Proceedings of the International Microelectronics And Packaging Society Conference (한국마이크로전자및패키징학회:학술대회논문집)

The Korean Microelectronics and Packaging Society (한국마이크로전자및패키징학회)
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Micro-Mirror Actuator for Optical Disk Drives

광 저장장치용 마이크로 미러 엑츄에이터

  • 김종완 (한국기술대학교 정보기술공학부) ;
  • 서화일 (한국기술대학교 정보기술공학부) ;
  • 이우영 (한국기술대학교 기계공학부) ;
  • 임경화 (한국기술대학교 제어시스템공학과) ;
  • 김영철 (한국기술대학교 신소재공학과)
  • Published : 2001.11.01
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Abstract

Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. The mirror was fabricated by using MEMS technology and it's characteristics investigated. Also, electrode structure for reducing squeeze effect was discussed.

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