• Title/Summary/Keyword: Multi-Layer Substrate

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Field Emission characteristics of Multi-layered Diamond-Like carbon films (다층구조 유사다이아몬드 박막의 전계방출 특성연구)

  • 김종탁
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.13 no.5
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    • pp.426-430
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    • 2000
  • We have studied the field emission characteristics of multi-layered diamond-like-carbon (DLC) films deposited by vertical electrodes type plasma enhanced chemical vapor deposition with CH$_4$ and H$_2$ mixture. We deposited a thin layer of DLC on the p$^{+}$-Si substrate and then turned off plasma before another deposition of a new DLC layer. The thickness and the number of DLC layers are varied. The emission characteristics of multi-layered DLC films were compared with conventional one. The multi-layered DLC film shows higher emission current than conventional one.e.

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Improvement of PDMS graphene transfer method through surface modification of target substrate (폴리디메틸실록산(PDMS)을 이용한 그래핀 전사법 개선을 위한 계면처리 연구)

  • Han, Jae-Hyung;Choi, Mu-Han
    • Journal of the Korean Applied Science and Technology
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    • v.32 no.2
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    • pp.232-239
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    • 2015
  • In this paper, we study the dry transfer technology utilizing PDMS (Polydimethylsiloxane) stamp of a large single-layer graphene grown on Cu-foil as catalytic metal by using Chemical Vapor Deposition (CVD). By changing the surface property of the target substrate through $UV/O_3$ treatment, we can transfer the graphene on the target substrate while minimizing mechanical damages of graphene layer. Multi-layer (1~4 layers) graphene was stacked on $SiO_2/Si$ wafer successfully by repeating thetransfer method/process and then optical transmittance and sheet resistance of graphene layers have been measured as a quality assessment.

The Influence of Encapsulation Layer Incorporated into Flexible Substrates for Bending Stress (Flexible 기판의 Bending Stress에 대한 Encapsulation Layer의 영향)

  • Park, Jun-Baek;Seo, Dae-Shik;Lee, Sang-Keuk;Lee, Joon-Ung;Kim, Yong-Hoon;Moon, Dae-Gyu;Han, Jeong-In
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.473-476
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    • 2003
  • This paper shows necessity of encapsulation layer to maximite flexibility of brittle indium-tin-oxide (ITO) on polymer substrates. And, Young's modulus (E) of encapsulation layer have an significant effect on external bending stress and the coefficient of thermal expansion (CTE) of that have a significant effect on internal thermal stress. To compare magnitude of total mechanical stress including both bending stress and thermal stress, the mechanical stress of triple-layer structure (substrate / ITO / encapsulation layer or substrate / buffer layer / ITO) can be quantified and numerically analyzed through the farthest cracked island position. As a result, it should be noted that multi-layer structures with more elastic encapsulation material have small mechanical stress compared to that of buffer and encapsulation structure of large Young's modulus material when they were externally bent.

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Transmit-receive Module for Ka-band Seekers using Multi-layered Liquid Crystal Polymer Substrates (다층 액정폴리머 기판을 이용한 Ka대역 탐색기용 송수신 모듈)

  • Choi, Sehwan;Ryu, Jongin;Lee, Jaeyoung;Lee, Jiyeon;Nam, ByungChang
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.20 no.5
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    • pp.63-70
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    • 2020
  • In this paper, the transmit-receive module for military seekers has been designed and fabricated in 35 GHz. To increase the performance of substrates and high integration of circuits in millimeter-wave band, a 4-layer LCP(Liquid Crystal Polymer) substrate was developed. This substrate was implemented with three FCCL substrates and two adhesive layers, and a process using the difference in melting point between the substrates was used for lamination. Using a strip line and a microstrip line was confirmed by the transmission loss along the length of the substrate, and the performance of LCP substrates was validated with a power divider in 35 GHz. After confirming the performance of individual blocks such as power amplifier and low noise amplifier, a single channel Ka-band transmission/reception module was developed using a 4-layer liquid crystal polymer substrate. The transmit power of this module has above 1.1W in pulse duty 10% and has an output power of 1.1W and it has receive noise figure less than 8.5 dB and receive gain more than 17.6 dB.

Growth of GaAs/AlGaAs structure for photoelectric cathode (광전음극 소자용 GaAs/AlGaAs 구조의 LPE 성장)

  • Bae, Sung Geun;Jeon, Injun;Kim, Kyoung Hwa
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.27 no.6
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    • pp.282-288
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    • 2017
  • In this paper, GaAs/AlGaAs multi-layer structure was grown by liquid phase epitaxy with graphite sliding boat, which can be used as a device structure of a photocathode image sensor. The multi-layer structure was grown on an n-type GaAs substrate in the sequence as follows: GaAs buffer layer, Zn-doped p-type AlGaAs layer as etching stop layer, Zn-doped p-type GaAs layer, and Zn-doped p-type AlGaAs layer. The Characteristics of GaAs/AlGaAs structures were analyzed by using scanning electron microscope (SEM), secondary ion mass spectrometer (SIMS) and hall measurement. The SEM images shows that the p-AlGaAs/p-GaAs/p-AlGaAs multi-layer structure was grown with a mirror-like surface on a whole ($1.25mm{\times}25mm$) substrate. The Al composition in the AlGaAs layer was approximately 80 %. Also, it was confirmed that the free carrier concentration in the p-GaAs layer can be adjusted to the range of $8{\times}10^{18}/cm^2$ by hall measurement. In the result, it is expected that the p-AlGaAs/p-GaAs/p-AlGaAs multi-layer structure grown by the LPE can be used as a device structure of a photoelectric cathode image sensor.

Microfabrication of Micro-Conductive patterns on Insulating Substrate by Electroless Nickel Plating (무전해 니켈 도금을 이용한 절연기판상의 미세전도성 패턴 제조)

  • Lee, Bong-Gu;Moon, Jun Hee
    • Korean Journal of Metals and Materials
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    • v.48 no.1
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    • pp.90-100
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    • 2010
  • Micro-conductive patterns were microfabricated on an insulating substrate ($SiO_2$) surface by a selective electroless nickel plating process in order to investigate the formation of seed layers. To fabricate micro-conductive patterns, a thin layer of metal (Cu.Cr) was deposited in the desired micropattern using laser-induced forward transfer (LIFT). and above this layer, a second layer was plated by selective electroless plating. The LIFT process. which was carried out in multi-scan mode, was used to fabricate micro-conductive patterns via electroless nickel plating. This method helps to improve the deposition process for forming seed patterns on the insulating substrate surface and the electrical conductivity of the resulting patterns. This study analyzes the effect of seed pattern formation by LIFT and key parameters in electroless nickel plating during micro-conductive pattern fabrication. The effects of the process variables on the cross-sectional shape and surface quality of the deposited patterns are examined using field emission scanning electron microscopy (FE-SEM) and an optical microscope.

Multi-step growth of a-plane GaN epitaxial layer on r-plane sapphire substrate by HVPE method (HVPE를 이용하여 r-plane 사파이어 위에 multi-step으로 성장시킨 a-plane GaN 에피층의 특성 연구)

  • Lee, Won-Jun;Park, Mi-Seon;Jang, Yeon-Suk;Lee, Won-Jae;Ha, Ju-Hyung;Choi, Young-Jun;Lee, Hae-Yong;Kim, Hong-Seung
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.26 no.3
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    • pp.89-94
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    • 2016
  • In this study, the crystalline property of a-plane GaN epitaxial layer grown on r-plane sapphire by a HVPE method has been investigated according to the V/III ratio and the growth time of multi-step growth. Furthermore, these results were compared with the previous result obtained from the single-step growth of a-plane GaN on r-plane sapphire substrate. In the multi-step growth for a-plane GaN epitaxial layer on r-plane sapphire, the FWHM values of rocking curve in GaN epitaxial layer were decreased as the HCl source flow rate and the growth time were increased. The void formed in epitaxial layer was continuously decreased as the growth time in first step and second step using a higher HCl flow rate was increased. As a result, the GaN layer obtained with the longest growth time on the first step and second step exhibited the lowest FWHM values of 584 arcsec and the smallest dependence of azimuth angle.

High-Performance Metal-Substrate Power Module for Electrical Applications

  • Kim, Jongdae;Oh, Jimin;Yang, Yilsuk
    • ETRI Journal
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    • v.38 no.4
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    • pp.645-653
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    • 2016
  • This paper demonstrates the performance of a metal-substrate power module with multiple fabricated chips for a high current electrical application, and evaluates the proposed module using a 1.5-kW sinusoidal brushless direct current (BLDC) motor. Specifically, the power module has a hybrid structure employing a single-layer heat-sink extensible metal board (Al board). A fabricated motor driver IC and trench gate DMOSFET (TDMOSFET) are implemented on the Al board, and the proper heat-sink size was designed under the operating conditions. The fabricated motor driver IC mainly operates as a speed controller under various load conditions, and as a multi-phase gate driver using an N-ch silicon MOSFET high-side drive scheme. A fabricated power TDMOSFET is also included in the fabricated power module for three-phase inverter operation. Using this proposed module, a BLDC motor is operated and evaluated under various pulse load tests, and our module is compared with a commercial MOSFET module in terms of the system efficiency and input current.

Experimental Investigation of R(ω), T(ω) and L(ω) for Multi-Layer SRRs and Wires Metamaterials

  • Luo, Hao;Wang, Xian;Liao, Zhangqi;Wang, Tao;Gong, Rongzhou
    • Journal of electromagnetic engineering and science
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    • v.10 no.3
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    • pp.186-189
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    • 2010
  • Reflection(R($\omega$)), transmission(T($\omega$)) and loss(L($\omega$)) characteristics of multi-layer metamaterials are investigated experimentally in free space with the incident EM waves perpendicular to the substrate plane. The sample is made of split-ring resonators(SRRs) and wires which are the typical model of metamaterials. The R($\omega$) and T($\omega$) of multi-layer metamaterials have been calculated from the measured S-parameters. In this paper, we got the impedance-matched result according to the curves of R($\omega$), meanwhile the T($\omega$) decreased with increasing number of layers. At last, we attained the result that the L($\omega$) gets to nearly 98% around 8 GHz, with R($\omega$)=T($\omega$)=0. The design presented in this paper achieves experimented loss near unity.

Fabrication and Charactreization of YBCO Multi-layer Thin Films for Josephson device (죠셉슨 소자구현을 위한 YBCO다층 박막 제작 및 특성)

  • Lee, H.S.;Park, J.Y.;Park, S.H.;Lee, D.H.;Park, H.J.;Kim, Y.J.
    • Proceedings of the KIEE Conference
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    • 2002.06a
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    • pp.49-51
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    • 2002
  • In this thesis, Josephson junction using high-Tc superconducting multi-layer thin film has been fabricated by on-axis RF magnetron sputtering method. And, the characterizations were performed by X-ray diffraction, SEM and the measuring system of critical current density. The physical properties of multi-layer superconducting thin films were also analyzed with the measured results. To fabricate the multi-layer superconducting thin films, the optimum partial pressure of Argon and Oxgen and the temperature of substrate were measured. Also, YBaCuO thin film was grown on MgO and $SrTiO_3$ substrates by rf-sputtering and LGO thin film of 30 A was epitaxially grown on the YBaCuO thin film as a josephson junction with the same condition. The schottky barrier at the contact surface between YBaCuO/LGO and YBaCuO/Au and the energy gap of 0.5 ${\sim}$ 0.6 mV in Nb were observed from the dI/dV-V of YBaCuO/LGO/Au/Nb and YBaCuO/Au/Nb.

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