한국윤활학회:학술대회논문집 (Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference)
- 한국윤활학회 1999년도 제29회 춘계학술대회
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- Pages.47-52
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- 1999
미세 요철표면의 마찰마멸특성에 관한 연구
Study on the tribological Properties of Micro-undulated Surface
초록
In recent years, the micro-tribological behavior of silicon has been the topic of much interest. peformance of thin film under light load is important for potential applications in MEMS. In this work under light load and various humidity, the tribological behavior of undulated surface with various width and shape was Investigated. The results show that undulated surface of linear type had good tribological properties abrasive wear occur depending on the sliding condition. Also the effect of humidity on friction and wear was not important if exist undulation. Finally, undulations on HDD were found to be effective in trapping wear particles.