• Korean Journal of Optics and Photonics
• /
• v.4 no.2
• /
• pp.157-161
• /
• 1993

An optical autofocus system for a DUV KrF excimer laser wafer stepper was developed by using the PSD (Position Sensitive Detector) as the position sensor. The laser beam was incident on the surface of wafer and the reflected beam was magnified optically by a lens. And the beam was directed onto the surface of PSD by a mirror system. The spatial resolution of the autofocus system was found to be $0.03{\mu}m$.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.19 no.5
• /
• pp.616-621
• /
• 2010

New type of the base material of the light-emitting diode requires copper wafer in view of heat and electrical conductance. Therefore, polishing process of the substrate level is needed to get a nanometer level of surface roughness as compared with pattern structure of nano-size in the semiconductor industry. In this paper, a series of lapping and polishing technique is shown for the rough and deflected copper substrate of thickness 3mm. Lapping by sand papers tried air cooling method. And two steps of polishing used the diamond abrasives and the $Al_2O_3$ slurry of size 100mm considering the residual scratch. White-light interferometer proved successfully a mirror-like surface roughness of Ra 6nm on the area of $0.56mm{\times}0.42mm$.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 1995.03a
• /
• pp.1-8
• /
• 1995

This paper proposed a simple method for measuring surface roughness of ground surface. utilizing non-contact in-process measuring system using the diode laser. The measurement system is consisted of a laser unit with a diode laser and a cylindrical lens a detecting unit with polygon mirror and CCD array sensor. and a signal processing unit with a computer and device. During operation, this measuring system can provide information on surface roughness in the measuring distance with a single sampling and simultanilusly monitor the state of the grind wheel. The experimental results, showed that the increase of the feed rate and the dressing speed an caused increase in the surface roughness and when the surface roughness is 4Rmax-10Rmax, the cutting speed is 1653m/min-1665m/min. the feed rate is 0.2m/min-0.9m/min, the dressing speed is 0.2mm/rev-0.4mm/rev, the stylus method and the in-process method can be obtained the same results. thus under limited working conditions. using the proposed system. the surface roughness of the ground surface during cylindrical grinding can be obtained through the in-process measurement method using the diode laser.

• Journal of the Korean Society of Safety
• /
• v.10 no.3
• /
• pp.30-41
• /
• 1995

This paper proposed a simple method for measuring surface roughness of ground surface. Utilizing non-contact in-process measuring system using the diode laser. The measurement system is consisted of a laser unit with a diode laser and a cylindrical lens, a detecting unit with polygon mirror and CCD array sensor, and a signal processing unit with a computer and device. During operation, this measuring system can provide information on surface roughness in the measuring distance with a single sampling and simultaniously monitor the state of the grind wheel. The experimental results, showed that the Increase of the feed rate and the dressing speed an caused increase in the surface roughness and when the surface roughness is 4Rmax-10Rmax, the cutting speed is 1653m/min-1665m/min, the table speed is 0.2n1/min -0.9m/min, the dressing speed is 0.2mm/rev～0.4mm/rev, the stylus method and the in-process method can be obtained the same results. Thus, under limited working conditions, using the proposed system, the surface roughness of the ground surface during cylindrical grinding can be obtained through the in-process measurement method using the diode laser.

• Journal of the Optical Society of Korea
• /
• v.15 no.3
• /
• pp.244-251
• /
• 2011

We propose a new 2-step phase-shifting digital holographic optical encryption technique and analyze tolerance error for this cipher system. 2-step phase-shifting digital holograms are acquired by moving the PZT mirror with phase step of 0 or ${\pi}$/2 in the reference beam path of the Mach-Zehnder type interferometer. Digital hologram with the encrypted information is Fourier transform hologram and is recorded on CCD camera with 256 gray-level quantized intensities. The decryption performance of binary bit data and image data is analyzed by considering error factors. One of the most important errors is quantization error in detecting the digital hologram intensity on CCD. The more the number of quantization error pixels and the variation of gray-level increase, the more the number of error bits increases for decryption. Computer experiments show the results to be carried out encryption and decryption with the proposed method and the graph to analyze the tolerance of the quantization error in the system.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
• /
• v.14 no.11
• /
• pp.907-913
• /
• 2002

An experimental study on energy density distributions produced by dish solar concentrating system was performed to optimally design and rightly position a cavity receiver. This deemed also very useful to find and correct various errors associated with a concentrator. It is observed that the actual focal length is 2.17 m with a maximum energy density of 1.89 MW/$m^2$. By evaluating the position of flux centroid, it was found that there are errors within 2 cm from the target center. As a result of the percent power within radius, approximately 90% of the incident radiation is intercepted by about 0.06 m radius. The area concentration ratio normalized to 800 W/$m^2$ insolation and 90% mirror reflectivity was 347 suns. The total integrated power of 2467 W was measured under focal flux distributions, which corresponds to the intercept rate of 85.8%.

• Journal of the Korean Society for Heat Treatment
• /
• v.8 no.1
• /
• pp.44-52
• /
• 1995

The specimen for laser hardening have been carried out using SM45C which is coated with black paint or graphite for better absorption. Segmented mirror was used in order to produce a square beam ($10{\times}10mm$) at the surface with a homegeneous intensity distribution across the beam. $CO_2$-Laser power was changed from 2kW to 4kW and transfer velocity was varied from 0.1m/min to 2.0m/min. The maximum hardness and case depth of SM45C steel are 790Hv and 1.5mm by laser hardening. When the surface of specimens was melted during laser hardening. the surface hardness of SM45C steel was decreased. The surface hardness of 2 layer coated specimen(black paint: $15.4{\mu}m$, graphite coating: $9.5{\mu}m$) was increased than that of 1 layer coated specimen. It is desirable to prepare 2 or more coating layer on the steel surface in order to sufficient case depth and hardness in laser hardening. The graphite coating on the specimen surface was obtained more uniform temperature distribution than black paint coating in laser hardening process.

• Korean Journal of Optics and Photonics
• /
• v.10 no.1
• /
• pp.15-20
• /
• 1999

Laser Scanning Unit (LSU), which is one of the core parts of laser printer, consists of LD Module, cylinder lens, polygon mirror and f$\theta$ lens. After making an initial design on each part, we optimized the one which satisfies the user specification. The optimized optical system has diffraction limited performance for the slit size of 2.7 mm$\times$1.6 mm, f$\theta$ characteristics less than 0.3% and field curvature less 1.2 mm. We also calcurate tolerance of each part based on RSS(Root Sum Square) method to manufacture LSU for mass production.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 1992.04a
• /
• pp.84-88
• /
• 1992

Laser beam hardenling of 12%-Cr steel has been evaluated by using a continuous wave 3 kW CO$\_$2/ laser with a hardening mirror set. Experiment was performed on the optimum hardening condition with a laser power of 2.85kW and travel speed of 10 and 5 m/min. Multi passes have been alsotried to find the hardening characteristics of partly overlapped zone. The black paint to use at high temperature was adopted to increases the absorptivity of laser beam energy with the wavelength of 10.6 .mu. m at the surface of bese metal. The microstructure of the hardened layers was observed by using a light microscopy. SEM and TEM. A fine lamellar martensite formed in the hardened zones exhibits very high Vickers microhardness of 600 Hv, whereas the tempered martesite distributes in the base metal with Vickers microhardness of 240 Hv. It has been found that laser hardening with multi pass showed no significant drop of the hardness between adjacent passes.

• Journal of the Optical Society of Korea
• /
• v.16 no.3
• /
• pp.263-269
• /
• 2012

In this paper, we propose a new dual optical encryption method for binary data and secret key based on 2-step phase-shifting digital holography for a cryptographic system. Schematically, the proposed optical setup contains two Mach-Zehnder type interferometers. The inner interferometer is used for encrypting the secret key with the common key, while the outer interferometer is used for encrypting the binary data with the same secret key. 2-step phase-shifting digital holograms, which result in the encrypted data, are acquired by moving the PZT mirror with phase step of 0 or ${\pi}/2$ in the reference beam path of the Mach-Zehnder type interferometer. The digital hologram with the encrypted information is a Fourier transform hologram and is recorded on CCD with 256 gray level quantized intensities. Computer experiments show the results to be encryption and decryption carried out with the proposed method. The decryption of binary secret key image and data image is performed successfully.