Journal of Ceramic Processing Research

Ceramic Processing Research Center (한양대학교 세라믹연구소)
권호 표지

Density control of ZnO nanorod arrays using ultrathin seed layer by atomic layer deposition

  • Shin, Seokyoon (Division of Materials Science and Engineering, Hanyang University) ;
  • Park, Joohyun (Division of Nano-scale Semiconductor Engineering, Hanyang University) ;
  • Lee, Juhyun (Division of Materials Science and Engineering, Hanyang University) ;
  • Choi, Hyeongsu (Division of Materials Science and Engineering, Hanyang University) ;
  • Park, Hyunwoo (Division of Materials Science and Engineering, Hanyang University) ;
  • Bang, Minwook (Division of Materials Science and Engineering, Hanyang University) ;
  • Lim, Kyungpil (Division of Materials Science and Engineering, Hanyang University) ;
  • Kim, Hyunjun (Division of Materials Science and Engineering, Hanyang University) ;
  • Jeon, Hyeongtag (Division of Materials Science and Engineering, Hanyang University)
  • Published : 2018.10.01
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Abstract

We investigated the effect of ZnO seed layer thickness on the density of ZnO nanorod arrays. ZnO has been deposited using two distinct processes consisting of the seed layer deposition using ALD and subsequent hydrothermal ZnO growth. Due to the coexistence of the growth and dissociation during ZnO hydrothermal growth process on the seed layer, the thickness of seed layer plays a critical role in determining the nanorod growth and morphology. The optimized thickness resulted in the regular ZnO nanorod growth. Moreover, the introduction of ALD to form the seed layer facilitates the growth of the nanorods on ultrathin seed layer and enables the densification of nanorods with a narrow change in the seed layer thickness. This study demonstrates that ALD technique can produce densely packed, virtually defect-free, and highly uniform seed layers and two distinctive processes may form ZnO as the final product via the initial nucleation step consisting of the reaction between $Zn^{2+}$ ions from respective zinc precursors and $OH^-$ ions from $H_2O$.

Keywords

Acknowledgement

Supported by : National Research Foundation of Korea (NRF)

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