• Title/Summary/Keyword: Mo substrate

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Effect of hydrogen plasma treatment on the photoconductivity of free-standing diamond film

  • Kim, Sung-Hoon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.9 no.4
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    • pp.441-445
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    • 1999
  • Thick diamond film having $~700\mu\textrm{m}$ thickness was deposited on polycrystalline molybdenum(Mo) substrate using high power (4 kW) microwave plasma-enhanced chemical vapor depostion (MPECVD) system. We could achieve free-standing diamond film via detaching as-deposited diamond film from the substrate by rapid cooling them under vacuum. We investigated the variation of photoconductivity after exposing the film surface to either oxygen or hydrogen plasma. At as-grown state, the growth side (the as-grown surface of the film) showed noticeable photoconcuctivity. The oxygen plasma treatment of this side led to the insulator. After exposing the film surface to hydrogen plasma, on the other hand, we could observe the reappearing of photoconductivity at the growth side. Based on these results, we suggest that the hydrogen plasma treatment may enhance the photoconductivity of free-standing diamond film.

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Nanodome-patterned Transparent Conductor for Highly Responsive Photoelectric Device

  • Hong, Seung-Hyeok;Yun, Ju-Hyeong;Park, Hyeong-Ho;Gang, Gil-Mo;Seo, Cheol-Won;Kim, Jun-Dong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.458.1-458.1
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    • 2014
  • An effective light-managing structure has been achieved by using a nano-imprint method. A transparent conductor of indium-tin-oxide (ITO) was periodically nanodome-shaped to have a height of 200 nm with a diameter of 340 nm on a p-type Si substrate. This spontaneously formed a heterojunction between the ITO layer and Si substrate and effectively reduced the light-reflection. The ITO nanodome device response was significantly enhanced to 6010 from the value of 72.9 of a planar ITO film. The transparent conducting ITO nanodome structure efficiently manipulates the incident light driving into the light-absorber and can be applied in various photoelectric applications.

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Fabrication of Polydiacetylene Nanowire Using Nanotransfer Molding

  • Cho, Bo-Ram;Dang, Jeong-M.;Sung, Myung-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.282-282
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    • 2010
  • We report a new method of fabrication of polydiacetylene nanowire using liquid bridge-mediated nanotransfer molding (LB-nTM), a direct patterning method for the formation of two- or three-dimensional structures with feature sizes between tens of nanometers and tens of micron over large areas with various materials from a molder to a substrate via a liquid bridge between them. First, we fabricate assembled diacetylene monomer nanowire on the substrate then make it polymerize using 254nm UV-light irradiation. The Polydiacetylene nanowires have been investigated by UV-visible absorption spectroscopy, atomic force microscopy (AFM), and scanning electron microscopy (SEM).

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Development of Polymeric Layer for Enhancing The Adhesion of Nano-devices Fabricated by The Nanotransfer Molding Method

  • Lee, Gi-Seok;Seong, Myeong-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.634-634
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    • 2013
  • Transfer molding methods have a problem that weak adhesion between nanostructures and substrates. It is important to make various nano scale applications, also the stability of nanostructure on substrate is related with device performance. We studied an effect of poly 4-vinylphenol (PVP) as the polymeric adhesion layer between organic nanowires and a Si substrate when the nanowires are transferred by liquid-bridge-mediated nanotransfer molding method (LB-nTM). Their structural stability was examined by optical microscopy, scanning electron microscopy as multiple transfer molding and washing process. Field-effect transistors were fabricated with organic semiconductor nanowires on a polymeric adhesion layer and their electrical properties showed no significant difference as the one without the adhesion layer. As a result, adhesion layer can be used in the washing process and making multi-layer nano-scale patterns.

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Properties of ITO thin film's aging change prepared on the various substrate (다양한 기판에 제작한 ITO 박막의 실온 특성 변화)

  • Kim, Sang-Mo;Rim, You-Seung;Son, In-Hwan;Kim, Kyung-Hwan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.403-404
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    • 2008
  • In this study, we prepared ITO thin film on glass, polycarbonate (PC) and polyethersulfone (PES) substrate in Facing Targets sputtering (FTS) system. Properties of as-deposited thin films's aging change were investigated as a function of time placed in the air. The electrical and optical properties of as-deposited thin films were employed by a four point probe and an UV/VIS spectrometer, an X-ray diffractometer (XRD), a Field Emission Scanning Electron Microscope(FESEM) and a Hall Effect measurement. As a result, as time went by, transmittance of all films did not change but resistivity of films was decreasing.

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Characteristics of Indium Zinc Oxide thin films deposited on polymer substrate (폴리머 기판상에 제작한 Indium Zinc Oxide 박막의 특성)

  • Rim, You-Seung;Kim, Sang-Mo;Lee, Won-Jae;Kim, Kyung-Hwan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.405-406
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    • 2008
  • The amorphous indium zinc oxide (IZO) thin films were deposited on polyethersulfone (PES) and glass substrates by facing targets sputtering. IZO thin films deposited as functions of gas flow ratio on PES and glass substrates, respectively. The electrical, optical and structural properties of IZO thin films were evaluated by a Hall Effect Measurement, an X-Ray Diffractormeter, UV/VIS spectrometer in visible range and a scanning electron microscopy, respectively. As-deposited IZO thin films exhibited resistivity of $5.4\times10^{-4}$ and $4.5\times10^{-4}$ [$\Omega$-cm] on PES and glass substrates, respectively. The optical transmittance showed over 85% in the visible region on PES and glass substrates.

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Single ZnO Nanowire Inverter Logic Circuits on Flexible Plastic Substrates (플랙시블 기판 위에서 제작된 단일 ZnO 나노선 inverter 논리 소자)

  • Kang, Jeong-Min;Lee, Myeong-Won;Koo, Sang-Mo;Hong, Wan-Shick;Kim, Sang-Sig
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.59 no.2
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    • pp.359-362
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    • 2010
  • In this study, inverter logic circuits on a plastic substrate are built with two top-gate FETs in series on a single ZnO nanowire. The voltage transfer characteristics of the ZnO nanowire-based inverter logic circuit exhibit a clear inverting operation. The logic swing, gain and transition width of the inverter logic circuit is about 90 %, 1.03 and 1.2 V, respectively. The result of mechanical bending cycles of the inverter logic circuit on a plastic substrate shows that the stable performance is maintained even after many hundreds of bending cycles.

Properties of AZO thin film deposited on the PES substrate (PES 기판상에 증착된 AZO 박막의 특성연구)

  • Kim, Sang-Mo;Rim, You-Seung;Choi, Myung-Gyu;Kim, Kyung-Hwan
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.403-404
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    • 2007
  • We prepared the Al doped ZnO (AZO) thin film on polyethersulfon (PES) without any substrate heating by Facing Targets Sputtering (FTS) system. ZnO doped the content of Al 2 wt% was used and the sputtering conditions were gas pressure 1mTorr and input power 100W. The electrical, structural and optical properties of AZO thin films were investigated. To investigate the as-deposited thin film properties, we employed four-point probe, UV/VIS spectrometer, X-ray diffractometer (XRD), scanning electron microscopy (SEM), Hall Effect measurement system and Atomic Force Microscope (AFM).

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High Resolution Patterning Method by Using Water-mediated Nanotransfer Molding

  • Hwang, Jae-Kwon;Dang, Jeong-Mi;Sung, Myung-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.83-83
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    • 2010
  • We report a new direct printing method, called liquid-mediated nanotransfer molding (LB-nTM), that uses a polar liquid-mediated transfer process. LB-nTM is based on the direct transfer of various materials from a stamp to a substrate via a liquid- bridge between the stamp and the substrate. This procedure can be adopted in automated printing machines that generate various material patterns with a wide range of feature sizes (as small as 60 nm) on diverse substrates. To demonstrate its usefulness, the LB-nTM method was applied to prepare ZnO-nanowire and TIPS-pentacene transistors.

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Liquid Bridge -Mediated Nanotransfer Molding : A New Direct Printing Method

  • Dang, Jeong-Mi;Jo, Bo-Ram;O, Hyeon-Seok;Seong, Myeong-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.85-85
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    • 2010
  • We report a new direct printing method, called liquid-mediated nanotransfer molding (LB-nTM), that uses a polar liquid-mediated transfer process. LB-nTM is based on the direct transfer of various materials from a stamp to a substrate via a liquid- bridge between the stamp and the substrate. This procedure can be adopted in automated printing machines that generate various material patterns with a wide range of feature sizes (as small as 60 nm) on diverse substrates. The patterns have been investigated by scanning electron microscopy(SEM).

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