• Title/Summary/Keyword: Nano-thickness

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Density control of ZnO nanorod arrays using ultrathin seed layer by atomic layer deposition

  • Shin, Seokyoon;Park, Joohyun;Lee, Juhyun;Choi, Hyeongsu;Park, Hyunwoo;Bang, Minwook;Lim, Kyungpil;Kim, Hyunjun;Jeon, Hyeongtag
    • Journal of Ceramic Processing Research
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    • v.19 no.5
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    • pp.401-406
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    • 2018
  • We investigated the effect of ZnO seed layer thickness on the density of ZnO nanorod arrays. ZnO has been deposited using two distinct processes consisting of the seed layer deposition using ALD and subsequent hydrothermal ZnO growth. Due to the coexistence of the growth and dissociation during ZnO hydrothermal growth process on the seed layer, the thickness of seed layer plays a critical role in determining the nanorod growth and morphology. The optimized thickness resulted in the regular ZnO nanorod growth. Moreover, the introduction of ALD to form the seed layer facilitates the growth of the nanorods on ultrathin seed layer and enables the densification of nanorods with a narrow change in the seed layer thickness. This study demonstrates that ALD technique can produce densely packed, virtually defect-free, and highly uniform seed layers and two distinctive processes may form ZnO as the final product via the initial nucleation step consisting of the reaction between $Zn^{2+}$ ions from respective zinc precursors and $OH^-$ ions from $H_2O$.

Optimal Determination of the Fabrication Parameters in Focused Ion Beam for Milling Gold Nano Hole Array (금 나노홀 어레이 제작을 위한 집속 이온빔의 공정 최적화)

  • Cho, Eun Byurl;Kwon, Hee Min;Lee, Hee Sun;Yeo, Jong-Souk
    • Journal of the Korean Vacuum Society
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    • v.22 no.5
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    • pp.262-269
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    • 2013
  • Though focused ion beam (FIB) is one of the candidates to fabricate the nanoscale patterns, precision milling of nanoscale structures is not straightforward. Thus this poses challenges for novice FIB users. Optimal determination in FIB parameters is a crucial step to fabricate a desired nanoscale pattern. There are two main FIB parameters to consider, beam current (beam size) and dose (beam duration) for optimizing the milling condition. After fixing the dose, the proper beam current can be chosen considering both total milling time and resolution of the pattern. Then, using the chosen beam current, the metal nano hole structure can be perforated to the required depth by varying the dose. In this experiment, we found the adequate condition of $0.1nC/{\mu}m^2$ dose at 1 pA Ga ion beam current for 100 nm thickness perforation. With this condition, we perforated the periodic square array of elliptical nano holes.

Investigation on hygro-thermal vibration of P-FG and symmetric S-FG nanobeam using integral Timoshenko beam theory

  • Matouk, Hakima;Bousahla, Abdelmoumen Anis;Heireche, Houari;Bourada, Fouad;Bedia, E.A. Adda;Tounsi, Abdelouahed;Mahmoud, S.R.;Tounsi, Abdeldjebbar;Benrahou, K.H.
    • Advances in nano research
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    • v.8 no.4
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    • pp.293-305
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    • 2020
  • In the current research, the free vibrational behavior of the FG nano-beams integrated in the hygro-thermal environment and reposed on the elastic foundation is investigated using a novel integral Timoshenko beam theory (ITBT). The current model has only three variables unknown and requires the introduction of the shear correction factor because her uniformed variation of the shear stress through the thickness. The effective properties of the nano-beam vary according to power-law and symmetric sigmoid distributions. Three models of the hygro-thermal loading are employed. The effect of the small scale effect is considered by using the nonlocal theory of Eringen. The equations of motion of the present model are determined and resolved via Hamilton principle and Navier method, respectively. Several numerical results are presented thereafter to illustrate the accuracy and efficiency of the actual integral Timoshenko beam theory. The effects of the various parameters influencing the vibrational responses of the P-FG and SS-FG nano-beam are also examined and discussed in detail.

Fabrication Characteristics of Slag Fiber by 4 Wheel System (4휠 시스템을 이용한 슬래그 섬유의 제조)

  • Song, Yeong-Hwan;Seong, Hwan-Goo;Park, Soo-Han;Wang, Xiaosong;Hur, Bo-Young
    • Journal of Korea Foundry Society
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    • v.26 no.5
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    • pp.222-226
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    • 2006
  • Steel making slag has gained a considerable attraction as one candidate of eco-materials in research fields for recycling resources. Thus, many researches have been performed but were limited to development of substitute for cement being used in the construction field. A little research work also has been done on development of higher value-added materials, including heat resistant and sound absorbing materials. For this reason, the present study were focused on macrostructure characterization of fabricated slag fibers which are applicable to heat resistant materials. The slag fibers were fabricated through a modified melt extraction method. The processing variables employed were the wheel speed and molten slag temperature. The synthesized fibers were characterized by optical microscope and scanning electron microscopy. It was found that the wheel speed of 1400 rpm generated better quality of mineral fibers in terms of the relative amount of shot, diameter and length. This was attributed to the relative extent of contact width between the flowing melt and the rotating wheel. The thickness of the slag fibers also were decreased with increasing the slag melt temperature due mainly to significant decrease in the viscosity of the slag melt. In addition, the lower melt temperature caused an increase in number of shots plus the mineral fibers.

A study on the Particulate Properties of Ti-Ni alloy Nanopowders Prepared by Levitational Gas Condensation Method (부양가스증발응축법으로 제조된 Ti-Ni 합금 나노분말의 특성 연구)

  • Han, B.S.;Uhm, Y.R.;Lee, M.K.;Kim, G.M.;Rhee, C.K.
    • Journal of Powder Materials
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    • v.13 no.6 s.59
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    • pp.396-400
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    • 2006
  • The Ti-Ni alloy nanopowders were synthesized by a levitational gas condensation (LGC) by using a micron powder feeding system and their particulate properties were investigated by x-ray diffraction (XRD), transmission electron microscopy (TEM) and Brunauer-Emmett-Teller (BET) method. The starting Ti and Ni micron powders $150{\mu}m$ were incorporated into the micron powder feeding system. An ingot type of the Ti-Ni ahoy was used as a seed material for the levitation and evaporation reactions. The collected powders were finally passivated by oxidation. The x-ray diffraction experiments have shown that the synthesized powders were completely alloyed with Ti and Ni and comprised of two different cubic and monoclinic crystalline phases. The TEM results showed that the produced powders were very fine and uniform with a spherical particle size of 18 to 32nm. The typical thickness of a passivated oxide layer on the particle surface was about 2 to 3 nm. The specific surface area of the Ti-Ni alloy nanopowders was $60m^2/g$ based on BET method.

Realization of 3D Image on Metal Plate by Optimizing Machining Conditions of Ultra-Precision End-Milling (초정밀 엔드밀링 가공조건 최적화를 통한 금속상의 3차원 이미지 구현)

  • Lee, Je-Ryung;Moon, Seung Hwan;Je, Tae-Jin;Jeong, Jun-Ho;Kim, Hwi;Jeon, Eun-chae
    • Journal of the Korean Society for Precision Engineering
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    • v.33 no.11
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    • pp.885-891
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    • 2016
  • 3D images are generally manufactured by complex production processes. We suggested a simple method to make 3D images based on a mechanical machining technology in this study. We designed a tetrahedron consisted of many arcs having the depth of $100{\mu}m$ and the pitch of $500{\mu}m$, and machined them on an aluminum plate using end-milling under several conditions of feed-rate and depth of cut. The area of undeformed chip including depth of cut and feed-rate can predict quality of the machined arcs more precisely than the undeformed chip thickness including only feed rate. Moreover, a diamond tool can improve the quality than a CBN tool when many arcs are machined. Based on the analysis, the designed tetrahedron having many arcs was machined with no burr, and it showed different images when observed from the left and right directions. Therefore, it is verified that a 3D image can be designed and manufactured on a metal plate by end-milling under optimized machining conditions.

Study of ablation depth control of ITO thin film using a beam shaped femtosecond laser (빔 쉐이핑을 이용한 펨토초 레이저 ITO 박막 가공 깊이 제어에 대한 연구)

  • Kim, Hoon-Young;Yoon, Ji-Wook;Choi, Won-Seok;Stolberg, Klaus;Whang, Kyoung-Hyun;Cho, Sung-Hak
    • Laser Solutions
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    • v.17 no.1
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    • pp.1-6
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    • 2014
  • Indium tin oxide (ITO) is an important transparent conducting oxide (TCO). ITO films have been widely used as transparent electrodes in optoelectronic devices such as organic light-emitting devices (OLED) because of their high electrical conductivity and high transmission in the visible wavelength. Finding ways to control ITO micromachining depth is important role in the fabrication and assembly of display field. This study presented the depth control of ITO patterns on glass substrate using a femtosecond laser and slit. In the proposed approach, a gaussian beam was transformed into a quasi-flat top beam by slit. In addition, pattern of square type shaped by slit were fabricated on the surfaces of ITO films using femtosecond laser pulse irradiation, under 1030nm, single pulse. Using femtosecond laser and slit, we selectively controlled forming depth and removed the ITO thin films with thickness 145nm on glass substrates. In particular, we studied the effect of pulse number on the ablation of ITO. Clean removal of the ITO layer was observed when the 6 pulse number at $2.8TW/cm^2$. Furthermore, the morphologies and fabricated depth were characterized using a optical microscope, atomic force microscope (AFM), and energy dispersive X-ray spectroscopy (EDS).

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Effect of Microstructure on Electrical Properties of Thin Film Alumina Capacitor with Metal Electrode (금속 전극 알루미나 박막 캐패시터의 전기적 특성에 미치는 미세구조의 영향)

  • Jeong, Myung-Sun;Ju, Byeong-Kwon;Oh, Young-Jei;Lee, Jeon-Kook
    • Korean Journal of Materials Research
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    • v.21 no.6
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    • pp.309-313
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    • 2011
  • The power capacitors used as vehicle inverters must have a small size, high capacitance, high voltage, fast response and wide operating temperature. Our thin film capacitor was fabricated by alumina layers as a dielectric material and a metal electrode instead of a liquid electrolyte in an aluminum electrolytic capacitor. We analyzed the micro structures and the electrical properties of the thin film capacitors fabricated by nano-channel alumina and metal electrodes. The metal electrode was filled into the alumina nano-channel by electroless nickel plating with polyethylene glycol and a palladium catalyst. The spherical metals were formed inside the alumina nano pores. The breakdown voltage and leakage current increased by the chemical reaction of the alumina layer and $PdCl_2$ solution. The thickness of the electroless plated nickel layer was 300 nm. We observed the nano pores in the interface between the alumina layer and the metal electrode. The alumina capacitors with nickel electrodes had a capacitance density of 100 $nF/cm^2$, dielectric loss of 0.01, breakdown voltage of 0.7MV/cm and leakage current of $10^4{\mu}A$.

Electrical, optical, and structural properties of IZTO films grown by co-sputtering method using ITO and IZO target (ITO와 IZO 타겟의 Co-sputtering 방법으로 성장시킨 IZTO 박막의 전기적 광학적 구조적 특성연구)

  • Jeong, Jin-A;Choi, Kwang-Hyuk;Moon, Jong-Min;Bae, Jung-Hyeok;Kim, Han-Ki
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.379-380
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    • 2007
  • The characteristics of a co-sputtered indium zinc tin oxide (IZTO) films prepared by dual target dc magnetron sputtering from IZO and ITO targets at a room temperature are investigated. Film properties, such as sheet resistance, optical transmittance, surface work function and surface roughness were examined as a function of ITO dc power at constant IZO dc power of 100 W. It was shown that the increase of the ITO dc power during co-sputtering of ITO and IZO target resulted in an increase of sheet resistance of the IZTO films. This can be attributed to high resistivity of ITO film prepared at room temperature. Surface smoothness and roughness were investigated by Scanning Electron Microscopy (SEM) and Atomic Force Microscopy (AFM). The synchrotron x-ray scattering results obtained from IZTO film with different ITO contents showed that introduction of ITO atoms into amorphous IZO film resulted in a crystallization of IZTO film with (222) preferred orientation due to low alc transition temperature of ITO film. However, the transmittance of the IZTO films with thickness of 150 nm is between 80 and 85 % at wavelength of 550 nm regardless of ITO content. Possible mechanism to explain the ITO and IZO co-sputtering effect on properties of IZTO is suggested.

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Fabrication of silver stabilizer layer by coating process using nano silver paste on coated conductor (나노실버페이스트를 사용하는 코팅공정에 의한 coated conductor의 은 안정화층 제조)

  • Lee, Jong-Beom;Kim, Byeong-Joo;Kim, Hye-Jin;Yoo, Yong-Su;Lee, Hee-Gyoun;Hong, Gye-Won
    • Progress in Superconductivity and Cryogenics
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    • v.11 no.1
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    • pp.1-4
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    • 2009
  • Mechanical and electrical properties of silver stabilizer layer of coated conductor, which as prepared with nano silver paste as starting materials, have been investigated, Nano silver paste was coated on a YBCO film by dip coating process at a diping speed of 20m/min. Coated film was dried in air and heat treated at $400{\sim}700^{\circ}C$ in an oxygen atmosphere. Adhesion strength between YBCO and silver layer was measured by a tape est(ASTM D 3359). Hardness and electrical conductivity of the samples were measured by pencil hardness test (ASTM D 3363) and volume resistance test by LORESTA-GP (MITSHUBISHD, respectively. The sample heat-treated at $500^{\circ}C$ showed poor adhesion 1B, but samples heat treated at higher than $600^{\circ}C$ showed enhanced adhesion of 5B. The silver layer heat-treated at $700^{\circ}C$ showed the high hardness value larger than 9 H, low volume resistance, surface resistance value as well as superior current carrying capacity compared to sputtered silver. SEM observations showed that a dense silver layer was formed with a thickness of about $2{\mu}m$. Dip coated silver layer prepared by using nano silver paste showed superior electrical and mechanical characteristics.