• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.2
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• pp.140-148
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• 2000

In this paper, using surface micromachining technology with thick photoresist and aluminum, an SLM(Spatial Light Modulator), which is applied to the fields of adaptive optics and pattern recognition system, was fabricated and the electromechanical properties of the fabricated micro SLM are measured. In order to maximize fill-factor and remove mechanical coupling between micro SLM actuators, the micro SLM is composed of three aluminum layers so that spring structure and upper electrode are placed beneath the mirror plate, and $10\times10$ each mirror plate is individually actuated. Also, the micro SLM was designed to be able to modulate phase and amplitude of incoming light in order to have a continuity of phase modulation of incoming light. In the case of amplitude and phase modulation, maximum vertical displacement is 4$\mum$, and maximum angular displacement is $\pm4.6^{\corc}$ respectively. The height difference of the fabricated mirror plate was able to be reduced to 1100A with mirror plate planarization method using negative photoresist(AZ5214). The electromechanical properties of the fabricated micro SLM were measured with the optical measurement system using He-Ne laser and PSD(position sensitive device).

• Proceedings of the Optical Society of Korea Conference
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• 1991.06a
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• pp.88-89
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• 1991

For the micro-lithography using a KrF excimer laser beam(λ=0.248${\mu}{\textrm}{m}$) a mirror system consisting of four spherical surfaces with reduction magnification 5$\times$ is designed. Initially the aplanat condition of the mirror system is considered. And for the further improved performance of the system the distortion free condition and flat field condition within Seidel 3rd order aberrations are added to the above condition. During the process of designing the computer-aided optimization technique is extensively employed. The spherical aberration, coma, field curvature and distortion of the optimized four-spherical mirror system are removed to the diffraction limit, and residual astigmatism and off-axial vignetting are not corrected enough.

• Journal of the Microelectronics and Packaging Society
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• v.7 no.1
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• pp.29-34
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• 2000

In this paper, the damping characteristics for electrostatically driven micro mirror which have deep grooves on their driving electrodes were investigated. A coupled simulation of gas flow and structural displacement of the micro mirror using the Finite-Element-Method is applied to this. The damping farce is caused by squeeze action of the gas film between a moving mirror plate and the electrodes. The grooves decrease the damping force and enable the moving plate to be driven at high speed and low driving voltage.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2001.11a
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• pp.222-225
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• 2001

Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. The mirror was fabricated by using MEMS technology and it's characteristics investigated. Also, electrode structure for reducing squeeze effect was discussed.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.34 no.10B
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• pp.1117-1123
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• 2009

Head fixed type multi-focus display system using Galvano-scanner and DMD(Digital Micro-mirror Device), which is able to perfectly accommodate, can solve eye fatigue due to conflict between convergence eye movement and accommodation action in stereoscopic display. This system is able to accommodate through making convergence point about each view point and offering it in front of observer's pupil by using laser scanning method. In this paper, we analyzed laser scanning method of this multi-focus display system. And multi-focus display system based on this analysis was made, which showed that focus adjustment was possible through video camera. As a result, formation principle of view point of multi-focus system by laser scanning method was verified.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.612-614
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• 1997

Silicon based micro mirror array is a highly efficient component for use in optical applications such as adaptive optical systems and optical correlators. A micro mirror array designed, fabricated and tested here is consisted of $5{\times}5$ single layer polysilicon, electrostatically driven actuators. In this paper, deflection characteristics and pull-in behavior of the actuators for analog control was studied and particularly, the influence of the residual stress in flexure beams for the restorative force of actuators was considered. The springs are modeled as a residual stress-free spring and a spring with residual stress. In calculation, a mirror with the residual stress-free springs has 30.3N/m spring constant and 31.1V pull-in voltage. On the other hand, a mirror with the stressed springs has 23.6N/m and 27.4V respectively. The experimental result, which is 20.5N/m and 25.5V, shows that the stressed springs ore well modeled.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.970-976
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• 1997

The ultra-precision machining is widely used for final machining process of precision parts, so in this study, mirror surface finishing systems using the micro abrasive film, one of ultra-precision machining method, have to examine mirror surface characteristics of the cylindrical workpiece(SM45) such as surface roughness, workpiece removal and evaluated under the condition varing film feed rate, applied pressure, grinding speed after fixing other condition. It was found that varrious machining condition have significant influences on workpiece removal, surface roughness.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1994.10a
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• pp.273-278
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• 1994

The surface finishing systems using the micro abrasive film were designed and manufactured to make the mirror surface of the cylindrical workpiece. An experimental study of surface finishing was carried out to investigate the performance of mirror surface finishing system. The surface roughness of stainless steel was about Rmax 0.2~0.25 .mu.m, Ra 0.02~0.04 .mu.m in abrasive grain size 12, 9 .mu.m. the surface roughness of chrome coated workpiece was about Rmax 0.07~ 0.11 .mu. m, Ra 0.01 in abrasive grain size 3 .mu. m. Also, to measure the mirror finishing time by mirror surface finishing system, the experiment was carried out on the chrome coated and ground roller of diameter 76mm and length 650mm. The finishing time and surface roughness were 40min and Rmax 0.1~0.13 .mu.m, Ra 0.01 .mu.m.

• Journal of the Optical Society of Korea
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• v.16 no.4
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• pp.365-371
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• 2012

A three-dimensional integral-floating display with 360 degree horizontal viewing angle is proposed. A lens array integrates two-dimensional elemental images projected by a digital micro-mirror device, reconstructing three-dimensional images. The three-dimensional images are then relayed to a mirror via double floating lenses. The mirror rotates in synchronization with the digital micro-mirror device to direct the relayed three-dimensional images to corresponding horizontal directions. By combining integral imaging and the rotating mirror scheme, the proposed method displays full-parallax three-dimensional images with 360 degree horizontal viewing angle.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.10
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• pp.68-74
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• 1997

The surface finishing system using the micro abrasive film was designed and manufactured to make the mirror surface of the cylindrical workpices. An experimental study of srface finishing was carried out to investigate the performance of mirror surface finishing system. The surface roughness value of stainless steel was about 0.2 .approx. 0.25 .mu. m Rmax, 0.02 .approx. 0.04 .mu. m Ra, using abrasive grain size of 12, 9 .mu. m. The surface roughness value of chrome coated workpiece was about 0.07 .approx. 0.11 .mu. m Ra using abrasive grain size 3 .mu. m. In the same condition, the chrome coated workpiece has obtained better surface roughness charateristics than the one of stainless steel.