• 제목/요약/키워드: Nano-thickness

검색결과 842건 처리시간 0.023초

50 nm 이상의 CMOS 기술에 이용되는 Spin-on Dielectric 박막 형성과 그 특성에 미치는 전구체의 영향 (The Effects of Precursor on the Formation and Their Properties of Spin-on Dielectric Films Used for Sub-50 nm Technology and Beyond)

  • 이완규
    • 한국진공학회지
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    • 제20권3호
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    • pp.182-188
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    • 2011
  • 탄소가 없는 폴리실라잔 계와 탄소가 함유된 폴리메틸 실라잔 계 전구체를 실리콘 기판에 스핀코팅하고 $150^{\circ}C$, $400^{\circ}C$, $850^{\circ}C$에서 열처리하여 형성된 박막의 물리적 화학적 특성을 평가하였다. 프리에 변환 적외선 분광, 수축 율, 갭-충진, 식각속도 등을 평가하여 박막형성과 형성된 박막의 물리화학적 특성에 미치는 탄소의 영향을 고찰하였다. 탄소함유 전구체는 (탄소가 없는 전구체보다) $400^{\circ}C$에서 질소, 수소, 탄소의 휘발량이 더 적고 산소 흡수량이 더 적어서 (15.6%)보다 낮은 14.5% 두께 수축을 나타내었으나, $800^{\circ}C$에서는 휘발 량이 더 많고 산소 흡수량도 더 많아져 (19.4%)보다 높은 37.4% 두께 수축을 나타냈다. 프리에 변환 적외선 분광분석결과, 전구체내의 탄소는 Spin-on dielectric (SOD) 박막으로 하여금 Si-O 결합형성을 적게, 박막특성을 불균일하게, 그리고 화학 용액에 더 빨리 식각되도록 만들었다.

나노구조 이중게이트 FinFET의 크기변화에 따른 문턱전압이동 및 DIBL 분석 (Analysis of Dimension-Dependent Threshold Voltage Roll-off and DIBL for Nano Structure Double Gate FinFET)

  • 정학기
    • 한국정보통신학회논문지
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    • 제11권4호
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    • pp.760-765
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    • 2007
  • 본 연구에서는 나노구조 이중게이트 FinFET에 대하여 문턱전압이동 특성 및 드레인유기장벽저하(Drain Induced Barrier Lowering; DIBL)특성을 분석하였다. 분석을 위하여 분석학적 전류모델을 개발하였으며 열방사전류 및 터널링전류를 포함하였다. 열방사전류는 포아슨방정식에 의하여 구한 포텐셜분포 및 맥스월-볼쯔만통계를 이용한 캐리어분포를 이용하여 구하였으며 터널링 전류는 WKB(Wentzel-Kramers-Brillouin)근사를 이용하였다. 이 두 모델은 상호 독립적이므로 각각 전류를 구해 더함으로써 문턱 전압을 구하였다. 본 연구에서 제시한 모델을 이용하여 구한 문턱 전압 이동값이 이차원 시뮬레이션값과 비교되었으며 잘 일치함을 알 수 있었다. 분석 결과 10nm 이하에서 특히 터널링의 영향이 증가하여 문턱전압이동 및 DIBL이 매우 현저하게 나타남을 알 수 있었다. 이러한 단채널현상을 감소시키기 위하여 채널두께 및 게이트산화막의 두께를 가능한한 얇게 제작하여야함을 알았으며 이를 위한 산화공정개발이 중요하다고 사료된다.

Preparation and Microwave Absorption Properties of the Fe/TiO2/Al2O3 Composites

  • Li, Yun;Cheng, Haifeng;Wang, Nannan;Zhou, Shen;Xie, Dongjin;Li, Tingting
    • Nano
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    • 제13권11호
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    • pp.1850125.1-1850125.12
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    • 2018
  • To reduce the imbalance of impedance matching between the magnetic metal nanowires and free space, $Fe/TiO_2$ core/shell nanowire arrays with different diameters were fabricated in the templates of anodic aluminum oxide membranes by electrodeposition. The influences of the microstructure on the microwave absorption properties of the $Fe/TiO_2/Al_2O_3$ composites were studied by the transmission/reflection waveguide method. It was demonstrated experimentally that both the interfacial polarization and the diameter of the $Fe/TiO_2$ core/shell nanowires have critical effects on the microwave absorption properties. We also investigated the angle dependence of the microwave absorption properties. Due to the interfacial polarization and associated relaxation, the $Fe/TiO_2/Al_2O_3$ composites exhibited optimal microwave absorption properties when microwave propagation direction was accordant with the axis of the nanowires. Finally, we managed to obtain an optimal reflection loss of below -10 dB (90% absorption) over 10.2-14.8 GHz, with a thickness of 3.0 mm and the minimum value of -39.4 dB at 11.7 GHz.

이차전지 음극활물질 Si/PC/CNF/PC 복합 소재의 전기화학적 특성 (Electrochemical Characteristics of Si/PC/CNF/PC Composite for Anode Material of Lithium ion Battery)

  • 전도만;나병기;이영우
    • Korean Chemical Engineering Research
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    • 제56권6호
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    • pp.798-803
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    • 2018
  • Si을 리튬이온전지 음극활물질로 사용하기 위해 입도를 $0.5{\mu}m$ 보다 작은 크기로 제어하였고 표면에 탄소를 약 10 nm 두께로 코팅하였다. 그 위에 탄소섬유를 50~150 wt% 양으로 성장시키고 다시 한 번 탄소코팅을 진행하였다. 이렇게 만들어진 Si 합성물질은 전기전도성을 높이기 위한 공정으로 이종 금속을 혼합하였으며 수명 특성을 개선하기 위해 흑연과 복합화하였다. 실험 변수에 따른 재료들의 물리화학적 특성을 XRD, SEM 및 TEM을 사용하여 측정하였고 코인셀을 제조하여 전기화학적 특성을 평가하였다. Si/PC (Pyrolytic Carbon)/CNF (Carbon Nano Fiber)보다 Si/PC/CNF/PC가 전체적으로 Si 함량이 줄어 방전용량은 상대적으로 낮게 나타났지만 전지평가에서 중요한 수명특성에서는 좋은 결과를 보여주었다. 0.2 C rate에서 $1512mA\;h\;g^{-1}$의 초기 방전 용량과 78%의 초기 효율을 나타내었고 10 싸이클에서 94%의 용량 보존율을 보여주었다.

Hardness and Oxidation Resistance of Ti0.33Al0.67N/CrN Nano-multilayered Superlattice Coatings

  • Ahn, Seung-Su;Oh, Kyung-Sik;Chung, Tai-Joo;Park, Jong-Keuk
    • 한국세라믹학회지
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    • 제56권1호
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    • pp.49-55
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    • 2019
  • $Ti_{0.33}Al_{0.67}N/CrN$ nano-multilayers, which are known to have excellent wear resistance, were prepared using an unbalanced magnetron sputter to have various periods of 2-5 nm. $Ti_{0.33}Al_{0.67}N$ had a hexagonal structure in a single layer, but converted to a cubic structure by forming a multilayer with CrN, which has a cubic structure. Thus, $Ti_{0.33}Al_{0.67}N$ formed a superlattice in the multilayer. The $Ti_{0.33}Al_{0.67}/CrN$ multilayer with a period of 2.5 nm greatly exceeded the hardness of the $Ti_{0.33}Al_{0.67}N$ and the CrN single layer, reaching 39 GPa. According to the low angle X-ray diffraction results, the $Ti_{0.33}Al_{0.67}N/CrN$ multilayer maintained its as-coated structure to a temperature as high as $700^{\circ}C$ and exhibited hardness of 30 GPa. The thickness of the oxide layer of the $Ti_{0.33}Al_{0.67}N/CrN$ multilayered coating was less than one-tenth of those of the single layers. Thus, $Ti_{0.33}Al_{0.67}N/CrN$ multilayered coating had hardness and oxidation resistance far superior to those of its constituent single layers.

그래핀의 나노스케일 마찰 및 표면 특성에 대한 연구동향 (Research Trends in the Nanoscale Friction and Surface Characteristics of Graphene)

  • 윤민아;김광섭;조대현
    • Tribology and Lubricants
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    • 제37권5호
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    • pp.151-163
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    • 2021
  • Since the discovery of single-layer graphene, exploiting graphene's excellent physical/chemical properties in tribology systems has been a topic of interest in academia over the last few decades. There is no doubt that understanding the underlying friction mechanism of graphite should precede this. Even now, new properties of graphene are being reported in academia, and based on this, studies exploring the origins of graphene's surface properties and friction characteristics in a wide range of scales are also being performed. From the perspective of lubrication engineering, graphene research can be largely divided into studies that 1) reveal its basic friction mechanism at the nanoscale and 2) explore its application in macroscale sliding systems. At the nanoscale, the basic friction mechanism of graphene is mainly due to its atomic thickness. In this paper, the various research on the nanoscale friction and surface characteristics of graphene is reviewed. Graphene surface properties, such as wettability and surface energy and the basic friction mechanisms of graphene attributed to adhesion, electronphonon scattering, bending stiffness, and the underlying substrate, are summarized. Further, we provide the research outcomes on the superlubricity of graphene. Finally, the potential application and challenges of the superlubricity of graphene are highlighted. Through this, we intend to provide summarized information to researchers interested in the tribological properties of graphene and help set the direction of future research.

PdO 박막의 환원과 환원된 Pd박막의 수소 감지 특성 (A Reduction Process of Palladium Oxide Thin Films and Hydrogen Gas Sensing Properties of Reduced Palladium Thin Films)

  • 이영택;김연주;이준민;조진현;이우영
    • 대한금속재료학회지
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    • 제48권4호
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    • pp.347-352
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    • 2010
  • This study reports a novel method off abricating highly sensitive hydrogen gas sensors based on PdO thin films. The PdO thin films with a thickness of 40 nm were deposited on Si substrates under Ar and $O_2$ ambient conditions using a reactive de magnetron sputtering system. Considerable changes in the resistance of the palladium oxide thin films were observed when they were initially exposed to hydrogen gas, as a result of the reduction process. The sensitivity of the PdO thin films was found to be as high as 90%. After the thin films were exposed to hydrogen gas, the nano-sized cracks were discovered to have formed on the surface of the PdO thin films. These types of nano-cracks that formed on the deoxidized PdO thin films are known to play a key role incausing a four-fold reduction of the response time of the absorption process. The results of this study demonstrate that deoxidized PdO thin films can be applied for use in the creation of high-sensitivity hydrogen sensors.

Geometrically nonlinear thermo-mechanical analysis of graphene-reinforced moving polymer nanoplates

  • Esmaeilzadeh, Mostafa;Golmakani, Mohammad Esmaeil;Kadkhodayan, Mehran;Amoozgar, Mohammadreza;Bodaghi, Mahdi
    • Advances in nano research
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    • 제10권2호
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    • pp.151-163
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    • 2021
  • The main target of this study is to investigate nonlinear transient responses of moving polymer nano-size plates fortified by means of Graphene Platelets (GPLs) and resting on a Winkler-Pasternak foundation under a transverse pressure force and a temperature variation. Two graphene spreading forms dispersed through the plate thickness are studied, and the Halpin-Tsai micro-mechanics model is used to obtain the effective Young's modulus. Furthermore, the rule of mixture is employed to calculate the effective mass density and Poisson's ratio. In accordance with the first order shear deformation and von Karman theory for nonlinear systems, the kinematic equations are derived, and then nonlocal strain gradient scheme is used to reflect the effects of nonlocal and strain gradient parameters on small-size objects. Afterwards, a combined approach, kinetic dynamic relaxation method accompanied by Newmark technique, is hired for solving the time-varying equation sets, and Fortran program is developed to generate the numerical results. The accuracy of the current model is verified by comparative studies with available results in the literature. Finally, a parametric study is carried out to explore the effects of GPL's weight fractions and dispersion patterns, edge conditions, softening and hardening factors, the temperature change, the velocity of moving nanoplate and elastic foundation stiffness on the dynamic response of the structure. The result illustrates that the effects of nonlocality and strain gradient parameters are more remarkable in the higher magnitudes of the nanoplate speed.

마이크로 스탬프를 이용한 Micro-LED 개별 전사 및리플로우 공정에 관한 연구 (A Study on Selective Transfer and Reflow Process of Micro-LED using Micro Stamp)

  • 한승;윤민아;김찬;김재현;김광섭
    • Tribology and Lubricants
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    • 제38권3호
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    • pp.93-100
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    • 2022
  • Micro-light emitting diode (micro-LED) displays offer numerous advantages such as high brightness, fast response, and low power consumption. Hence, they are spotlighted as the next-generation display. However, defective LEDs may be created due to non-uniform contact loads or LED alignment errors. Therefore, a repair process involving the replacement of defective LEDs with favorable ones is necessitated. The general repair process involves the removal of defective micro-LEDs, interconnection material transfer, as well as new micro-LED transfer and bonding. However, micro-LEDs are difficult to repair since their size decreases to a few tens of micron in width and less than 10 ㎛ in thickness. The conventional nozzle-type dispenser for fluxes and the conventional vacuum chuck for LEDs are not applicable to the micro-LED repair process. In this study, transfer conditions are determined using a micro stamp for repairing micro-LEDs. Results show that the aging time should be set to within 60 min, based on measuring the aging time of the flux. Additionally, the micro-LEDs are subjected to a compression test, and the result shows that they should be transferred under 18.4 MPa. Finally, the I-V curves of micro-LEDs processed by the laser and hot plate reflows are measured to compare the electrical properties of the micro-LEDs based on the reflow methods. It was confirmed that the micro-LEDs processed by the laser reflow show similar electrical performance with that processed by the hot plate reflow. The results can provide guidance for the repair of micro-LEDs using micro stamps.

Seismic response of NFRP reinforced RC frame with shape memory alloy components

  • Varkani, Mohamad Motalebi;Bidgoli, Mahmood Rabani;Mazaheri, Hamid
    • Advances in nano research
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    • 제13권3호
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    • pp.285-295
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    • 2022
  • Creation of plastic deformation under seismic loads, is one of the most serious subjects in RC structures with steel bars which reduces the life threatening risks and increases dissipation of energy. Shape memory alloy (SMA) is one of the best choice for the relocating plastic hinges. In a challenge to study the seismic response of concrete moment resisting frame (MRF), this article investigates numerically a new type of concrete frames with nano fiber reinforced polymer (NFRP) and shape memory alloy (SMA) hinges, simultaneously. The NFRP layer is containing carbon nanofibers with agglomeration based on Mori-Tanaka model. The tangential shear deformation (TASDT) is applied for modelling of the structure and the continuity boundary conditions are used for coupling of the motion equations. In SMA connections between beam and columns, since there is phase transformation, hence, the motion equations of the structure are coupled with kinetic equations of phase transformation. The Hernandez-Lagoudas theory is applied for demonstrating of pseudoelastic characteristics of SMA. The corresponding motion equations are solved by differential cubature (DC) and Newmark methods in order to obtain the peak ground acceleration (PGA) and residual drift ratio for MRF-2%. The main impact of this paper is to present the influences of the volume percent and agglomeration of nanofibers, thickness and length of the concrete frame, SMA material and NFRP layer on the PGA and drift ratio. The numerical results revealed that the with increasing the volume percent of nanofibers, the PGA is enhanced and the residual drift ratio is reduced. It is also worth to mention that PGA of concrete frame with NFRP layer containing 2% nanofibers is approximately equal to the concrete frame with steel bars.