• 한국정밀공학회지
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• 제31권5호
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• pp.451-457
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• 2014

Surface roughness of mechanical components is an important factor which affects the tribological phenomena. Various surface patterns have been applied to surfaces to improve the tribological characteristics of mechanical components. In this work, the friction reduction effect of micropatterns on silicon was investigated. For this purpose, micro-dimple patterns were fabricated on silicon wafer by DRIE process. In the friction experiments silicone oil was used as lubricant. Also, the lubricant was cleaned to simulate a lubricant depleted condition. In depleted lubricated condition, friction coefficient of micro-pattern specimens was lower than specimens without micro-patterns. It was found that friction reduction effect of micro-pattern could be successfully maintained even after cleaning the lubricant on the surface.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1576-1578
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• 2004

The alumina membrane with nano sized pore was prepared from aluminum by anodic oxidation to apply for storage equipment, gas sensor and stamper. The pore size and cell size of the pores are controlled by anodic oxidation voltage. The alumina thickness was controlled by etching process using 0.2M $H_3PO_4$. The thickness of alumina on Si wafer was very accurately controlled by anodic oxidation time. Nickel with nano-sized grain was electroplated on the Au layer on silicon wafer. The fabricated pores on alumina membrane was the thickness of $7{\sim}10{\mu}m$ with straight nano-sized pore of 307${\sim}$120nm. The alumina by the etching process shows smooth surface. The size of Ni grain was 130nm and 250nm for 10mA/$cm^2$and 20mA/$cm^2$of electroplating currents, respectively.

• 한국분말재료학회지
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• 제20권2호
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• pp.120-124
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• 2013

This study is carried out to develop the new process for the fabrication of ultra-fine electrodes on the flexible substrates using superhydrophobic effect. A facile method was developed to form the ultra-fine trenches on the flexible substrates treated by plasma etching and to print the fine metal electrodes using conductive nano-ink. Various plasma etching conditions were investigated for the hydrophobic surface treatment of flexible polyimide (PI) films. The micro-trench on the hydrophobic PI film fabricated under optimized conditions was obtained by mechanical scratching, which gave the hydrophilic property only to the trench area. Finally, the patterning by selective deposition of ink materials was performed using the conductive silver nano-ink. The interface between the conductive nanoparticles and the flexible substrates were characterized by scanning electron microscope. The increase of the sintering temperature and metal concentration of ink caused the reduction of electrical resistance. The sintering temperature lower than $200^{\circ}C$ resulted in good interfacial bonding between Ag electrode and PI film substrate.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2011년도 춘계학술대회 초록집
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• pp.104.2-104.2
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• 2011

세계적으로 환경오염이 심각해짐에 따라 친환경적으로 에너지를 생산하는 기술이 주목받고 있다. 그 중에서도 태양광을 이용하여 전력을 생산하는 태양광 태양전지의 경우 원리가 간단하고 에너지원의 수급이 용이하다는 장점으로 인하여 많은 연구가 진행되고 있다. 그러나 태양광 태양전지의 경우, 태양전지 기판에서의 반사로 인하여 발전 효율이 낮아는 문제점이 있다. 이를 해결하기 위해 텍스처링 공정을 통해 태양전지 기판에서의 반사를 줄이고 태양전지의 효율을 증가시키는 방법이 이용되고 있다. 본 연구에서는 나노 돌기를 가진 저반사 패턴을 이용하여 태양전지용 실리콘 기판을 제작함으로써, 태양전지 기판에서의 반사를 줄이고자 하였다. 나노 돌기를 가진 저반사 패턴이 형성 된 태양전지용 실리콘 기판을 제작하기 위해 ICP 장비를 이용한 $Cl_2$ 플라즈마 식각공정을 진행하였다. 먼저 Au agglomeration 기술을 이용하여 Au nano particle을 실리콘 기판 위에 형성 후, 이를 식각 마스크로 이용하여 ICP 식각을 진행하였다. 이어서 나노 돌기가 형성 된 실리콘 기판 위에 $Cl_2$ 플라즈마에 내식각성이 우수한 레지스트를 이용하여, 나노 임프린트 리소그래피 기술을 통해 저반사 패턴을 형성하였다. 이 방법으로 형성 된 저반사 패턴을 식각 마스크로 사용하여 앞의 공정과 동일한 조건으로 실리콘 기판을 식각하였다. 최종적으로 agglomerated Au particle과 $Cl_2$ 플라즈마에 내식각성이 우수한 레지스트를 이용하여 나노 돌기를 가진 저반사 패턴이 형성된 실리콘 기판을 제작하였다.

• 한국분말재료학회지
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• 제18권4호
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• pp.322-326
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• 2011

Inkjet printing was successfully done using Cu nano powder ink after these Cu nano powders were dry-coated with 1-octanethiol for oxidation prevention. 1-octanethiol, which is Self-Assembled Multi-layers (SAMs), was coated approximately 10-nm thick on the surface of Cu nano powders. 1-Octanol, which has the same chain length as that for 1-octanethiol, was used as a solvent to make the ink for inkjet printing. As a result, the fabricated ink was dispersed for about 4 weeks, and after printing and heat treatment at $350^{\circ}C$ for 4 hours, the resistivity for the printed pattern was measured to be $1.15{\times}10^{-5}{\Omega}{\cdot}cm$.

• Molecular & Cellular Toxicology
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• 제5권1호
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• pp.23-31
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• 2009

To compare the effects of nanometer-sized silver ions and support materials (nano-silver coating material, NM-silver) and silver ions, we exposed zebrafish embryos to both types of nano-silver ions and compared the acute responses during embryogenesis. The amount of silver in the NM-silver (17.16%) was greater than that in the silver ion (4.56%). Both of these materials have different atomic compositions. The silver ion-exposed groups (10 and 20 ppt) showed lower survival rates than the NM-silver-exposed groups (10 and 20 ppt). NM-silver penetrated the skin and blood tube of zebrafish larvae as aggregated particles, whereas, silver ions penetrated the organelles, nucleus and yolk in a spread-out pattern. Micro-array analysis of RNA from zebrafish larvae (72 hours post-fertilization) that were treated with either NM-silver or silver ions, showed alteration in expression of the BMP, activin, TGF-$\beta$, and $GSK3{\beta}$ genes pathway. Additionally, $GSK3{\beta}$ gene pathway for apoptosis that was related with left-right asymmetry. Gene expression changes in the NM-silver or silver ions-treated zebrafish embryo led to phenotypic changes in the hatched larvae, reflecting increased apoptosis and incomplete formation of an axis.

• 대한기계학회논문집A
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• 제28권7호
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• pp.999-1005
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• 2004

A new stamp fabrication technique for the soft lithography has been developed in the range of several microns by means of a nano-replication printing (nRP) process. In the nRP process, a figure or a pattern can be replicated directly from a two-tone bitmap figure with nano-scale details. A photopolymerizable resin was polymerized by the two-photon absorption which was induced by a femtosecond laser. After the polymerization of master patterns, a gold metal layer (about 30 ㎚ thickness) was deposited on the fabricated master patterns for the purpose of preventing a join between the patterns and the PDMS, then the master patterns were transferred in order to fabricate a stamp by using the PDMS (poly-dimethylsiloxane). In the transferring process, a few of gold particles, which were isolated from the master patterns, remained on the PDMS stamp. A gold selective etchant, the potassium iodine (KI) was employed to remove the needless gold particles without any damage to the PDMS stamp. Through this work, the effectiveness of the nRP process with the PDMS molding was evaluated to make the PDMS stamp with the resolution of around 200 ㎚.

• 전기화학회지
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• 제8권1호
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• pp.42-46
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• 2005

It has been known that the synthesis of the cathode materials for the lithium rechargeable batteries by the sol-gel process has many advantages over the conventional solid-state method. It has been, however, a continuing issue that new additional steps should be introduced to commercialize this process. In this work, spray drying was introduced to the existing sol-gel process as a continuous mass production method of the pre-heat treatment precursor materials. The precursors of $LiCoO_2$ and $LiNi_{0.8}Co_{0.2}O_2$ were continuously produced through spray drying from the solution containing stoichiometric amount of lithium, cobalt, and nickel sources as well as a chelating agent. The process variables, such as pH of the starting solution, spray drying conditions, and calcination conditions were optimized. The XRD pattern for the synthesized material indicated a good crystallinity with a layered structure.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.39-42
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• 2002

Recently, CMP (chemical mechanical polishing) technology has been widely used for global planarization of multi-level interconnection for ULSI applications. However, COO (cost of ownership) and COC (cost of consumables) were relatively increased because of expensive slurry. In this paper, we have studied the possibility of recycle of reused silica slurry in order to reduce the costs of CMP slurry. The post-CMP thickness and within-wafer non-uniformity(WIWNU) were measured as a function of different slurry composition. As a experimental result, the performance of reused slurry with annealed silica abrasive of 2 wt% contents was showed high removal rate and low non-uniformity. Therefore, we propose two-step CMP process as follows In the first-step CMP, we can polish the thick and rough film surface using remaked slurry, and then, in the second-step CMP, we can polish the thin film and fine pattern using original slurry. In summary, we can expect the saving of high costs of slurry.

• 한국재료학회지
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• 제17권8호
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• pp.408-413
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• 2007

Process of the hydroxyapapite(HA) precipitation on bioactive titanium metal prepared by NaOH in a modified-simulated body fluid(mSBF) was investigated by high resolution transmission electron microscope (HRTEM) attached with energy dispersive X-ray spectrometer(EDX). The amorphous titanate phase on titanium surface is form by NaOH treatment and an amorphous titanate incorporated calcium and phosphate ions in the liquid to form an amorphous calcium phosphate. With increasing of soaking time in the liquid, the HA particles are observed in amorphous calcium phosphate phase with a Ca/P atomic ratio of I.30. The octacalcium phosphate (OCP) structure is not detected in HRTEM image and electron diffraction pattern. After a long soaking time, the HA particles grow as needle-like shape on titanium surface and a large particle-like aggregates of needle-like substance were observed to form on titanium surface within needle-like shape. A long axis of needle parallels to c-direction of the hexagonal HA structure.