• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1999년도 제29회 춘계학술대회
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• pp.47-52
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• 1999

In recent years, the micro-tribological behavior of silicon has been the topic of much interest. peformance of thin film under light load is important for potential applications in MEMS. In this work under light load and various humidity, the tribological behavior of undulated surface with various width and shape was Investigated. The results show that undulated surface of linear type had good tribological properties abrasive wear occur depending on the sliding condition. Also the effect of humidity on friction and wear was not important if exist undulation. Finally, undulations on HDD were found to be effective in trapping wear particles.

• 산업기술연구
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• 제25권B호
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• pp.121-126
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• 2005

Micro wires manufactured by the straightening process are used in the BT(Bio-Technology), IT(Information-Technology), NT(Nano-Technology). We have developed a novel wire straightener which uses the direct heating method(DHM) for straightening the micro wire and shearing device for burr-less cutting. In this study, we confirm the tendency of micro wire after the shearing process. It is impossible to remove the burr in the shearing process. However, the embodiment of minimum burr size after the shearing process is the best in-process method. In order to minimize the burr size, we have accomplished the various experiment condition such as the U-groove, the effect of the counter punch, the shear angle, clearance.

• 한국기계가공학회지
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• 제2권3호
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• pp.34-40
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• 2003

This paper describes evaluation and monitoring methods of machining characteristics for developed micro grooving machine. Experiments were conducted under various process conditions such as spindle revolution speed, feed rates and depth of groove V and U shape of blade and STD11 were used in this experiment. The status of grooving was evaluated through analysis of the Acoustic emission (AE) signal resulted in each process condition. Based on the analysis, this paper examined the possibility of monitoring adapting fuzzy logic. In conclusion, this paper presented the possibility of monitoring in process adapting AE technology and appropriate micro grooving condition.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2005년도 동계학술발표대회 논문집
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• pp.329-334
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• 2005

As more high power wide band gap devices are being utilized. the thermal management issues associated with these devices need to be resolved. High power small devices dissipate excessive heat that must be cooled, but traditional cooling methods are insufficient to provide such a cooling means. This paper will evaluate a micro-capillary pumped loop thermal management system that is incorporated into the shim of the device, taking advantage of phase-change to increase the thermal conductivity of the system. The results of the modeling of the thermal management system will be discussed.

• 한국생산제조학회지
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• 제22권3호
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• pp.408-413
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• 2013

Micro-features such as grooves and lenses, which perform optical functions in flat displays, should be manufactured with a good form accuracy because this is directly related to their optical performance. As the size of the display increases, it is very difficult to maintain a high relative accuracy because of the inherent geometric errors such as the waviness of a large-area plate. In this paper, the optical effect of these geometric errors is investigated, and surface-referenced micro-grooving to measure and compensate for such geometric errors on line is proposed to improve the form accuracy of the micro-grooves. A PZT-based fast depth adjustment servo system is implemented in the tool holder to maintain a uniform groove depth in reference to the wavy surface. Through experiments, the proposed method is shown to be an efficient way to produce high-quality micro- grooves on a wavy die surface.

• 대한의용생체공학회:의공학회지
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• 제33권4호
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• pp.202-206
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• 2012

In this study, we developed transdermal direct drug delivery device using micro-needle painlessly. We has fabricated micro-needle that is 130 ${\mu}m$ thickness and 250 ${\mu}m$length with 10 ${\mu}m$ spiral groove for rolling down drug. Head part of micro-needle device is composed of 20ea micro-needles, an on-off valve and a protective cap. Glass bottle for containing drug is connected to head part of micro-needle device. We examined the puncture characteristic testing using porcine skin and drug delivery testing using porcine, rat skin with Indian Ink.

• 대한기계학회논문집A
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• 제30권2호
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• pp.157-163
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• 2006

Our research dealt with micro fabrication using micro forming process. The goal of the research was to establish the limit of forming process concerning the size of forming material and formed shape. Flat-rolled ultra thin metallic foils of pure copper(3.0 and $1.0{\mu}m$ in thickness)and stainless steel($2.5{\mu}m$ in thickness) were used for forming material. We obtained the various shapes of micro channels as using designed forming process. $12-14{\mu}m$ wide and $9{\mu}m$ deep channels were made on $3.0{\mu}m$ thick foil and $6{\mu}m$ wide and $3{\mu}m$deep channels were made on $1.0{\mu}m$ thick foil. Si wafer die for forming was fabricated by using etching technique. And the relation of etching time and die dimension was investigated for fabricating precisely die groove. For the forming, die and metal foil were vacuum packed and the forming was conducted with a cold isostatic press. The formed channels were examined in terms of their dimension, surface qualities and potential for defects. Base on the examinations, formability of ultra thin metallic foil was also discussed. Finally, we compared the forming result with simulation. The result of research showed that metal forming technology is promising to produce micro parts.

• 한국정밀공학회지
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• 제31권3호
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• pp.181-187
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• 2014

Micro patterns are used to maximize the performance and efficiency of the product in many industries such as energy, display, printing, biology, etc. Nowadays, the fabrication technology for micro patterns has been developed in various ways such as photolithography, laser machining, electrical discharge machining and mechanical machining. Recently, mechanical machining the size of smaller than 1 micrometer could be tried, because the technology related to the machining was developed brilliantly. This paper shows the experiments using cutting processes in order to fabricate the micro pattern. Micro patterns of the size of several micrometers were machined by the diamond tools of two different shape, the deformation and generation of burr were investigated.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.445-446
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• 2002

The purpose of this study was to investigate the effect of micro holes, pattern structure and elastic modulus of pads on the polishing behavior such as the removal rate and WIWNU (within wafer non-uniformity) during CMP. The regular holes on the pad act as the superior abrasive particle's reservoir and regular distributor at the bulk pad, respectively. The superior CMP performance was observed at the laser processed bulk pad with holes. Also, th ε groove pattern shape was very important for the effective polishing. Wave grooved pad showed higher removal rates than K-grooved pad. The removal rate was linearly increased as the top pad's elastic modulus increased.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1136-1141
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• 2003

Among various methods to manufacture the PDP barrier ribs, the pressing and the roll forming methods are simple and economical because they form the ribs by utilizing the plastic flow of the green tape in a relatively short time without generating air-polluting dusts. In the present study, the roll forming method was investigated by experiments as well as numerical analyses and in result the groove roll and the preform were designed. The effect of draft angle, comer radius, and initial thickness of the green tape on the plastic flow was examined by a series of parametric studies. The preform was recommended to ease the plastic flow into the grooves and to avoid the occurrence of crack during rolling and sintering processes.