• ETRI Journal
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• v.36 no.3
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• pp.352-360
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• 2014

This paper presents a 900 MHz zero-IF RF transceiver for IEEE 802.15.4g Smart Utility Networks OFDM systems. The proposed RF transceiver comprises an RF front end, a Tx baseband analog circuit, an Rx baseband analog circuit, and a ${\Delta}{\Sigma}$ fractional-N frequency synthesizer. In the RF front end, re-use of a matching network reduces the chip size of the RF transceiver. Since a T/Rx switch is implemented only at the input of the low noise amplifier, the driver amplifier can deliver its output power to an antenna without any signal loss; thus, leading to a low dc power consumption. The proposed current-driven passive mixer in Rx and voltage-mode passive mixer in Tx can mitigate the IQ crosstalk problem, while maintaining 50% duty-cycle in local oscillator clocks. The overall Rx-baseband circuits can provide a voltage gain of 70 dB with a 1 dB gain control step. The proposed RF transceiver is implemented in a $0.18{\mu}$ CMOS technology and consumes 37 mA in Tx mode and 38 mA in Rx mode from a 1.8 V supply voltage. The fabricated chip shows a Tx average power of -2 dBm, a sensitivity level of -103 dBm at 100 Kbps with PER < 1%, an Rx input $P_{1dB}$ of -11 dBm, and an Rx input IP3 of -2.3 dBm.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.26 no.9
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• pp.798-805
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• 2015

This paper proposes Relaxation Oscillator with Random Number Generator to minimize electromagnetic interference (EMI) noise. DC-DC Converter with Relaxation Oscillator is presented how much spurious noise effects to RF Receiver system. The main frequency of the proposed Relaxation oscillator is 7.9 MHz to operate it and add temperature compensation block to be applied to the frequency compensation in response to temperature changes. The DC-DC Converter Spurious noise is reduced up to 20 dB through changing frequency randomly. It is fabricated in $0.18{\mu}m$ CMOS technology. The active area occupies an area of $220{\mu}m{\times}280{\mu}m$. The supply voltage is 1.8 V and current consumption is $500{\mu}A$.

• Journal of Surface Science and Engineering
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• v.42 no.5
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• pp.216-219
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• 2009

A surface acoustic wave (SAW) filter structure was fabricated employing $4{\mu}m$ thick nanocrystalline diamond (NCD) and $2.2{\mu}m$ thick ZnO films on Si wafer. The NCD film was deposited in an $Ar/CH_4$ gas mixture by microwave plasma chemical vapor deposition method. The ZnO film was formed over the NCD film in an RF magnetron sputter using ZnO target and $Ar/O_2$ gas. On the top of the two layers, copper film was deposited by the RF sputter and inter digital transducer (IDT) electrode pattern (line/space : $1.5/1.5{\mu}m$) was defined by the photolithography including a lift-off etching process. The fabricated SAW filter exhibited the center frequency of 1.66 GHz and the phase velocity of 9,960 m/s, which demonstrated that a giga Hertz SAW filter can be realized by utilizing the nanocrystalline diamond thin film.

• Journal of the Institute of Electronics and Information Engineers
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• v.53 no.12
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• pp.57-63
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• 2016

This paper describes implementation of the RF frequency synthesizer with $0.18{\mu}m$ silicon CMOS technology being used as an application of the IEEE802.15.4g SUN sensor node transceiver modules. Design of the each module like VCO, prescaler, 1/N divider, ${\Delta}-{\Sigma}$ modulator, and common circuits of the PLL has been optimized to obtain high speed and low noise performance. Especially, the VCO has been designed with NP core structure and 13 steps cap-bank to get high speed, low noise, and wide band tuning range. The output frequencies of the implemented synthesizer is 1483MHz~2017MHz, the phase noise of the synthesizer is -98.63dBc/Hz at 100KHz offset and -122.05dBc/Hz at 1MHz offset.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.6
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• pp.383-389
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• 2001

We report on the design, fabrication, and characterization of 0.35${\mu}{\textrm}{m}$-gate AIGaAs/InGaAs PHEMTs for millimeter-wane applications. The epi-wafer structures were designed using ATLAS for optimum DC and AC characteristics, 0.351m-gate AIGaAs/rnGaAs PHEMTs having different gate widths and number of fingers were fabricated using electron beam lithography Dependence of RF characteristics of PHEMT on gate finger with and number of gate fingers have been investigated. PHEMT haying two 0.35$\times$60${\mu}{\textrm}{m}$$^2$ gate fingers showed the knee voltage, pinch-off voltage, drain saturation current density, and maximum transconductance of 1.2V, -1.5V, 275㎃/mm, and 260.17㎳/mm, respectively. The PHEMT showed fT(equation omitted)(current gain cut-off frequency) of 45㎓ and fmax(maximum oscillation frequency) of 100㎓. S$_{21}$ and MAG of the PHEMT were 3.6dB and 11.15dB, respectively, at 35㎓

• Journal of the Korean Ceramic Society
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• v.38 no.12
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• pp.1150-1154
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• 2001

Silicon oxynitride (SiON) thick films using the core layer of silica optical waveguide have been deposited on Si wafer by PECVD at low temperature (32$0^{\circ}C$) were obtained by decomposition of appropriate mixture of (SiH$_4$+$N_2$O+$N_2$) gaseous mixtures under RF power and SiH$_4$/($N_2$O+$N_2$) ratio deposition condition. Prism coupler measurements show that the refractive indices of SiON layers range from 1.4663 to 1.5496. A high SiH$_4$/($N_2$O+$N_2$) of 0.33 and deposition power of 150 W leads to deposition rates of up to 8.67 ${\mu}{\textrm}{m}$/h. With decreasing SiH$_4$/($N_2$O+$N_2$) ratio, the SiON layer become smooth from 41$\AA$ to 6$\AA$.

• Journal of the Korean Ceramic Society
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• v.34 no.2
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• pp.202-208
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• 1997

Bi-layered SrBi2Ta2O9(SBT) films were deposited on Pt/Ti/SiO2/Si sibstrates by rf magnetron sputt-ering at room temperature and then were annealed at 75$0^{\circ}C$, 80$0^{\circ}C$ and 85$0^{\circ}C$ for 1 hour in oxygen at-mosphere. The film composition of SrBi2Ta2O9 was obtained after depositing at room temperature and annealing at 80$0^{\circ}C$. Excess 20mole% Bi2O3 and 30 mole% SrCO3 were added to the target to compensate for the lack of Bi and Sr in SBT film. 200 nm thick SBT film exhibited and dense microstructure, adielectric constant of 210, and a dissipation factor of 0.05 at 1 MHz frequency. The films exhibited Curie temperature of 32$0^{\circ}C$ and a dielectric constant of 314 at that temperature under 100 kHz frequency. The remanent polarization(2Pr) and the coercive field(2Ec) of the SBT films were 9.1 $\mu$C/$\textrm{cm}^2$ and 85 kV/cm at an applied voltage of 3V, resspectively and the SBT film showed a fatigue-free characteristics up to 1010 cy-cles under 5V bipolar pulse. The leakage current density of the SBT film was about 7$\times$10-7A/$\textrm{cm}^2$ at 150 kV/cm. Fatigue-free SBT films prepared by rf magnetron sputtering can be suitable for application to non-volatile memory device.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.415-415
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• 2012

ICP (RF) 열 플라즈마 분말 합성법은 초고온 열플라즈마(~10,000 K) 속으로 원료물질을 투입한 뒤, 용융, 기화 및 재합성의 과정을 거쳐 초미분(<1 ${\mu}s$)을 합성하는 방법으로 고출력 시스템의 경우 고온/고 엔탈피 열 유동을 통한 고융점 및 저융점 복합물질의 동시 기화에 의한 물질 조성이 제어된 나노 복합체의 대량 합성이 가능할 것으로 기대되고 있다. 본 연구에서는 전북대학교 고온플라즈마 응용연구센터의 60&200 kW의 고출력 ICP (RF) 열 플라즈마 시스템을 이용하여 LTO (Lithium Titanium Oxide)와 IZTO (Indium Zinc Tin Oxide), Barium Borosilicate Glass (K2O-BaO-B2O3-SiO2)의 다성분계 나노 복합체를 합성하였으며, FE-SEM, TEM, XRD, ICP-OES를 이용하여 그 특성을 분석하였다.

• Proceedings of the Optical Society of Korea Conference
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• 2002.07a
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• pp.42-43
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• 2002

고상 소결법으로 715iO$_2$＋11$Na_2$O＋10CaO＋3Er$_2$O$_3$＋5Yb$_2$O$_3$(all wt%) 조성의 스퍼터용 유리 타겟을 제조하여, RF 마그네트론 스퍼터에 의해 희토류 원소가 첨가된 광증폭기용 다성분계 sodium calcium silicate 유리박막을 제조하였다. 최적의 공정조건을 얻기 위해 RF-power, 공정압력, 기판온도를 변화시키면서 박막을 제조하여 RF-power 150W, 공정압력 4mtorr, 기판온도 50$0^{\circ}C$, 타겟-기판 거리 6cm에서 타겟의 손상이 심하지 않으면서, 1.4$mu extrm{m}$/h의 최고 증착율을 가지는 양질의 박막을 제조하였다. (중략)

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.259.2-259.2
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• 2014

Multi-crystal Silicon wafer를 대기압에서 리모트타입의 RF-DBD를 이용하여 에칭을 하였다. DBD소스의 전극으로 알루미늄을 사용하였고 유전체로는 알루미나를 사용하였다(전극 갭을 기록). 전원공급은 13.56 MHz RF 전원장치를 이용하였으며 아르곤과 SF6 유량을 변수로 하여 실험하였다. Ar 유량은 2~10 slm, SF6는 0.2~1 slm으로 변화를 주어 최적화 조건을 찾았다. 결론적으로 SF6의 유량이 증가할수록 Si 에칭율이 증가하였다. 그러나 SF6의 유량이 2 lm일 때 에칭율이 감소하였다. 그리고 scan time이 45초일 때 $2.3{\mu}m/min$로 최대 에칭율을 얻었다.