Abstract
The vehicle dynamic control system needs to detect the yaw rate of vehicle and a yaw rate sensor is required as a central component. Therefore, A sensor on the basic of the "tuning fork method" for automotive controls is being developed. The sensor was fabricated by the surface micro machining process to miniaturize its size. The sensor output offset is ${\pm}0.37^{\circ}/sec$ in the room temperature. The resonance frequency of the fabricated yaw rate sensor is measured to 5.29kHz for the drive mode. Tests of the sensor demonstrate that its performance is equivalent to that required for implementation of a yaw control system. Vehicle handling and safety are substantially improved using the sensor to implement yaw control.
