한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Improvement in Adhesion of the Indium Zinc Oxide (IZO) Thin Films on Organic Polymer Films

  • Lee, Yeong-Beom (LCD Division, Device Solution Business, Samsung Electronics Co. Ltd.) ;
  • Kim, Kyong-Sub (LCD Division, Device Solution Business, Samsung Electronics Co. Ltd.) ;
  • Ko, Min-Jae (Solar Cell Research Center, KIST(Korea Institute of Science and Technology)) ;
  • Kim, Kyung-Seop (LCD Division, Device Solution Business, Samsung Electronics Co. Ltd.)
  • Published : 2009.10.12
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Abstract

We report the improvement in adhesion of IZO thin films through oxygen ($O_2$) plasma treatment of organic polymer film. In conclusion, the $O_2$ plasma treatment of an organic polymer film was accomplished with improving ca. 1.8 times in adhesion than that of the only general etch treatment on the same organic polymer film.

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