• Journal of the Semiconductor & Display Technology
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• v.13 no.4
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• pp.21-25
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• 2014

The silicon nitride ($SiN_x$) film for surface passivation and anti-reflection coating of crystalline silicon solar cell is very important and it is generally deposited by plasma enhanced chemical vapor deposition (PECVD). PECVD can be divided into low and high frequency method. In this paper, the $SiN_x$ film deposited by low and high frequency PECVD method was studied. First, to optimize the $SiN_x$ film deposited by low frequency PECVD method, the refractive index was measured by varying the process conditions like $SiH_4$, $NH_3$, $N_2$ gas rate, and RF power. When $SiH_4$ gas rate was increased and $NH_3$ gas rate was decreased, the refractive index was increased. The refractive index was also increased with RF power decline. Second, to compare the characteristics of the low and high frequency PECVD $SiN_x$ film, the refractive index was measured by varying $NH_3/SiH_4$ gas ratio and RF power and the minority carrier lifetime of before and after high temperature treatment process was also measured. The refractive index of both low and high frequency PECVD $SiN_x$ film was decreased with increase in $NH_3/SiH_4$ gas ratio and RF power. After high temperature treatment process, the minority carrier lifetime of both low and high frequency PECVD $SiN_x$ film was increased and increased degree was similar. The minority carrier lifetime of low frequency PECVD $SiN_x$ was increased from $11.03{\mu}m$ to $28.24{\mu}m$ and that of high frequency PECVD $SiN_x$ was increased from $11.60{\mu}m$ to $27.10{\mu}m$.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.7
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• pp.708-718
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• 2020

Offensive odor is recognized as a social environmental problem due to its olfactory effects. Ammonia(NH₃), hydrogen sulfide(H₂S) and benzene(C₆H₆) are produced from various petrochemical plants, public sewage treatment plants, public livestock wastes, and food waste disposal facilities in large quantities. Therefore efficient decomposition of offensive odor is needed. In this study, the removal efficiency of atmospheric-pressure plasma operating at an ambient condition was investigated by evaluating the concentrations at upflow and downflow between the plasma reactor. The decomposition of offensive odor using plasma is based on the mechanism of photochemical oxidation of offensive odor using free radical and ozone(O₃) generated when discharging plasma, which enables the decomposition of offensive odor at ordinary temperature and has the advantage of no secondary pollutants. As a result, all three odor substances were completely decontaminated within 1 minute as soon as discharging the plasma up to 500 W. This result confirms that high concentration odors or mixed odor materials can be reduced using atmospheric-pressure plasma.

• Proceedings of the KIEE Conference
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• 1998.07e
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• pp.1806-1808
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• 1998

Tests of pilot-scale plasma DeSOx-DeNOx system using pulsed streamer corona were carried out. The system consists of the reactor with wire-plate electrodes the $30kW_{max}$. MPC type pulse generator, and $1MW_{th}$ pulverized coal combustor as a flue gas source. $NH_3$ and $C_2H_4$ were used to enhance the removal rate. The experimental result on the removal efficiency of SOx/NOx and on the effect of the additives was presented in this paper.

• Journal of Korean Society of Environmental Engineers
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• v.27 no.8
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• pp.859-869
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• 2005

The commercial $V_2O_5-WO_3/TiO_2$ catalysts which had been exposed to the off gas from incinerator for a long time were regenerated by physical and chemical treatment. The catalytic properties and NOx conversion reactivity of those catalysts were examined by analysis equipment and NOx conversion experiment. The characterization of the catalysts were performed by XRD(x-ray diffractometer), BET, POROSIMETER, EDX(energy dispersive x-ray spectrometer), ICP(inductively coupled plasma), TGA(thermogravimetric analyzer) and SEM (scanning electron microscopy). NOx conversion experiment were performed with simulated off gas of the incinerator and $NH_3$ was used as a reductant of SCR reaction. Among the regeneration treatment methods which were applied to regenerate the aged catalysts in this study, it showed that the heat treatment method had excellent regeneration effect on the catalytic performance for NOx conversion. The catalytic performance of the regenerated catalysts with heat treatment method were recovered over than 95% of that of fresh catalyst. For the regenerated catalysts with the acid solution(pH 5) and the alkali solution(pH 12), the catalytic performance were recovered over than 90% of that of fresh catalyst. From the characterization results of the regenerated catalysts, the specific surface area was recovered in the range of $85{\sim}95%$ of that of fresh catalyst. S and Ca element, which are well known as the deactivation materials for the SCR catalysts, accumulated on the aged catalyst surface were removed up to maximum 99%. Among the P, Cr, Zn and Pb elements accumulated on the aged catalyst surface, P, Cr and Zn element were removed up to 95%. But the Pb element were removed in the range of $10{\sim}30%$ of that of fresh catalyst.

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.38-39
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• 2006

We present experimental results that regard the effects of catalyst preparation on the structural and field-emissive properties of CNTs. The CNTs used in this research have been synthesized using the inductively coupled plasma-chemical vapor deposition (ICP-CVD) method. Catalyst materials (such as Ni, Co, and Invar 426) are varied and deposited on buffer films by RF magnetron sputtering. Prior to growth of CNTs, $NH_3$ plasma etching has also been performed with varying plasma etching time and power. For all the CNTs grown, nanostructures and morphologies are analyzed using Raman spectroscopy and FESEM, in terms of buffer films, catalyst materials, and pre-treatment conditions. Furthermore, the field electron-emission of CNTs are measured and characterized in terms of the catalyst preparation environments. The CNTs grown on Nicatalyst layer would be more effectual for enhancing the growth rate and achieving the vertical-alignment of CNTs rather than other buffer materials from results of SEM study. The crystalline graphitic structure of CNTs is improved as the catalyst dot reaches a critical size. Also, the field-emission result shows that the CNTs using Ni catalyst would be more favorable for improving electron-emission capabilities of CNTs compared with other samples.

• Proceedings of the Korean Environmental Sciences Society Conference
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• 2001.05a
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• pp.238-239
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• 2001

The egg-yolk precursor vitellogenin(VTG) is secreted by the liver of female and male fish, in response to estrogenic compound. Carp(Cryprinus carpio) vitellogenin of one major protein is 160kDa, two minor proteins is 110kDa and 170kDa. We were induced vitellogenin by inject of 17-estradiol and purified in a two step procedure by separating it from plasma protein precipitated by 35% saturated ${(NH_4)}_2SO_4$ and then from the remainder by Mono-Q chromatography. We found major carp(Cyprinus carpio) vitellogenin band at 160kDa. Effect of different concentration of oestrogen on vitellogenin synthesis in carp(Cyprinus carpio) exposed for 4 weeks. Show differential effects on vitellogenin synthesis 7 days after treatment. Plasma vitellogenin was measured 3 times for each by an enzyme linked immunosorbent assay(ELISA). ELISA was developed for the detection of the egg yolk precursor vitellogenin in plasma of carp(Cyprinus carpio). The ELISAS performance was optimized and characterized.

• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1533-1535
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• 2002

Carbon nanotubes (CNTs) were grown with high density on a large area of Ni-coated silicon oxide substrates by using an inductively coupled plasma-chemical vapor deposition (ICP-CVD) of $C_2H_2$ at temperatures ranging from 600 to $700^{\circ}C$. The Ni catalyst was formed using an RF magnetron sputtering system with varying the operating pressure and exposure time of $NH_3$ plasma. The surface morphology of nickel catalyst films and CNTs was examined by SEM and AFM. The graphitized structure of CNTs was confirmed by Ramman spectra, SEM, and TEM. The growth of CNTs was observed to be strongly influenced by the surface morphology of Ni catalyst, which depended on the pre-treatment time and growth temperature. Dense CNTs with uniform-sized grains were successfully grown by ICP-CVD.

• Journal of Korean Society for Atmospheric Environment
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• v.11 no.2
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• pp.185-190
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• 1995

Recently, because of the worse of the air pollution, the excessive airtught of building and the inferiority of air conditioning system, the development of high efficiency air purification technology was enlarged to the environmental improvement of an indoor or a harmful working condition. The air purification technology has used chemical filters or charcoal filters or charcoal to remove hazardouse gaseous pollutants (SO$_{x}$, NO$_{x}$, NH$_{3}$, etc.) by air pollutant control technology, but they have many problems of high pressure loss, short life, wide space possession, and treatment of secondary wastes. For these reason, the object of reasearch shall be hazardous gaseous pollutants removal by the surface discharge induced plasma chemical process that is A.C. discharge of multistreams applied A.C. voltage and frequency between plane induced eletrode and line discharge eletrode of tungsten, platinum or titanium with a high purified alumina sheet having a film-like plane. As a result, the control performance for hazardous gaseous pollutants showed very high efficiency in the normal temperature and pressure. Also, after comtact oxidation decomposition of harmful gaseous pollutants, the remainded ozone concentration was found much lower than that of ACGIH or air pollution criteria in Korea.rea.

• Asian-Australasian Journal of Animal Sciences
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• v.7 no.3
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• pp.363-372
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• 1994

In two separate experiments with crossbred bulls (Sahiwal $\times$ indigenous) the effect of access to a urea-molasses lickblock (MOL-U-MIN) on straw diets was studied. The animals were given either untreated (US) or urea treated (TS) rice straw with or without lickblock supplementation. In experiment 1, individual dry matter intake (DMI) and dry matter digestibility (DMD) were measured, while in experiment 2 in addition to the above rumen (pH, ammonia, minerals) and blood (protein, minerals and haemotological) parameters were also measured. With both experiments urea treatment did not effect DMI, but lickblock supplementation significantly (p < 0.05) increased DMI. The DMD values obtained in both experiments for TS were significantly (p < 0.05) higher than for US, but lickblock supplementation did not effect the DMD of either US or TS fed animals. Both urea treatment (6.97 vs 6.93) and lickblock supplementation (6.98 vs 6.92) significantly (p < 0.001) reduced the rumen pH. Urea treatment and lickblock supplementation increased the rumcn $NH_3-N$ concentration (mg/100 ml) from 8.7 to 11.9 and 9.2 to 11.4, respectively. Both US and TS diets fed with or without lickblock increased the molar ratio of Na : K in saliva. Phosphorus content in blood plasma was significantly (p < 0.01) increased due to lickblock supplementation, whereas the Fc content in blood was significantly increased (p < 0.01) by urea treatment. Haemoglobin content in blood ranged from 11.3 to 11.7 g/dl, and was not influenced by urea treatment or lickblock supplementation. Lickblock significantly reduced the number of red blood cells, but increased the mean corpuscular volume. It is concluded that feeding urea treated straw with proper mineral supplementation could be a more economical alternative to lickblock supplementation.

• Proceedings of the Korean Vacuum Society Conference
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• 2002.06a
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• pp.110-110
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• 2002