Microstructure and Wear Resistance of Ti-Me-N (Me=V, Nb and Si) Nanofilms Prepared by Hybrid PVD (Hybrid PVD로 제조된 Ti-Me-N (Me=V, Si 및 Nb) 나노 박막의 미세구조와 마모특성)
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- Journal of the Korean institute of surface engineering
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- v.44 no.3
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- pp.95-104
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- 2011