• Proceedings of the KSME Conference
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• 2007.05a
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• pp.608-613
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• 2007

Fine pitch microprobe arrays are microneedle-like probes for inspecting the pixel of LCD panel. They are usually made of multilayers of metallic, nonmetallic, or combination of the two. In this study, the microprobe arrays were fabricated using the process applied for MEMS fabrication technology and they consist of BeCu, BeNi, or Si. Their contacting probing force and deflection were measured using the laser equipment. The design requirement are 5gf of a minimum contact force and $150{\mu}m$ of a maximum deflection. A lot of microprobe shape are possible satisfying the requirement. A double cantilever-type microprobe having needles on both ends were applied for this study. Several candidate were chosen using the topology and shape optimization technique subjected to the design requirements. Finite element results and experimental results were compared and both gave good correlation.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.748-751
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• 1997

The White Beamline of the Pohang Accelerator Laboratory(PAL) consists of main and second slits, a microprobe system, two ion chambers, a video-microscope, and a Si(Li) detector. These machine components must be controlled remotely through computer system to make user experiments precise and speedy. A real-time computer control system was developed to control and monitor these machine components. A VNIEbus computer with OS-9 real-time operating system was used for low-level data acquisition and control. VME I/O modules were used for step motor control and scaler control. The software has modular structure for maximum performance and easy maintenance. We developed database, I/O driver, and control software. We used PC/Window95 for data logging and operator interface. Visual C++ was used graphical user interface programming. RS232C was used for communication between VME and PC.

• Economic and Environmental Geology
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• v.17 no.4
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• pp.315-320
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• 1984

The newly discovered minerals found during 30 years have been discovered with election microprobe analysis, and several other new minerals have been described largely on the basis of probe analysis. Widely used types of instrument are the wavelength dispersive spectrometer (WDS) and the energy dispersive Spectrometer (EDS), with emitted X-ray dispersed by a curved crystal that is arranged to satisfy the Bragg equation ($n{\lambda}=2dsin{\theta}$). Atomic Nos of Z 4 to 92 can be analyzed quantitatively if they present in amount exceeding 50~100ppm. The application of the microprobe in mineralogical and geological research is quantitative chemical analysis of grains as small as a few microns in diameter, individual grains in a rock or can be analyzed in thin section and polished section, analysis can be made comparatively short time, methods in non-destructure, to photographical and crystallographical information. This paper was written in order to document data evaluation procedure for quantitative energy dispersive election probe analysis.

• Journal of the Mineralogical Society of Korea
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• v.11 no.1
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• pp.13-19
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• 1998

Textures of claystones of the Cheonunsan Formation in the Hwasoon area have been studied using optical microscope and electron microprobe. Microscopic images were observed under the optical microscope using the transmitted polarizing light from thin sections and under the electron microprobe using the back-scattered electron beam from the polished sections. Identification of minerals were made using X-ray diffraction analysis and chemical analysis by electon microprobe. Textural analyses show that the original sedimentary claystones rich in aluminium were subjected to metamorphism by which they changed to the metamorphosed claystone consisting mainly of chloritoid, quartz, andalusite and illite. Later intensive hydrothermal kaolinization of this metamorhosed claystones resulted in the formation of high-aluminous claystones rich in kaolinite exhibiting various complicated replacement textures.

• Journal of the speleological society of Korea
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• v.9
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• pp.3-7
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• 1999

Corralloid speleothems from Round Mountain lave cave are are studied by scanning microscope and electron microprobe analyses. Scanning microscopy observation indicates that the diatom Melosira seems to contribute significantly to siliceous coralloid speleothems Electron microprobe confirms the presence of diatom and fragmental minerals(plagioclase and orthopyroxene) in coralloid speleothems. Chemical analysis of 3 diatom cells gives SiO2(74.8%), Al2O3(0.12%), FeO(0.11%), CaO(0.47%) and MgO(0.81%).

• Asian Journal of Atmospheric Environment
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• v.5 no.1
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• pp.56-63
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• 2011

Quantifying the solute composition of a cloud droplet (or a whole droplet) is an important task for understanding formation processes and heating/cooling rates. In this study, a combination of droplet fixation and SR-XRF microprobe analysis was used to visualize and quantify elements in a micro-scale droplet. In this study, we report the preliminary outcome of this experiment. A spherical micro-scale droplet was successfully solidified through exposure to ${\alpha}$-cyano-acrylate vapor without affecting its size or shape. An X-ray microprobe system equipped at the beam line 37XU of Super Photon ring 8 GeV (SPring-8) was applied to visualize and quantify the elemental composition in an individual micro-scale droplet. It was possible to reconstruct 2D elemental maps for the K and Cl contained in a microdroplet that was dispensed from the 10-ppm KCl standard solution. Multi-elemental peaks corresponding to X-ray energy were also successfully resolved. Further experiments to determine quantitative measures of elemental mass in individual droplets and high-resolution X-ray microtomography (i.e., 3D elemental distribution) are planned for the future.

• Transactions on Electrical and Electronic Materials
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• v.14 no.2
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• pp.63-66
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• 2013

This paper describes the highly productive process technologies of microprobe arrays, which were used for a probe card to test a Dynamic Random Access Memory (DRAM) chip with fine pitch pads. Cantilever-type microprobe arrays were fabricated using conventional micro-electro-mechanical system (MEMS) process technologies. Bonding material, gold-tin (Au-Sn) paste, was used to bond the Ni-Co alloy microprobes to the ceramic space transformer. The electrical and mechanical characteristics of a probe card with fabricated microprobes were measured by a conventional probe card tester. A probe card assembled with the fabricated microprobes showed good x-y alignment and planarity errors within ${\pm}5{\mu}m$ and ${\pm}10{\mu}m$, respectively. In addition, the average leakage current and contact resistance were approximately 1.04 nA and 0.054 ohm, respectively. The proposed highly productive microprobes can be applied to a MEMS probe card, to test a DRAM chip with fine pitch pads.

• 한국전자현미경학회:학술대회논문집
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• 1999.11a
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• pp.69-69
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• 1999

• Journal of the Korean Institute of Telematics and Electronics
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• v.25 no.11
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• pp.1335-1341
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• 1988

A pH-ISEFET microprobe for in vivo measurements has been fabricated by combining ISFET (SL-IIS) chip and capillary thin film reference electrode. A two-step TCE oxidation for the gate oxide layer and multilayer encapsulation using silicone rubber and epoxy were specially used for the improvement of the stability and temperature dependence of the ISFET's. The measured sensitivit, response time and temperature dependence of the pH-ISFET microprobes are 50 mV/pH, less than one second, and - 0.01 pH/$^{\circ}$ , respectively. By operating continuously more than 40 days, a long term stability of 0.016 pH/day is obtained. The result of pH monitoring of femoral arterial blood in a rabbit is fairly good agreement with the value of blood gas analysis.

• Journal of the Korean Chemical Society
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• v.22 no.3
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• pp.184-193
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• 1978

Various aluminum chloride polymeric catalysts have been prepared by the reaction of anhydrous aluminum chloride with styrene-divinylbenzene copolymer bead in the carbon disulfide solvent. The shapes of aluminum chloride polymeric catalysts have been investigated by the use of optical microscope, scanning electron microscope and analysis of atomic absorption and electron microprobe X-ray. The catalytic effect of aluminurn chloride polymeric catalysts in the process of esterification of various organic acids with several aliphatic and aromatic alcohols have been studied.