• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.177-179
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• 2011

The purpose of this study is to enhance an adhesion between substrate and Diamond-like Carbon (DLC) film. DLC has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion because of weak bonding between DLC film and the substrate. For improvement adhesion, a layer between DLC film and the substrate was prepared by dual post plasma. DLC film was deposited on nitrided layer by linear ion source. The composed compound layer between substrate and DLC film was investigated by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The synthesized bonding structure of DLC film was analyzed using a micro raman spectrometer. Mechanical properties were measured by nano-indentation. In order to clarify the mechanism for improvement in adhesive strength, it was observed by scratch test.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.477-477
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• 2012

The effects of argon neutral beam (NB) energy on the amorphous carbon (a-C) films were investigated, while the a-C films were deposited by neutral particle beam assisted sputtering (NBAS) system. The deposition characteristics of these films were studied as a function of NB energy (or reflector bias voltage). The film structures were investigated by Raman spectroscopy. The hardness was measured by nano-indentation tests and the optical band gap was measured by UV-visible spectroscopy.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.37.2-37.2
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• 2018

ZrN 코팅은 다른 하드 코팅과 비교해 우수한 기계적 특성 및 내식성으로 다양한 산업 분야에서 사용되고 있다. 특히 ZrN 기반의 코팅 중, ZrCuN 코팅은 50 GPa 이상의 매우 높은 경도를 나타내는 것으로 보고되고 있다. 본 연구에서는 Zr-Cu 기반 조성에 우수한 기계적 특성 향상을 위해 제 3의 원소를 첨가하여 단일합금 타겟을 제작하였다. 단일 합금 타겟은 플라즈마 아크멜팅법으로 제작되었으며, 제작된 단일합금 타겟을 이용하여 DC 마그네트론 스퍼터링 공정을 통해 Zr 기반의 나노복합박막을 증착하였다. Zr기반 나노복합 박막은 다양한 $Ar:N_2$ 분위기 하에서 증착하였으며, 가스비에 따른 코팅의 특성을 확인하기 위해 SEM/EDS, XRD, nano-indentation, friction test 분석을 진행하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.290-290
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• 2011

In this study Diamond-like carbon (DLC) films were deposited on p-type Si substrates using a Radio-Frequency magnetron Sputtering system. The DLC film was deposited by bombarding graphite target with a N2/Ar plasma mixture with various conditions: substrate, pressure, deposition time, temperature of substrate, power and ratio of gas mixture. The effect on the conduction and hardness of DLC thin films were investigated. The conduction of DLC films were measured by I-V measurement. In addition, Raman analysis was performed to study the chemical bonding structure. The hardness was measured by Nano indentation. Atomic Force Microscopy was used for determined surface morphology of DLC film.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.537-539
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• 2009

We report the improvement in adhesion of IZO thin films through oxygen ($O_2$) plasma treatment of organic polymer film. In conclusion, the $O_2$ plasma treatment of an organic polymer film was accomplished with improving ca. 1.8 times in adhesion than that of the only general etch treatment on the same organic polymer film.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2002.05a
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• pp.98-103
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• 2002

BGA(Ball Grid Array) 패키지의 솔더볼 패드 중의 하나인 Au/Ni-Co/Cu 금속층 위에 Bi가 첨가된 Sn-3.5Ag-$\chi$Bi 솔더볼을 리플로우시켰다. 리플로우한 후 130 $^{\circ}C$에서 열처리함에 따른 계면상 및 솔더 내부의 상변화를 관찰하였다. 계면에는 (Ni,Co)$_3$Sn$_4$외에 (Au,Ni,Co,Bi)Sn$_4$가 생성되었음을 관찰할 수 있었고, 솔더 내부에는 (Au,Ni,Co,Bi)SH$_4$, Ag$_3$Sn, Bi 상이 혼재되어 있었다. Nano-indentation에 의한 경도 측정 결과, Bi 함량 증가에 따라 경도는 증가하였으나, 볼전단(Ball Shear) 테스트 결과는 Bi가 증가됨에 따라 오히려 볼전단 강도값이 감소하였다. 이는 파면 검사 결과, 파괴 경로가 주로 계면의 금속간 화합물과 솔더 사이에서 진행함에 기인한 것이다. 솔더 내부의 파괴 경로를 가진 2.5Bi가 가장 우수한 볼전단 강도값을 나타내었는데, 이는 솔더내의 Bi의 고용강화에 기인한 것으로 보인다.

• Corrosion Science and Technology
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• v.10 no.2
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• pp.65-70
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• 2011

DLC is considered as the candidate material for application of moving parts in automotive components relatively in high pressure and temperature operating conditions for its high hardness with self lubrication and chemical inertness. The properties of interlayer between the substrate and the DLC film were studied. Arc ion plating method have been employed to deposit onto substrate and sputtering method was used for synthesizing DLC onto interlayer. Among these six types of interlayer, deposited DLC film onto TiCN showed excellent value for characteristics. From the results of analysis for physical properties of DLC films, it seems that the adhesion forces were more important factors than intrinsic mechanical properties such as hardness, roughness and wear resistance of DLC films. AFM(Atomic Force Microscope) was used for understanding roughness of DLC films. Hardnesses of the coating layers were identified by nano-indentation method and adhesions were checked by scratch method.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.05a
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• pp.389-392
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• 2005

In the modern days, a galvannealed sheet steel(GA) instead of a cold rolled steel sheet has been widely used as an alternative to extend the life of automotive body. Accordingly, the mechanical properties of GA for automobiles were taken Into account and studied by comparing with the temperature variation on annealing in this study. To clarify the effect of surface features in the mechanical properties of GA, the several tests such as nanoindentation and FE-analysis were executed. For this goal use is made of the method of neural networks. The developed neural networks apply also to obtain reliable mechanical properties of the thin films. Load-displacement curve was computed by the analysis procedure and compared with experimental results.

• Journal of Surface Science and Engineering
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• v.54 no.6
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• pp.307-314
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• 2021

Diamond-like carbon (DLC) is difficult to achieve sufficient adhesion because of weak bonding between DLC film and the substrate. The purpose of this study is to improve the adhesion between substrate and DLC film. DLC film was deposited on AISI H13 using linear ion source. To improve adhesion, the substrate was treated by dual post plasma nitriding. In order to define the mechanism of the improvement in adhesive strength, the gradient layer between substrate and DLC film was analyzed by Glow Discharge Spectrometer (GDS) and Scanning Electron Microscope (SEM). The microstructure of the DLC film was analyzed using a micro Raman spectrometer. Mechanical properties were measured by nano-indentation, micro vickers hardness tester and tribology tester. The characteristic of adhesion was observed by scratch test. The adhesion of the DLC film was enhanced by active screen plasma nitriding layer.

• Proceedings of the Polymer Society of Korea Conference
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• 2006.10a
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• pp.142-143
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• 2006

Combinatorial methods are being used increasingly to develop the next generation of polymers, coatings and adhesive formulations. Allied to this approach, a new genre of measurement and characterization methods are emerging. These characterization techniques are required to handle and take measurements from small samples. This has led to a number of uses for this technology which usefully fall between convention test specimen and micro- or nano-scale test methods. A versatile measurement platform will be presented which can offer useful indentation, puncture, compression, adhesion and scratch resistance data for a wide variety of material types and that continues to develop and evolve in capability.