromachining of PZT using Nd:YAG laser (Nd:YAG 레이저를 이용한 PZT의 미세가공)

  • Hong J.U.;Lee J.H.;Suh J.;Shin D.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.223-224
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    • 2006
  • In this study, we have investigated the micromachining of PZT to fabricate interdigitated electrodes of electro active material actuator using Nd:YAG laser We have observed groove shapes of PZT with changing beam power, scanning speed, gas, and so on to find optimum conditions of the laser processing for PZT grooves. As a result, this method has been applied to the laser micromachining for grooves in PZT surface, and we could have optimum parameters of Nd:YAG laser Finally it was shown that the laser micromachining of PZT can substitute fer bonding, etching and deposition processes in fabricating electro active material actuator embedded with interdigitated electrodes.

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On-off intermittency in an intracavity frequency doubled Nd:YAG laser pumped by a laser diode (반도체 레이저로 펌핑하는 Nd:YAG 레이저의 내부 발생형 제2차 고조파의 On-Off간헐성)

  • 김규욱;추한태;김동익;박영재;김칠민
    • Korean Journal of Optics and Photonics
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    • v.13 no.1
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    • pp.73-78
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    • 2002
  • We have investigated the lasing characteristics of intracavity second harmonics of a Nd:YAG laser pumped by a laser diode. Through the analysis of the scalings of laminar phases, we verify that the second harmonics are generated through on-off intermittency. The intermittent behavior can be reproduced by a numerical simulation with rate equations.

Evaluation of Nd:YAG Laser Beam Quality in Unstable Rosonators (불안전형 공진기를 갖는 Nd:YAG 레이저에서의 beam quality 평가)

  • 김광석;김정묵;김철중;이종민
    • Korean Journal of Optics and Photonics
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    • v.5 no.1
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    • pp.60-66
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    • 1994
  • First, the beam waist size of TE$M_{00}$ Nd:YAG laser mode with Positive Branch Unstable Resonator was calculated. and then, the output power, fundamental mode and multimode beam quality factor of PBUR were measured and compared with thouse of reference resonator with plane pallalel mirrors. In characterizing the beam quality, the $M^2$ concept was used. The focusability of laser beam in unstable resonators was discussed with this $M^2$.

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