• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2011년도 춘계학술대회 논문집
• /
• pp.171-172
• /
• 2011

• 대한전자공학회논문지SD
• /
• 제42권11호
• /
• pp.1-8
• /
• 2005

본 논문은 MEMS (Micro-Mechanical-Electronic System) 기술을 이용한 온도, 압력, 습도 복합 센서의 설계와 제작, 그리고 평가에 관한 것이다. 이러한 MEMS 복합 센서는 휴대 전화나 PDA와 같이 가정용 제품에 사용되어 환경을 모니터링하는 건강 측정용 센서로서 사용될 것이다. 이 연구의 범위는 이러한 개별 센서의 연구 및 모든 센서를 하나의 실리콘 웨이퍼 상에서 집적할 수 있는 구조에 관한 연구, 그리고 복합 센서를 MEMS 공정에서 제작할 수 있는 공정 호환성에 대한 연구와 얻어진 센서 prototype의 측정, 평가로 이루어져 있다. 이 연구에서 우리는 온도와 압력 센서의 경우에는 선형성과 이력특성이 $1\%FS$안에 들어오는 특성을 얻었으며 단지 습도 센서의 경우에는 $5\%FS$에 해당하는 선형성과 이력 특성을 얻었다. 다만 원리적으로 습도 센서의 동작 특성은 비선형적이며 우리가 3차로 근사화할 경우에 보다 낳은 결과를 얻을 것을 기대할 수 있다. 이러한 특성을 더욱 개선하기 위한 것은 추후의 연구 영역이 될 것이다.

• Bulletin of the Korean Chemical Society
• /
• 제34권11호
• /
• pp.3307-3311
• /
• 2013

A new fiber optical sensor was developed for the determination of 2,4-dichlorophenol (DCP). The sensor was based on DCP oxidation by oxygen with the catalysis of iron(III) tetrasulfophthalocyanine (Fe(III)PcTs). The optical oxygen sensing film with $Ru(bpy)_3Cl_2$ as the fluorescence indicator was used to determine the consumption of oxygen in solution. A lock-in amplifier was used for detecting the lifetime of the oxygen sensing film by measuring the phase delay change of the sensor head. The different variables affecting the sensor performance were evaluated and optimized. Under the optimal conditions (i.e. pH 6.0, $25^{\circ}C$, Fe(III)PcTs concentration of 0.62 mg/mL), the linear detection range and response time of the sensor are $1.0{\times}10^{-6}-9.0{\times}10^{-6}$ mol/L and 250 s, respectively. The sensor displays high selectivity, good repeatability and stability, and can be used as an effective tool in analyzing DCP concentration in practical samples.

• International Journal of Contents
• /
• 제4권2호
• /
• pp.1-6
• /
• 2008

Pre schools with state of the art facilities that would provide not just academic excellence but also ensure the safety and provide efficient healthcare to their pupils relative to Atopic Dermatitis with Asthma is the main objective of this research One of the most promising applications of sensor networks is for human healthcare monitoring. Due to recent technological advances in sensor, low power microelectronics and miniaturization, and wireless networking enable the design and proliferation of this wireless sensor networks capable of autonomously monitoring and controlling environments. Thus, this research presents the utilization of such microelectronic sensor and plots the hardware and software architecture of a wireless sensor network system with real-time pupil monitoring that integrates vital sign sensors, location sensor and allergen sensor. This proposed architecture for wearable sensors can be used as active tags which can track pupil's location within the school's premises, identify possible atopic dermatitis with asthma allergens, it would monitor and generate a health status report of the pupil.

• 한국정밀공학회지
• /
• 제24권10호
• /
• pp.83-90
• /
• 2007

The vehicle dynamic control system needs to detect the yaw rate of vehicle and a yaw rate sensor is required as a central component. Therefore, A sensor on the basic of the "tuning fork method" for automotive controls is being developed. The sensor was fabricated by the surface micro machining process to miniaturize its size. The sensor output offset is ${\pm}0.37^{\circ}/sec$ in the room temperature. The resonance frequency of the fabricated yaw rate sensor is measured to 5.29kHz for the drive mode. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.

• 한국분말재료학회지
• /
• 제9권4호
• /
• pp.267-272
• /
• 2002

The production of micro components is one of the leading technologies in the fields of information and communiation, medical and biotechnology, and micro sensor and micro actuator system. Microfabrication (micromachining) techniques such as X-ray lithography, electroforming, micromolding and excimer laser ablation are used for the production of micro components out of silicon, polymer and a limited number of pure metals or binary alloys. However, since the first development of microfabrication technologies there have been demands for the cost-effective replication in large scale series as well as the extended range of available material. One such promising process is micro powder injection molding (PIM), which inherits the advantages of the conventional PIM technology, such as low production cost, shape complexity, applicability to many materials, applicability to many materials, and good tolerance. This paper reports on a fundamental investigation of the application of W-Cu powder to micro metal injection molding (MIM), especially in view of achieving a good filling and a safe removal of a micro mold conducted in the experiment. It is absolutely legitimate and meaningful, at the present state of the technique, to continue developing the micro MIM towards production processes for micro components.

• Transactions on Control, Automation and Systems Engineering
• /
• 제4권1호
• /
• pp.23-31
• /
• 2002

We proposed a concept of a desktop micro device factory for visually servoed teleoperated microassembly assisted by a virtual reality (VR) interface. It is composed of two micromanipulators equipped with micro tools operating under a light microscope. First a manipulator, control method for the micro object to follow a planned trajectory in pushing operation is proposed undo. vision based-position control. Then, we present the cooperation control strategy of the micro handling operation under vision-based force control integrating a sensor fusion framework approach. A guiding-system based on virtual micro-world exactly reconstructed from the CAD-CAM databases of the real environment being considered is presented for the imprecisely calibrated micro world. Finally, some experimental results of microassembly tasks performed on millimeter-sized components are provided.

• 제어로봇시스템학회:학술대회논문집
• /
• 제어로봇시스템학회 2002년도 ICCAS
• /
• pp.109.1-109
• /
• 2002

This paper presents a macro/micro flip chip mounting head system for precise force control. In the proposed macro/ micro system, the macro actuator is conventional do servomotor with a ball screw mechanism and the micro actuator is a voice coil motor(VCM) that consists of four NdFeB magnets and a winded moving coil. For force control, a sensitive strain-gauge force sensor is mounted in the micro actuator. Through harmonic motion between macro and micro actuator, we would like to get precise contact force control when small sized flip chip is mounted on flexible substrate in high speed. In order to show the effectiveness of the proposed macro/micro flip chip mounting head system, we com...

• 한국전기전자재료학회논문지
• /
• 제14권12호
• /
• pp.994-1000
• /
• 2001

In this paper, using micro-stereolithography technology, I fabricated a liquid analyzer to measure ion concentration of a solution. Micro-stereolithography is a technology to fabricate 3-dimensional structure by applying laser beam on liquid photo-polymer. This technology makes it possible to do preassemble fabrication without any extra assembling step after the process. So, the liquid analyzer could be fabricated at very low cost with very simple process by micro-stereolithography technology. The liquid analyzer consists of a chamber for containing the solution, a pump using piezoelectric effect of PZT disk, a static mixer and a sensor for measuring ion concentration using Pt electrodes.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2006년도 춘계학술대회 논문집
• /
• pp.469-470
• /
• 2006

Piezoelectric transformers based on lead zirconate titanate(PZT) have been received considerable interest because of their wide potential applications in transformer, oscillator, resonance sensor, actuator, acoustic transducer, as well as active slider for hard disk drives. However, for the applications which need a small power supply such as thin and flat displays, micro-robot, micro-system, it is especially necessary to integrate the passive components because they typically need more than 2/3 of the space of the conventional circuit. So, we have fabricated the piezoelectric micro-transformer to supply energy for micro-systems using PZT thin films and MEMS technologies.