• Title/Summary/Keyword: Modal Stiffness

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Design for Enhanced Precision in 300 mm Wafer Full-Field TTV Measurement (300 mm 웨이퍼의 전영역 TTV 측정 정밀도 향상을 위한 모듈 설계)

  • An-Mok Jeong;Hak-Jun Lee
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.3
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    • pp.88-93
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    • 2023
  • As the demand for High Bandwidth Memory (HBM) increases and the handling capability of larger wafers expands, ensuring reliable Total Thickness Variation (TTV) measurement for stacked wafers becomes essential. This study presents the design of a measurement module capable of measuring TTV across the entire area of a 300mm wafer, along with estimating potential mechanical measurement errors. The module enables full-area measurement by utilizing a center chuck and lift pin for wafer support. Modal analysis verifies the structural stability of the module, confirming that both the driving and measuring parts were designed with stiffness exceeding 100 Hz. The mechanical measurement error of the designed module was estimated, resulting in a predicted measurement error of 1.34 nm when measuring the thickness of a bonding wafer with a thickness of 1,500 ㎛.

Buffeting Response Correction Method based on Dynamic Properties of Existing Cable-Stayed Bridge (공용 사장교의 동적특성을 반영하는 버페팅 응답보정법)

  • Kim, Byeong Cheol;Yhim, Sung Soon
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.33 no.1
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    • pp.71-80
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    • 2013
  • According to design specifications for structural safety, a bridge in initial design step has been modelled to have larger self-weight, external loads and less stiffness than those of real one in service. Thereby measured buffeting responses of existing bridge show different distributions from those of the design model in design step. In order to obtain accurate buffeting responses of the in-site bridge, the analysis model needs to be modified by considering the measured natural frequencies. Until now, a Manual Tuning Method (MTM) has been widely used to obtain the Measurement-based Model(MBM) that has equal natural frequencies to the real bridge. However, since state variables can be selected randomly and its result is not apt to converge exact rapidly, MTM takes a lot of effort and elapsed time. This study presents Buffeting Response Correction Method (BRCM) to obtain more exact buffeting response above MTM. The BRCM is based on the idea the commonly used frequency domain buffeting analysis does not need all structural properties except mode shapes, natural frequencies and damping ratio. BRCM is used to improve each modal buffeting responses of the design model by substituting measured natural frequencies. The measured natural frequencies are determined from acceleration time-history in ordinary vibration of the real bridge. As illustrated examples, simple beam is applied to compare the results of BRCM with those of a assumed MBM by numerical simulation. Buffeting responses of BRCM are shown to be appropriate for those of in-site bridge and the difference is less than 3% between the responses of BRCM and MTM. Therefore, BRCM can calculate easily and conveniently the buffeting responses and improve effectively maintenance and management of in-site bridge than MTM.

Study on Seismic Analysis and Test for Seismic Qualification of 245kV GIS (245kV 가스절연개폐장치의 내진성능 실증을 위한 시험 및 해석)

  • Kim, Yu-Gyeong;Kwon, Tae-Hoon;Jeong, Yeong-Jin;Kim, Hong-Tae;Kim, Young-Joong
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.37 no.5
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    • pp.715-722
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    • 2013
  • Gas insulated switchgear is large-sized electric equipment for providing a reliable supply of electric power. Recently, seismic tests of electric equipment using a shaking table have been mandated because seismic performance has become an increasingly important issue. However, basic analysis methods continue to be used because some electric equipment is too large for shaking table facilities. Thus, a reliable analysis method should be developed for large-scale electric equipment. This study aims to evaluate the seismic qualification of a 245kV GIS in accordance with IEEE-693 and to validate the analysis method by comparing it with test results. Both the test and the analysis showed that the 245kV GIS has proper seismic safety. Furthermore, the differences between the analysis and the test results are less than 10% for an accurately given mass, stiffness, and input acceleration. It is expected that this study can be used for the seismic qualification of large-scale electrical structures.

Laboratory Validation of Bridge Finite Model Updating Approach By Static Load Input/Deflection Output Measurements (정적하중입력/변위출력관계를 이용한 단경간 교량의 유한요소모델개선기법: 실내실험검증)

  • Kim, Sehoon;Koo, Ki Young;Lee, Jong-Jae
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.20 no.3
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    • pp.10-17
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    • 2016
  • This paper presents a laboratory validation of a new approach for Finite Element Model Updating(FEMU) on short-span bridges by combining ambient vibration measurements with static load input-deflection output measurements. The conventional FEMU approach based on modal parameters requires the assumption on the system mass matrix for the eigen-value analysis. The proposed approach doesn't require the assumption and even provides a way to update the mass matrix. The proposed approach consists of two steps: 1) updating the stiffness matrix using the static input-deflection output measurements, and 2) updating the mass matrix using a few lower natural frequencies. For a validation of the proposed approach, Young's modulus of the laboratory model was updated by the proposed approach and compared with the value obtained from strain-stress tests in a Universal Testing Machine. Result of the conventional FEMU was also compared with the result of the proposed approach. It was found that proposed approach successfully estimated the Young's modulus and the mass density reasonably while the conventional FEMU showed a large error when used with higher-modes. In addition, the FE modeling error was discussed.

Seismic investigation of cyclic pushover method for regular reinforced concrete bridge

  • Shafigh, Afshin;Ahmadi, Hamid Reza;Bayat, Mahmoud
    • Structural Engineering and Mechanics
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    • v.78 no.1
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    • pp.41-52
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    • 2021
  • Inelastic static pushover analysis has been used in the academic-research widely for seismic analysis of structures. Nowadays, the variety pushover analysis methods have been developed, including Modal pushover, Adaptive pushover, and Cyclic pushover, in which some weaknesses of the conventional pushover method have been rectified. In the conventional pushover analysis method, the effects of cumulative growth of cracks are not considered on the reduction of strength and stiffness of RC members that occur during earthquake or cyclic loading. Therefore, the Cyclic Pushover Analysis Method (CPA) has been proposed. This method is a powerful technique for seismic evaluation of regular reinforced concrete buildings in which the first mode of them is dominant. Since the bridges have different structures than buildings, their results cannot necessarily be attributed to bridges, and more research is needed. In this study, a cyclic pushover analysis with four loading protocols (suggested by valid references) by the Opensees software was conducted for seismic evaluation of two regular reinforce concrete bridges. The modeling method was validated with the comparison of the analytical and experimental results under both cyclic and dynamic loading. The failure mode of the piers was considered in two-mode of flexural failure and also a flexural-shear failure. Along with the cyclic analysis, conventional analysis has been studied. Also, the nonlinear incremental dynamic analysis (IDA) method has been used to examine and compare the results of pushover analyses. The time history of 20 far-field earthquake records was used to conduct IDA. After analysis, the base shear vs. displacement in the middle of the deck was drawn. The obtained results show that the cyclic pushover analysis method is able to evaluate an accurate seismic behavior of the reinforced concrete piers of the bridges. Based on the results, the cyclic pushover has proper convergence with IDA. Its accuracy was much higher than the conventional pushover, in which the bridge piers failed in flexural-shear mode. But, in the flexural failure mode, the results of each two pushover methods were close approximately. Besides, the cyclic pushover method with ACI loading protocol, and ATC-24 loading protocol, can provided more accurate results for evaluating the seismic investigation of the bridges, specially if the bridge piers are failed in flexural-shear failure mode.

The Interactive Effect of Translational Drift and Torsional Deformation on Shear Force and Torsional Moment (전단력 및 비틀림 모멘트에 의한 병진 변형 및 비틀림 변형의 상호 작용 효과)

  • Kim, In-Ho;Abegaz, Ruth A.
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.35 no.5
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    • pp.277-286
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    • 2022
  • The elastic and inelastic responses obtained from the experimental and analytical results of two RC building structures under the service level earthquake (SLE) and maximum considered earthquake (MCE) in Korea were used to weinvestigate the characteristics of the mechanisms resisting shear and torsional behavior in torsionally unbalanced structures. Equations representing the interactive effect of translational drift and torsional deformation on the shear force and torsional moment were proposed. Because there is no correlation in the behavior between elastic and inelastic forces and strains, the incremental shear forces and incremental torsional moments were analyzed in terms of their corresponding incremental drifts and incremental torsional deformations with respect to the yield, unloading, and reloading phases around the maximum edge-frame drift. In the elastic combination of the two dominant modes, the translational drift mainly contributes to the shear force, whereas the torsional deformation contributes significantly to the overall torsional moment. However, this phenomenon is mostly altered in the inelastic response such that the incremental translational drift contributes to both the incremental shear forces and incremental torsional moments. In addition, the given equation is used to account for all phenomena, such as the reduction in torsional eccentricity, degradation of torsional stiffness, and apparent energy generation in an inelastic response.

Hybrid Structural Health Monitoring of Steel Plate-Girder Bridges using Acceleration-Impedance Features (가속도-임피던스 특성을 이용한 강판형교의 하이브리드 구조건전성 모니터링)

  • Hong, Dong-Soo;Do, Han-Sung;Na, Won-Bae;Kim, Jeong-Tae
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.29 no.1A
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    • pp.61-73
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    • 2009
  • In this paper, hybrid health monitoring techniques using acceleration-impedance features are newly proposed to detect two damage-type in steel plate-girder bridges, which are girder's stiffness-loss and support perturbation. The hybrid techniques mainly consists of three sequential phases: 1) to alarm the occurrence of damage in global manner, 2) to classify the alarmed damage into subsystems of the structure, and 3) to estimate the classified damage in detail using methods suitable for the subsystems. In the first phase, the global occurrence of damage is alarmed by monitoring changes in acceleration features. In the second phase, the alarmed damage is classified into subsystems by recognizing patterns of impedance features. In the final phase, the location and the extent of damage are estimated by using modal strain energy-based damage index method and root mean square deviation (RMSD) method. The feasibility of the proposed hybrid technique is evaluated on a laboratory-scaled steel plate-girder bridge model for which hybrid acceleration-impedance signatures were measured for several damage scenarios. Also, the effect of temperature on the accuracy of the impedance-based damage monitoring results are experimentally examined from combined scenarios of support damage cases and temperature changes.