• 제목/요약/키워드: Mixed layer

검색결과 1,172건 처리시간 0.029초

CoNbZr/Cu/CoNbZr 다층막의 습식 식각 거동 (A Behavior of the Wet Etching of CoNbZr/Cu/CoNbZr Multi-Layer Films)

  • 김현식;이영생;송재성;오영두;윤재홍
    • E2M - 전기 전자와 첨단 소재
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    • 제10권7호
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    • pp.645-650
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    • 1997
  • We manufactured CoNbZr/Cu/CoNbZr multi-layer films by rf magnetron sputtering methods and formed the patterns on the deposited multi-layer films. In this study, we fabricated a new etchant for forming the patterns by the wet etching with etchant and we searched for the best etching conditions and the etchant composition. Cu was etched selectively independent on the concentration of iron chloride solution, but amorphous CoNbZr thin film did not. The etchant was achieved by iron chloride solution(17.5 mol%) mixed with HF (20 mol%) during 150 sec, which etched CoNbZr/Cu/CoNbZr multi-layer films at the same time. Also, the etchant etched CoNbZr/Cu/CoNbZr multi-layer films by the three-step. It was shown that the cross-section had the isotropic structure and excellent etching characteristics with the above etchant.

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반도체형 열중성자 선량 측정센서 개발 (The development of a thermal neutron dosimetry using a semiconductor)

  • 이남호;김양모
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2003년도 학술회의 논문집 정보 및 제어부문 B
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    • pp.789-792
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    • 2003
  • pMOSFET having 10 ${\mu}um$ thickness Gd layer has been tested to be used as a slow neutron sensor. The total thermal neutron cross section for the Gd is 47,000 barns and the cross section value drops rapidly with increasing neutron energy. When slow neutrons are incident to the Gd layer, the conversion electrons are emitted by the neutron absorption process. The conversion electrons generate electron-hole pairs in the $SiO_2$ layer of the pMOSFET. The holes are easily trapped in Oxide and act as positive charge centers in the $SiO_2$ layer. Due to the induced positive charges, the threshold turn-on voltage of the pMOSFET is changed. We have found that the voltage change is proportional to the accumulated slow neutron dose, therefore the pMOSFET having a Gd nuclear reaction layer can be used for a slow neutron dosimeter. The Gd-pMOSFET were tested at HANARO neutron beam port and $^{60}CO$ irradiation facility to investigate slow neutron response and gamma response respectively. Also the pMOSFET without Gd layer were tested at same conditions to compare the characteristics to the Gd-pMOSFET. From the result, we have concluded that the Gd-pMOSFET is very sensitive to the slow neutron and can be used as a slow neutron dosimeter. It can also be used in a mixed radiation field by subtracting the voltage change value of a pMOSFET without Gd from the value of the Gd-pMOSFET.

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열처리 슬러리코팅법을 이용한 연료전지 가스확산층의 제조 (Fabrication of Gas Diffusion Layer for Fuel Cells Using Heat treatment Slurry Coating Method)

  • 김성진;박성범;박용일
    • 열처리공학회지
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    • 제25권2호
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    • pp.65-73
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    • 2012
  • The Gas Diffusion Layer (GDL) of fuel cell, are required to provide both delivery of reactant gases to the catalyst layer and removal of water in either vapor or liquid form in typical PEMFCs. In this study, the fabrication of GDL containing Micro Porous Layer (MPL) made of the slurry of PVDF mixed with carbon black is investigated in detail. Physical properties of GDL containing MPL, such as electrical resistance, gas permeability and microstructure were examined, and the performance of the cell using developed GDL with MPL was evaluated. The results show that MPL with PVDF binder demonstrated uniformly distributed microstructure without large cracks and pores, which resulted in better electrical conductivity. The fuel cell performance test demonstrates that the developed GDL with MPL has a great potential due to enhanced mass transport property due to its porous structure and small pore size.

야생등줄쥐(Apodemus agrarius) 후각망울의 neuropeptide Y 면역반응세포의 분포 (Distribution of the neuropeptide Y immunoreactive neurons in the olfactory bulb of striped field mouse(Apodemus agrarius))

  • 정영길;김길수;정주영;이남섭;이경렬;김무강
    • 대한수의학회지
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    • 제39권3호
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    • pp.407-416
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    • 1999
  • This study was carried out to investigate the NPY-immunohistochemical characteristics of the olfactory bulb in the striped field mouse(Apodemus agrarius). The animals were anesthesized with thiopental sodium and perfused with 4% paraformaldehyde through left ventricle and aorta. Brains were removed and tranfered 10%, 20% and 30% sucrose. Sections were then cut on a cryostat into $40{\mu}m$-thick. The tissue immunostained with avidin-biotinylated complex method. The main olfactory bulb consisted of seven circumferential laminae : an olfactory nerve fiber layer, a glomerular layer with glomeruli surrounding by periglomerular cells, an external plexiform layer having granule and tufted cells, a mitral cell layer, a narrow internal plexiform layer, a granule cell layer forming several cell rows and a layer of white matter. The accessory olfactory bulb had four layers : an olfactory or vomeronasal nerve fiber layer, a glomerular layer consisting of small glomeruli, a mixed layer not distinguishing the external plexiform/mitral cell/granule cell layers and a granule cell layer. Most of NPY-immunoreactive(NPY-IR) neurons in main olfactory bulb were localized in the deeper portion of granule cell layer, white matter and anterior olfactory nucleus. In addition, some NPY-IR neurons were identified in the external plexiform layer. The shape of NPY-IR neurons of all olfactory bulb were predominant round or oval, sometime multipolar in shape. And most NPY-IR processes were parallel to long axis of white matter. In accessory olfactory bulb, NPY-IR neurons were not found in all region.

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백판지의 휨강성 증대를 위한 목질섬유의 이용 (2) 오존처리 (Improvement of Bending Stiffness in White Duplex Board by Utilization of Wood Fibers from Medium Density Fiberboard (2) Ozone treatment)

  • 서영범;김현준
    • 펄프종이기술
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    • 제47권1호
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    • pp.1-9
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    • 2015
  • Wood fibers for medium density fiberboard (MDF) was used in the filler layer of the white duplex board for increasing thickness and bulk of the board. The MDF fibers were treated with ozone (3% based on dry weight of the fibers), and mixed together with OCC (old corrugated container) to form paper. Ozone-treated MDF fibers gave high bulk, high tensile strength, high internal bond and fast drainage to the furnish mixed with OCC. It was shown that there were possibilities to reduced basis weight of the filler layer without loss of thickness, stiffness, and tensile strength. Furthermore, it showed the possibility to develop a new kind of board product that has high stiffness as well as high strength properties with light basis weight by application of the ozone-treated MDF fibers.

Climatological Estimation of Sea Surface CO2 Partial Pressure in the North Pacific Oceans by Satellite data

  • Osawa, Takahiro;Akiyama, Masatoshi;Sugimori, Yasuhiro
    • 대한원격탐사학회:학술대회논문집
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    • 대한원격탐사학회 1999년도 Proceedings of International Symposium on Remote Sensing
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    • pp.237-242
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    • 1999
  • As one of the key parameters to determine $CO_2$ flux between air - sea interface, it is quite important to know p$CO_2$, which has involved much uncertainty, mainly due to the complex variations of sea surface p$CO_2$ and the paucity of samples, made in ocean. In order to improve the interrelationship between partial pressure (p$CO_2$) and different physical and biochemical parameters in global sea surface water, a new empirical relation is established to correlate and parameterize p$CO_2$ in the mixed layer using the data from recent WOCE cruises. Meanwhile, by new empirical relation, abundant historical hydrographic and nutrients ship data, Levitus data set and NOAA/AVHRR(SST), p$CO_2$ have been accumulated and applied. Then effort has to be made fur promotion of this study to correlate and parameterize p$CO_2$ in the mixed Layer with different physical and biochemical parameters. and further attribute this huge historical data sets and NOAA/AVHRR(SST) data to estimate p$CO_2$. In this paper we analyzed more interrelationship between the model and ship/satellite data set. Finally, the inter-annual variations of p$CO_2$ in sea are presented and discussed.

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Feasibility of Indium Tin Oxide (ITO) Swarf Particles to Transparent Conductive Oxide (TCO)

  • Hong, Sung-Jei;Yang, DuckJoo;Cha, Seung Jae;Lee, Jae-Yong;Han, Jeong-In
    • Current Photovoltaic Research
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    • 제3권2호
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    • pp.50-53
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    • 2015
  • Indium (In) is widely used for transparent electrodes of photovoltaics as a form of indium tin oxide (ITO) due to its superior characteristics of environmental stability, relatively low electrical resistivity and high transparency to visible light. However, In has been worn off in proportion to growth the In related market, and it leads to raise of price. Although In is obtained from ITO target scarps, much harmful elements are used for the recycling process. To decrease of harmful elements, ITO swarf particles obtained from target scraps was characterized whether it is feasible to transparent conductive oxide (TCO). The ITO swarf was crushed with milling process, and it was mixed with new ITO nanoparticles. The mixed particles were well dispersed into ink solvent to make-up an ink, and it was well coated onto glass substrate. After heat-treatment at $400^{\circ}C$ under $N_2$ rich environments, optical transmittance at 550 nm and sheet resistance of the ITO ink coated layer was 71.6% and $524.67{\Omega}/{\square}$, respectively. Therefore, it was concluded that the ITO swarf was feasible to TCO of touch screen panel.

ZnS/$Na_3AlF_6$/ZnS 박막의 Cu 반사층을 이용한 광 특성 (The optical properties of ZnS/$Na_3AlF_6$/ZnS multi-layered thin film with Co reflection layer)

  • 김준식;장건익
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.322-323
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    • 2008
  • Multi layered thin films with ZnS/$Na_3AlF_6$/ZnS were deposited on glass substrate by thermal evaporator precess and simulated by using EMP(Essential Macleod Program). EMP is a comprehensive software package to design and analyse the optical characteristics of multi-layered thin film. ZnS and $Na_3AlF_6$ were selected as a high refractive index and low refractive index material respectively. Additionally Cu was chosen as mid reflective material. Optical properties including color effect were systematically studied. in terms of different optical thickness of low refractive index material. The optical thickness of $Na_3AlF_6$ was changed as 0.25, 0.5, 0.75 and $1.0\lambda$. The film with 0.25, 0.5, 0.75 and $1.0\lambda$. of optical thickness showed mixed color range between bluish green and red purple, yellowish green and bluish green, purple and mixed color range of green and purple respectively.

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Development of sacrificial layer wet etch process of TiNi for nano-electro-mechanical device application

  • Park, Byung Kyu;Choi, Woo Young;Cho, Eou Sik;Cho, Il Hwan
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제13권4호
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    • pp.410-414
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    • 2013
  • We report the wet etching of titanium nickel (TiNi) films for the production of nano-electro-mechanical (NEM) device. $SiO_2$ and $Si_3N_4$ have been selected as sacrificial layers of TiNi metal and etched with polyethylene glycol and hydrofluoric acid (HF) mixed solution. Volume percentage of HF are varied from 10% to 35% and the etch rate of the $SiO_2$, $Si_3N_4$ and TiNi are reported here. Within the various experiment results, 15% HF mixed polyethylene glycol solution show highest etch ratio between sacrificial layer and TiNi metal. Especially $Si_3N_4$ films shows high etch ratio with TiNi films. Wet etching results are measured with SEM inspection. Therefore, this experiment provides a novel method for TiNi in the nano-electro-mechanical device.

아아크방전 유도형 이온플레이팅에 의한 Cr-N 피막의 특성 (Properties of Cr-N Films Prepared by the Arc-induced Ion Plating)

  • 정재인;문종호;홍재화;강정수;이영백
    • 한국표면공학회지
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    • 제24권1호
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    • pp.24-24
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    • 1991
  • Cr-N films were deposited on low-carbon steel sheets by the reactive arc-induced ion plating (AIIP). The influence of the deposition conditions (nitrogen pressure and substrate bias voltage) on the crystal orientation, morphology and microhardness of the Cr-N films has been investigated using x-ray diffractometer and scanning electron microscope. The impurities and contaminations on the surface and at the interface, and the layer-by-layer compositions of the film have been analyzed using scanning Auger multiprobe (SAM) and glow discharge spectroscope (GDS). The mixed state of Cr and Cr2N turned out to have a fine fibrous structure. The Cr2N films were deposited at a wide range of nitrogen flow rates. The orientations of Cr2N films were mainly (110) and (111), and the intensity of the (111) peak increased as the substrate bias voltage increased. The micorstructure of the Cr2N film was dense and no columnar structure was observed. The films in the mixed state of Cr2N and CrN were also dense without columnar structure. The maximum microhardness of the Cr-N films was 2400 kg/$\textrm{mm}^2$ at 10gf load.