• Title/Summary/Keyword: Mo Film

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Antibacterial Properties of TiAgN and ZrAgN Thin Film Coated by Physical Vapor Deposition for Medical Applications

  • Kang, Byeong-Mo;Lim, Yeong-Seog;Jeong, Woon-Jo;Kang, Byung-Woo;Ahn, Ho-Geun
    • Transactions on Electrical and Electronic Materials
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    • v.15 no.5
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    • pp.275-278
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    • 2014
  • We deposited TiAgN and ZrAgN nanocomposite coatings on pure Titanium specimens, by using arc ion plating (AIP) with single alloy targets. TiAg ZrAg alloy targets of 5 wt.%, 10 wt.% silver content by vacuum arc remelting (VAR), followed by homogenization for 2 hours at $1,100^{\circ}C$ in non-active Ar gas atmosphere and characterized these samples for morphology and chemical composition. We investigated the biocompatibility of TiAg and ZrAg alloys by examining the proliferation of L929 fibroblast cells by MTT test assay, after culturing the cells ($4{\times}10^4cells/cm^2$) for 24 hours; and exploring the antibacterial properties of thin films by culturing Streptococus Mutans (KCTC3065), using paper disk techniques. Our results showed no cytotoxic effects in any of the specimens, but the antibacterial effects against Streptococus Mutans appeared only in the 10 wt.% silver content specimens.

Fabrication of a FBAR device using a novel process and the effect of bottom electrode on the frequency response (신 공정을 이용한 멤브레인형 체적탄성파 공진기의 제작 및 하부전극이 주파수 응답특성에 미치는 영향)

  • Kim, Bo-Hyun;Kim, Do-Young;Cho, Dong-Hyun;Lee, Jin-Bock;Park, Jin-Seok
    • Proceedings of the KIEE Conference
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    • 2004.07c
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    • pp.1594-1596
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    • 2004
  • Film bulk acoustic resonator (FBAR) devices which adopt a membrane-type configuration are fabricated by a novel process. In contrast to the conventional FBAR structure, the newly fabricated resonator doesn't employ any supporting layer below or above it, so that the properties of piezoelectric layer are not influenced by the bottom electrode material. FBAR devices with Mo/AlN/Metal configuration are also fabricated. The frequency response characteristics ($S_{11}$) of the devices fabricated using the proposed process are compared with those of the conventional devices. The return losses are also estimated, in terms of the kind and thickness of bottom electrode materials.

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Formation of Anodic Oxide Films on As-Cast and Machined Surfaces of Al-Si-Cu Casting Alloy (주조용 Al-Si-Cu 알루미늄 합금의 기계가공 및 주조된 표면에서의 양극산화피막 형성)

  • Moon, Sung-Mo;Nam, Yoon-Kyung;Yang, Cheol-Nam;Jeong, Yong-Soo
    • Journal of Surface Science and Engineering
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    • v.42 no.6
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    • pp.260-266
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    • 2009
  • The anodic oxidation behaviour of a cast component of AC2A Al alloy with machined surface and ascast surface was investigated in sulfuric acid solution. The anodized specimen showed relatively uniform and thick anodic oxide films on the as-cast surface, while non-uniform and very thin oxide films were formed on the machined surface. Non-anodized as-cast surface was observed to be covered with thick oxide scales and showed a number of second-phase particles containing Si, while non-anodized machined surface showed no oxide scales and relatively very small number of Si particles. Thus, the very limited growth of anodic oxide films on the as-cast surface was attributed to the presence of thick oxide scales and Si-containing second-phase particles on its surface.

Effects of Se flux on CIGS thin film solar cell (Se 증기압이 CIGS 박막 태양전지에 미치는 영향에 관한 연구)

  • Kim, Daesung;Kim, Chaewoong;Kim, Taesung
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.06a
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    • pp.71.2-71.2
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    • 2010
  • CIS(CuInSe2)계 화합물 태양전지는 높은 광흡수계수와 열적 안정성으로 고효율의 태양전지 제조가 가능하여 화합물 태양전지용 광흡수층으로서 매우 이상적이다. 또한 In 일부를 Ga으로 치환하여 밴드갭을 조절할 수 있는 장점이 있다. 미국 NREL에서는 Co-evaporation 방법을 이용해 20%의 에너지 변환 효율을 달성하였다고 보고된바가 있다. 본 연구에서는 미국의 NREL과 같은 3 stage 방식을 이용하여 광흡수층을 제조하고자 한다. 본 실험에서는 Se 증기압을 각각 $200^{\circ}C$, $230^{\circ}C$, $240^{\circ}C$, $245^{\circ}C$로 달리 하며 실험을 실시하였다. 이때 1st stage의 시간은 15분으로 고정하였으며 기판온도는 약 $250^{\circ}C$로 고정 하였다. 2nd stage는 실시간 온도 감지 장치를 이용하여 Cu와 In+Ga의 조성비가 1:1이 되는 시간을 기준으로 Cu의 조성을 30%더 높게 조절하였으며 기판 온도는 약 $520^{\circ}C$로 고정 후 실험을 실시하였다. 3rd stage의 경우 Cu poor 조성으로 조절하기 위해 모든 조건을 10분으로 고정 후 실험을 실시하였다. 각각의 Se 증기압에 따른 물리적, 전기적 특성을 알아보기 위해 FE-SEM, EDS, XRD 분석을 실시하였다. 본 연구에서 기판은 Na이 첨가되어있는 soda-lime glass를 사용 하였으며 후면 전극으로 약60nm 두께의 Mo를 DC Sputtering 방법을 이용해 증착 하였다.

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Selenization of CIG Precursors Using RTP Method with Se Cracker Cell

  • Kang, Young-Jin;Song, Hye-Jin;Cho, You-Suk;Yoon, Jong-Man;Jung, Yong-Deuk;Cho, Dea-Hyung;Kim, Ju-Hee;Park, Su-Jung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.426-426
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    • 2012
  • The CIGS absorber has outstanding advantages in the absorption coefficient and conversation efficiency. The CIGS thin film solar cells have been researched for commercialization and increasing the conversion efficiency. CIG precursors were deposited on the Mo coated glass substrate by magnetron sputtering with multilayer structure, which is CuIn/CuGa/CuIn/CuGa. Then, the metallic precursors were selenized under high Se pressure by RTP method which included. Se vapor was supplied using Se cracker cell instead of toxic hydrogen selenide gas. Se beam flux was controlled by variable reservoir zone (R-zone) temperature during selenization process. Cracked Se source reacted with CIG precursors in a small quantity of Se because of small size molecules with high activation energy. The CIGS thin films were studied by FESEM, EDX, and XRD. The CIGS solar cell was also developed by layering of CdS and ZnO layers. And the conversion efficiency of the CIGS solar cell was characterization. It was reached at 6.99% without AR layer.

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Atomic Layer Deposition of TiO2 Thin Films from Ti(OiPr)2(dmae)2 and H2O

  • Lee, Jae P.;Park, Mi H.;Chung, Taek-Mo;Kim, Yun-Soo;Sung, Myung M.
    • Bulletin of the Korean Chemical Society
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    • v.25 no.4
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    • pp.475-479
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    • 2004
  • $TiO_2$ thin films were grown on Si (100) substrates by atomic layer deposition using $[Ti(OPr^i )_2(dmae)_2]$ and water as precursors. The thickness, chemical composition, crystalline structure, and morphology of the deposited films were investigated by transmission electron microscopy, UV spectrometry, X-ray photoelectron pectroscopy, X-ray diffraction, and atomic force microscopy. The results show that $TiO_2$ ALD using $[Ti(OPr^i )_2(dmae)_2]$ as a precursor is self-controlled at temperatures of 100-300$^{\circ}C$. At the growth temperatures below 300$^{\circ}C$, the surface morphology of the $TiO_2$ films is smooth and uniform. The $TiO_2$ film was grown with a preferred orientation toward the [101] direction at 400$^{\circ}C$.

Electrical and Optical Properties of In-Ga-Zn-O Thin Films for TTFTs

  • Kim, Ji-Hong;Lee, Won-Yong;Moon, Byung-Moo;Koo, Sang-Mo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.309-309
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    • 2009
  • In-Ga-Zn-O (IGZO) has drawn much attention as a compatible material for transparent thin film transistors (TTFT) channel layer due to its high mobility and optical transparency at low processing temperatures. In this work, we investigated the effect of oxygen ambient on structural, electrical and optical properties of amorphous In-Ga-Zn-O (IGZO) thin films by using pulsed laser deposition (PLD). The films were deposited at various oxygen pressures and the structural, electrical and optical properties were investigated. X-ray diffraction (XRD) analysis showed that amorphous IGZO films were grown at all oxygen pressures. The surface morphology and optical properties with various oxygen pressures were studied by field emission scanning electron microscopy (FE-SEM) and UV-VIS spectroscopy, respectively. The grain boundary was observed more apparently and the calculated optical band gap became larger as oxygen pressure increased. To examine the electrical properties, Hall-effect measurements were carried out. The films showed high mobility.

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Growth of Carbon Nanotubes for Nano Device Application (나노 디바이스 응용을 위한 탄소나노튜브 성장 특성)

  • Park, Yong-Wook;Lee, Seung-Dae
    • Journal of the Korea Computer Industry Society
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    • v.8 no.1
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    • pp.17-22
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    • 2007
  • Carbon nanotubes (CNTs) were grown by a thermal chemical vapor deposition (CVD) method, which has been regarded as one of the most promising candidates for the synthesis of CNTs due to low cost and high growth yield. The Ethylene $(C_2H_4)$, hydrogen $(H_2)$ and Argon(Ar) gases were used for the growth of CNTs at $700^{\circ}C$. As a catalyst for CNTs growth, Fe thin film and Iron nitrate and Molybdenyl acetylacetonate solution with alumina nano-particle were prepared on $SiO_2/Si$ substrate. The growth properties of CNTs were analyzed by SEM and AFM.

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A Study on the Analysis of Application of Non-metric Camera to Accident Sites (비측량용 사진기를 이용한 사고현장 적용 해석에 관한 연구)

  • Yeu, Bock Mo;Kim, In Sup;Cho, Gi Sung
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.11 no.4
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    • pp.121-131
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    • 1991
  • This study is about the analysis of the application of non-metric camera to accident sites and aims to present an efficient, an economical and an accurate method of processing accident sites. This was accomplished by observation and accuracy analysis of an experimental model. It can be concluded that by applying the 3-D coordinate system and the bundle adjustment with additional parameters to non-metric cameras, it is possible to achieve an accuracy level of positional values which is similar to that achieved by conventional control surveying and by metric cameras. It was also found that the accuracy of absolute coordinates approached towards the accuracy of metric cameras with the increase of the film size and with the increase of the focal length of the non-metric camera.

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The Effects of Surface Porfiles and Coatings on the Tribological Behaviors of the Surfaces of Piston Skirt (피스톤 스커트 표면의 트라이볼로지 거동에 미치는 표면형상과 코팅의 영향)

  • Cho, Dae-Hyun;Chung, Soon-Oh;Won, Young-Duck;Han, Man-Cheol;Lee, Young-Ze
    • Tribology and Lubricants
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    • v.24 no.3
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    • pp.122-128
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    • 2008
  • To reduce the friction losses and the wear amounts in the piston assembly two methods were proposed. One is the modification of surface profile of the skirt part. The surface coating is another method to protect the sliding surfaces. To modify the profile of the skirt surfaces the surfaces were ground to have three different shapes of profiles. Also, several coatings, such as graphite, TiN, and $MoS_2$, and DLC, were used to protect the surfaces of the piston skirts. The specimens of the skirt and the cylinder bores were tested with the reciprocating wear tester. SAE 5W40 engine oil was used in boundary lubrication regime. Among several coatings the graphite and DLC coatings were very effective to reduce the friction forces. Especially, DLC film represented much better tribological performances than the others. The friction coefficient of the graphite coating was the lowest, but the graphite coating was not effective to protect the surfaces.