• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3322-3324
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• 1999

This paper studies on the design and fabrication of a micro in-plane positioning actuator integrated with a microlens. Proposed in-plane actuator is a micro XY-stage which is composed of two linear comb drive actuators being orthogonal to each other. In the fabrication of actuator, the single crystalline silicon substrate anodically bonded with a #7740 glass substrate is used because of simple release and passivation. The structure of actuator is formed on the silicon facet of bonded fixture by chlorine-based deep RIE and then released by isotropic wet etching of glass (#7740) in hydrofluoric acid solution. Fabricated actuator has a large travel range up to $30({\pm}15){\mu}m$ and high resolution less than 0.01f1l1l in each direction. Experimented resonant frequency of this actuator is 630Hz. The micro-Fresnel lens is fabricated on the square-shape glass structure prepared in the center of actuator.

• The Transactions of the Korean Institute of Power Electronics
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• v.14 no.1
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• pp.62-71
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• 2009

In this paper, an improved drive method of piezoelectric PZT stack actuator for micro-positioning system is proposed and the performances are evaluated. This type of amplifier is based on switching technology efficiently handling the arbitrary regenerative energy from the piezoelectric actuator. The conventional voltage-feedback control method has the THD of -32dB (${\approx}2.5%$) with 100mHz sinusoidal reference, which means that the positioning performance in linearity degrades due to the hysteretic relationship between actuator voltage and the displacement. This paper proposed an improved charge-controlling method, which utilizes differential information of charge reference instead of integrating the actuator's current. The current waveform has THD under -40dBV (=1%) and the displacement waveform nearly -52dB (${\approx}0.25%$), which means that the positioning performance is very excellent. Finally, another method of the displacement feedback control has better performance than the voltage method, however there exists a limitation in performance of the system.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.11
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• pp.42-50
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• 2001

In this paper, a new technique and theory are proposed which correct the orientation (inclination of a vertical axis) of a cylinder in vertical-micro positioning device. An algorithm for determining the orientation of the cylinder with a pair of displacement sensor units is derived and two types of the correction methods are described. To assess the performance and efficiency of the developed correction technique, the compensation errors originated from the correction algorithm and the machined characteristics of cylinder surface are evaluated from the geometrical considerations and the statistical techniques. Based upon the evaluation results, the maximum compensation error is estimated for the orientation of cylinder and the optimum correction technique is derived.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.5
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• pp.65-71
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• 1998

This paper presents in-process compensation methodology to eliminate cutter runout and improve machined surface quality. The cutter runout compensation system consists of the micro-positioning mechanism with the PZT (piezo-electric translator) which is embeded in the sliding table to manipulate the radial depth of cut in real time. For the implementation of cutter runout compensation methodology. cutting force adaptive control was proposed in the angle domain based upon PI (proportional-integral) control strategy to eliminate chip-load change in end milling process. Micro-positioning control due to adaptive acuation force response improves the machined surface quality by compensation or elimination of cutter runout induced cutting force variation. This results will provide lots of information to build-up the precision machining technology.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.7
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• pp.39-46
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• 2008

High precision machining technology has become one of the important parts in the development of a precision machine. Such a machine requires high speed on a large workspace as well as high precision positioning. For machining systems having a long stroke with ultra precision, a dual-stage system including a global stage (coarse stage) and a micro stage (fine stage) is designed in this paper. Though linear motors have a long stroke and high precision feed drivers, they have some limitations for submicron positioning. Piezo-actuators with high precision also have severe disadvantage for the travel range, and the stroke is limited to a few microns. In the milling experiments, the positional accuracy has been readily achieved within 0.2 micron over the typical 20 mm stroke, and the path error over 2 micron was reduced within 0.2 micron. Therefore, this technique can be applied to develop high precision positioning and machining in the micro manufacturing and machining system.

• International Journal of Aeronautical and Space Sciences
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• v.12 no.4
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• pp.371-378
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• 2011

In this paper, the wavelet denoising techniques using thresholding method are applied to the low cost micro electromechanical system (MEMS)-global positioning system(GPS) integrated system. This was done to improve the navigation performance. The low cost MEMS signals can be distorted with conventional pre-filtering method such as low-pass filtering method. However, wavelet denoising techniques using thresholding method do not distort the rapidly-changing signals. They can reduce the signal noise. This paper verified the improvement of the navigation performance compared to the conventional pre-filtering by simulation and experiment.

• Journal of the Korean Society for Precision Engineering
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• v.16 no.3 s.96
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.231-232
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• 2011

• Nuclear Medicine and Molecular Imaging
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• v.42 no.5
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• pp.401-409
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• 2008

Purpose: Recently multi-modal imaging system has become widely adopted in molecular imaging. We tried to fabricate animal-specific positioning molds for PET/MR fusion imaging using easily available molding clay and rapid foam. The animal-specific positioning molds provide immobilization and reproducible positioning of small animal. Herein, we have compared fiber-based molding clay with rapid foam in fabricating the molds of experimental animal. Materials and Methods: The round bottomed-acrylic frame, which fitted into microPET gantry, was prepared at first. The experimental mice was anesthetized and placed on the mold for positioning. Rapid foam and fiber-based clay were used to fabricate the mold. In case of both rapid foam and the clay, the experimental animal needs to be pushed down smoothly into the mold for positioning. However, after the mouse was removed, the fabricated clay needed to be dried completely at $60^{\circ}C$ in oven overnight for hardening. Four sealed pipet tips containing $[^{18}F]FDG$ solution were used as fiduciary markers. After injection of $[^{18}F]FDG$ via tail vein, microPET scanning was performed. Successively, MRI scanning was followed in the same animal. Results: Animal-specific positioning molds were fabricated using rapid foam and fiber-based molding clay for multimodality imaging. Functional and anatomical images were obtained with microPET and MRI, respectively. The fused PET/MR images were obtained using freely available AMIDE program. Conclusion: Animal-specific molds were successfully prepared using easily available rapid foam, molding clay and disposable pipet tips. Thanks to animal-specific molds, fusion images of PET and MR were co-registered with negligible misalignment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.378-391
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• 2002

A 250mm stroke aerostatic stage, which detects position with laser scale and is driven by linear motor, is made and analyzed positioning error in 20$\pm$ 0.5 $^{\circ}C$ controlled atmosphere, aiming at investigating positioning characteristic of ultra-precision stage. We prove this aerostatic stage has a 10nm micro step resolution by experiment. By means of analyzing laser interferometer system, the scale of measuring error is about 0.2-0.4$\mu\textrm{m}$ according to refractive index error from missing the temperature change. To improve laser interferometer system, compensate refractive index error using measuring data from thermocouple. And, confirm 0.10$\mu\textrm{m}$ repeatability and 0.13 $\mu\textrm{m}$ positioning accuracy using the compensating refractive index. Also, we confirm 0.07 ${\mu}{\textrm}{m}$ repeatability of the stage using capacitive displacement sensor.