• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2001.10a
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• pp.200-203
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• 2001

Micromolding methods such as micro-injection molding and micro-compression molding are most suitable for mass production of plastic micro-optics with low cost. In this study, plastic micro-optical components, such as refractive microlenses and diffractive optical elements(DOEs) with various grating patterns, were fabricated using micro-compression molding process. The mold inserts were made by ultrapricision mechanical machining and silicon etching. A micro compression molding system was designed and developed. Polymer powders were used as molded materials. Various defects found during molding were analyzed and the process was optimized experimentally by controlling the governing process parameters such as histories of mold temperature and compression pressure. Mim lenses of hemispherical shape with $250{\mu}m$ diameter were fabricated. The blazed and 4 stepped DOEs with $24{\mu}m$ pitch and $5{\mu}m$ depth were also fabricated. Optical and geometrical properties of plastic molded parts were tested by interferometric technique.

• Clean Technology
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• v.20 no.3
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• pp.226-231
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• 2014

This study presents a micromolding for the synthesis of Janus particles with reconfigurable shape by pH stimuli. First, we use acrylic acid (AA) as pH responsive monomer in the hydrophilic part and trimethylolpropane triacylate (TMPTA) in the hydrophobic part, respectively. The change of acidity in solvent induces the swelling of hydrophilic part in the Janus particles. The pH-responsive Janus particles show different swelling ratio of hydrophilic part in according to composition of acrylic acid in diverse range (0-70% v/v) and pH (3-11). As the concentration of acrylic acid in the hydrophilic part and environmental pH increase, the hydrophilic part in the Janus particles is proportionally swelled. Second, we fabricate novel type of Janus particles with two different hydrophilicities. As a proof of concept, we have applied acrylic acid (AA) and 2-(dimethylamino)ethyl methacrylate (DAEMA) into each part because the monomers provide reverse responsive activity. As expected, these Janus particles show different shape anisotropies with reconfigurable property in accordance with the polarity of each part at same acidity of environmental solvent. We envision that the stimuli responsive Janus particles have a wide application from fundamental science to diagnostic apparatus.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.9
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• pp.1923-1930
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• 2002

In this paper, we present modeling and simulation of microlens formation by means of a deep X-ray lithography followed by a thermal treatment of a PMMA (Polymethylmethacrylate) sheet. According to this modeling, X-ray irradiation causes the decrease of molecular weight of PMMA, which in turn decreases the glass transition temperature and consequently causes a net volume increase during the thermal cycle resulting in a swollen microlens. In this modeling, the free volume theory including the relaxation process during the cooling process was considered. The simulation results indicate that the modeling in this study is able to predict the fabricated microlens shapes and the variation pattern of the maximum heights of microlens which depends on the conditions of the thermal treatment. The prediction model could be applied to optimization of microlens fabrication process and to designing a micro mold insert for micromolding processes.

• Journal of Powder Materials
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• v.9 no.4
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• pp.267-272
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• 2002

The production of micro components is one of the leading technologies in the fields of information and communiation, medical and biotechnology, and micro sensor and micro actuator system. Microfabrication (micromachining) techniques such as X-ray lithography, electroforming, micromolding and excimer laser ablation are used for the production of micro components out of silicon, polymer and a limited number of pure metals or binary alloys. However, since the first development of microfabrication technologies there have been demands for the cost-effective replication in large scale series as well as the extended range of available material. One such promising process is micro powder injection molding (PIM), which inherits the advantages of the conventional PIM technology, such as low production cost, shape complexity, applicability to many materials, applicability to many materials, and good tolerance. This paper reports on a fundamental investigation of the application of W-Cu powder to micro metal injection molding (MIM), especially in view of achieving a good filling and a safe removal of a micro mold conducted in the experiment. It is absolutely legitimate and meaningful, at the present state of the technique, to continue developing the micro MIM towards production processes for micro components.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.84-84
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• 2010

In this study, we report on the novel lithographic patterning method to fabricate organic-semiconductor devices based on photo and e-beam lithography with well-known silicon technology. The method is applied to fabricate pentacene-based organic field effect transistors. Owing to their solubility, sub-micron sized patterning of P3HT and PEDOT has been well established via micromolding in capillaries (MIMIC) and inkjet printing techniques. Since the thermally deposited pentacene cannot be dissolved in solvents, other approach was done to fabricate pentacene FETs with a very short channel length (~30nm), or in-plane orientation of pentacene molecules by using nanometer-scale periodic groove patterns as an alignment layer for high-performance pentacene devices. Here, we introduce the atomic layer deposition of $Al_2O_3$ film on pentacene as a passivation layer. $Al_2O_3$ passivation layer on OTFTs has some advantages in preventing the penetration of water and oxygen and obtaining the long-term stability of electrical properties. AZ5214 and ma N-2402 were used as a photo and e-beam resist, respectively. A few micrometer sized lithography patterns were transferred by wet and dry etching processes. Finally, we fabricated sub-micron sized pentacene FETs and measured their electrical characteristics.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.7
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• pp.859-866
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• 2010

In this study, microinjection molding process using the newly developed micromold system, namely modularized and sectioned micromold system (MSMS), has been carried out for a replication of multi-level microstructures. The present MSMS consisted of several micromold modules, each having cross-sectional microstructures on the top surface. The micromold modules were precisely fabricated by deep X-ray lithography and subsequent nickel electroforming. By assembling the micromold modules, an MSMS having multi-level microstructures, which could be used as a mold system in micromolding processes, was obtained. In this manner, polymeric multi-level microstructures, such as the triangular prism microstructures on a stepped surface, were successfully replicated by the microinjection molding process.

• Polymer(Korea)
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• v.38 no.3
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• pp.391-396
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• 2014

Polymer microneedles can be fabricated by a micromolding method, an easy and cost-effective method. However, it is not easy to achieve uniform coating with an aqueous coating solution due to hydrophobic surface of polymer microneedles. 3-Dimensional coating polymer microneedles could deliver more than twice as much dose as in-plane metal microneedles by increasing coating area and the number of microneedles per unit area. A uniform coating was not obtained by addition of coating additives in the coating solution. The satisfied coating was achieved by treatment of surface of polymer microneedle with metal deposition and UV/ozone, and UV/ozone treatment was an ultimate surface treatment method based on biological safety. Calcein coating polymer microneedles were prepared by using UV/ozone treatment and followed dip-coating, and they delivered calcein in porcine skin successfully after 15 min of insertion.

• Journal of the Korean Vacuum Society
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• v.20 no.1
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• pp.63-69
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• 2011

In this study, we report on the novel lithographic patterning method to fabricate organic thin film field effect transistors (OTFTs) based on photo and e-beam lithography with well-known silicon technology. The method is applied to fabricate pentacene-based organic field effect transistors. Owing to their solubility, sub-micron sized patterning of P3HT and PEDOT has been well established via micromolding in capillaries and inkjet printing techniques. Since the thermally deposited pentacene cannot be dissolved in solvents, other approach was done to fabricate pentacene FETs with a very short channel length (~30 nm), or in-plane orientation of pentacene molecules by using nanometer-scale periodic groove patterns as an alignment layer for high-performance pentacene devices. Here, we introduce $Al_2O_3$ film grown via atomic layer deposition method onto pentacene as a passivation layer. $Al_2O_3$ passivation layer on OTFTs has some advantages in preventing the penetration of water and oxygen and obtaining the long-term stability of electrical properties. AZ5214 and ma N-2402 were used as a photo and e-beam resist, respectively. A few micrometer sized lithography patterns were transferred by wet and dry etching processes. Finally, we fabricated micron sized pentacene FETs and measured their electrical characteristics.