• Title/Summary/Keyword: Multiple Controller

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Advanced Process Control of the Critical Dimension in Photolithography

  • Wu, Chien-Feng;Hung, Chih-Ming;Chen, Juhn-Horng;Lee, An-Chen
    • International Journal of Precision Engineering and Manufacturing
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    • v.9 no.1
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    • pp.12-18
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    • 2008
  • This paper describes two run-to-run controllers, a nonlinear multiple exponential-weight moving-average (NMEWMA) controller and a dynamic model-tuning minimum-variance (DMTMV) controller, for photolithography processes. The relationships between the input recipes (exposure dose and focus) and output variables (critical dimensions) were formed using an experimental design method, and the photolithography process model was built using a multiple regression analysis. Both the NMEWMA and DMTMV controllers could update the process model and obtain the optimal recipes for the next run. Quantified improvements were obtained from simulations and real photolithography processes.

Implementation of Wafer Handling Robot Controller Based on RTAI (RTAI 기반의 웨이퍼처리 로봇 제어기 구현)

  • Chang, Soon-Pill;Shin, Ik-Sang;Moon, Seung-Bin
    • Journal of the Korean Society for Precision Engineering
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    • v.25 no.9
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    • pp.45-52
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    • 2008
  • As multiple functions arc required in a robot controller, RTOS(Real Time Operating System) should be adopted to manage complex situations, such as choosing most urgent task among competing ones. In this paper, we implemented RTAI(Real Time Application Interface) based robot controller for wafer handling robots including graphic simulator. We showed how multiple tasks are organized and also explained in detail about task priorities and execution periods. Finally, we presented simulation results.

A Development of CDMA-based Robot Remote Controller (CDMA 기반 로봇 원격제어기 개발)

  • Kim, Woo-Sik;Kim, Eung-Seok
    • Proceedings of the KIEE Conference
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    • 2006.10c
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    • pp.345-347
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    • 2006
  • In this paper, we study the robot controller design using the voice and data communication via CDMA(Code Division Multiple Access) mobile communication network. We design the robot remote controller using the three methods, telephone call speech recognition, DTMF (Dual Tone Multiple Frequency) realization, SMS(Short Message Service) transmission/reception way via CDMA mobile communication network. We investigate the validity and effectiveness of the proposed remote controller which applied to the mobile robot.

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Transient Response Improvement of Multiple Model/Controller IMC Using Recurrent Neural Networks (재귀신경망을 이용한 다중모델/제어기 IMC의 과도 응답 개선)

  • O, Won-Geun;Jo, Seong-Eon;So, Ji-Yeong
    • Journal of Institute of Control, Robotics and Systems
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    • v.7 no.7
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    • pp.582-588
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    • 2001
  • The Multiple Model/Controller IMC(MMC-IMC) is a model-based control method which uses a set of model/controller pairs rather than a single model/controller to handle all possible operating conditions in the IMC control structure. During operation, one model/controller pair that best fit, for current plant situation is chosen by the switching algorithm. The major drawback of the switching controller is the bad transient performance due to the model error and the use fo linear controller for nonlinear plants. In this paper, we propose a method that transient response of the MMC-IMC using two recurrent neural networks. Simulation result shows that the proposed method represents better performance than the usual MMC-IMC`s.

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Implementation of RS232C Serial Communication by CSMA protocol (충돌검지 다중접속(CSMA) 프로토콜에 의한 RS232C 직렬통신의 구현)

  • Kwak, Hee-Soo;Han, Kyong-Ho
    • Proceedings of the KIEE Conference
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    • 1998.07g
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    • pp.2473-2475
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    • 1998
  • In this paper, we implemented RS232C serial communication by the 2 wires(Data,GND), and multiple access, by the applying Collision Sensing Multiple Access(CSMA) Protocol. Multiple access is implemented by assigning a unique ID to each controller. The multiple access control operation starts by sending a command packet from a host to another host and the command packet is composed of ID bytes of source and target host computer, data bytes and the check sum, byte. In host computer, after sending command packet, the collision from loop back data. If collision is detected, it means a command packet was collided with another command packet for another host. The packet communication of the controller enables the multiple acces of the controller through the common serial data link. The application of this serial communication through CSMA protocol and the usage of two wires, have an effect on saving the wires and convenient of layout work.

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An Implementation of the Controller for Multiple DC Motors Using CAN (CAN 통신을 이용한 다중 직류 모터 제어기 구현)

  • Kim, Hyun-Sung;Kwon, Man-Oh;Yi, Keon-Young
    • Proceedings of the KIEE Conference
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    • 1999.07b
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    • pp.583-585
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    • 1999
  • This paper presents the controller of multiple DC motors using the network. This controller has been built with 16-bits one chip microprocessor (87C196CA) which includes the integrated CAN serial communication and position control for two motors. Since only one microprocessor is needed, the proposed controller is not only cost effective but also powerful. The system is composed of one main controller, trajectory planner, and the other sub controller, position controller. The main controller which has been built using Visual Basic programming on the Pentium PC, generates the trajectory and then transmits it to the sub controller. The trajectory transmitted from the PC will be processed by the sub controller. Two motors are controlled using the conventional position control, PID, to reach them the same target position but with different velocities at the same time. The communications between the main controller and sub controller is performed through the RS-232 or the CAN communication The CAN would be safer and faster than serial communication network since it has non-destructive bitwise arbitration specification. In this paper, we consider the CAN communications generally and then show the usefulness of the proposed controller by demonstrating position control of two DC motors.

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A Hierachical Controller for Soccer Robots (축구로봇을 위한 계층적 제어기)

  • Lee, In-Jae;Baek, Seung-Min;Sohn, Kyung-Oh;Kuc, Tae-Yong
    • Journal of Institute of Control, Robotics and Systems
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    • v.6 no.9
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    • pp.803-812
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    • 2000
  • In this paper we introduce a model based centralized hierarchical controller for cooperative team of soccerplaying multiple mobile robots. The hierarchical controller is composed of high-level and low-level controllers. Using the coordinates information of objects from the vision are simple models of multiple mobile tobots on the playground. Subsequently, the high level controller selects and action model corresponding to the perceived state transition model and generates subgoal and goal-velocity, from which the low level controller generates trajectory of each wheel velocity of the robot. This two layered simplicity. The feasubility of the control strategy has been demonstrated in an implementation for real soccer games at a MiroSot league.

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Application of Multiple Fuzzy-Neuro Controllers of an Exoskeletal Robot for Human Elbow Motion Support

  • Kiguchi, Kazuo;Kariya, Shingo;Wantanabe, Keigo;Fukude, Toshio
    • Transactions on Control, Automation and Systems Engineering
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    • v.4 no.1
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    • pp.49-55
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    • 2002
  • A decrease in the birthrate and aging are progressing in Japan and several countries. In that society, it is important that physically weak persons such as elderly persons are able to take care of themselves. We have been developing exoskeletal robots for human (especially for physically weak persons) motion support. In this study, the controller controls the angular position and impedance of the exoskeltal robot system using multiple fuzzy-neuro controllers based on biological signals that reflect the human subject's intention. Skin surface electromyogram (EMG) signals and the generated wrist force by the human subject during the elbow motion have been used as input information of the controller. Since the activation level of working muscles tends to vary in accordance with the flexion angle of elbow, multiple fuzzy-neuro controllers are applied in the proposed method. The multiple fuzzy-neuro controllers are moderately switched in accordance with the elbow flexion angle. Because of the adaptation ability of the fuzzy-neuro controllers, the exoskeletal robot is flexible enough to deal with biological signal such as EMG. The experimental results show the effectiveness of the proposed controller.

Multiple Sliding Surface Control Approach to Twin Rotor MIMO Systems

  • Van, Quan Nguyen;Hyun, Chang-Ho
    • International Journal of Fuzzy Logic and Intelligent Systems
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    • v.14 no.3
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    • pp.171-180
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    • 2014
  • In this paper, a multiple sliding surface (MSS) controller for a twin rotor multi-input-multioutput system (TRMS) with mismatched model uncertainties is proposed. The nonlinear terms in the model are regarded as model uncertainties, which do not satisfy the standard matching condition, and an MSS control technique is adopted to overcome them. In order to control the position of the TRMS, the system dynamics are pseudo-decomposed into horizontal and vertical subsystems, and two MSSs are separately designed for each subsystem. The stability of the TRMS with the proposed controller is guaranteed by the Lyapunov stability theory. Some simulation results are given to verify the proposed scheme, and the real time performances of the TRMS with the MSS controller show the effectiveness of the proposed controller.

Dynamical anti-reset windup method for saturating control systems with multiple controllers and multiloop configuration and its application to motor control systems (다중 제어기 및 다중 루우프로 구성된 포화제어시스템의 동적 리셋 와인드엎 방지 방법과 모터제어에의 응용)

  • Park, Jong-Gu;Park, Chong-Ho
    • Journal of Institute of Control, Robotics and Systems
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    • v.4 no.2
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    • pp.141-150
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    • 1998
  • This paper presents a dynamical anti-reset windup (ARW) compensation method for saturating control systems with multiple controllers and/or multiloop configuration. By regarding the difference of controller states in the absence and presence of saturating actuators as an objective function, the dynamical compensator which minimizes the objective function is derived in an integrated fashion. The proposed dynamical compensator is a closed form of plant and controller parameters. The resulting dynamics of compensated controller reflects the linear closed-loop system. The proposed method guarantees total stability of the resulting system. The effectiveness of the proposed method is illustrated by applying it to a servo motor control system. The paper is an extension of the results in Park and Choi[1].

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