• 한국정밀공학회지
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• 제18권12호
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• pp.177-184
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• 2001

C3M(chemical mechanical micro machining) is applied for diminishing the size of burr and fabricating the massless patterning for aluminium wafer(thickness of 1${\mu}m$). It is difficult to perform the micro size machining with the radically increased shear stress. While the miniaturization and function-orientation of parts has been needed in the many field such as electronics, optics and medicine. etc., it is not enough to satisfy the industry needs in the machining technology. In this paper feasibility test of diminishing burr and fabricating maskless pattern was experimented and analyzed. In the experiment oxide layer was farmed on the aluminium with chemical reaction by ${HNO_3}$(10wt%), then the surface was grooved with tungsten carbide tool for the different condition such as the load and fred rate. The result was compared with the conventional machining to show the improvement of C3M with SEM for burr diminish and XPS for atomic existence, AFM for more precise image.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.589-592
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• 2005

Micro-forming is a suited technology to manufacture very small metallic parts(several $mm{\sim}{\mu}m$). Micro-forming of $Zr_{62}Cu_{17}Ni_{13}Al_8$ bulk metallic glass(BMG) as a candidate material for this developing process are feasible at a relatively low stress in the supercooled liquid state without any crystallization during hot deformation. In this study, micro-formability of a representative bulk metallic glass, $Zr_{62}Cu_{17}Ni_{13}Al_8$, was investigated for micro-forging of U-shape pattern. Micro-formability was estimated by comparing $R_f$ values $(=A_f/A_g)$, where Ag is cross-sectional area of U groove, and $A_f$ the filled area by material. Microforging process was simulated and analyzed by applying finite element method. FEM simulation results should reasonable agreement with the experimental results when the material properties and simulation conditions such as top die speed, remeshing criteria and boundary conditions tightly controlled. The micro-formability of $Zr_{62}Cu_{17}Ni_{13}Al_8$ was increased with increasing load and time in the temperature range of the supercooled liquid state. Also, FEM Simulation using DEFORM was confirmed to be applicable for the micro-forming process simulation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.918-921
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• 2002

Some investigators who have tried to achieve the highly smooth surface finish using electrochemical processes have reported that high current density produced lustrous surfaces while the opposite conditions produced a passive layer and had a tendency to produce a black surface. However, processing at a low current density may produce a non-lustrous surface but the improvement of dimensional accuracy of the surface is significant. The surface with pulse process was a bit more lustrous than with continuous current but the black passive layer still could be found at grooved surface. There are two ways to achieve highly smooth surface finish. One is brushing it with a brush the other is electrochemical machining (ECM) with high current. The former method is the most common polishing practice, but not only may the surface obtained differ from operator to operator, but precision smooth surface on micro grooves are difficult to obtain. The latter one recently has been used to produce a highly smooth surface after EDM process. However, the material removal rate in ECM with high current is relatively high. Hence the original shape of the micro grooves, which was formed by electrochemical micro-machining (EMM) process, may be destroyed. In this study, an electrochemical polishing process using pulse current is adopted as a possible alternative process when micro grooves formed by EMM process should be polished. Mirror-like micro grooves with lustrous and smooth surface can be produced electrochemically with pulse current because the voltage and current used can be lower than the case of continuous current. This study will discuss the accurate control of physical and electrical conditions so as to achieve mirror-like micro grooves with lustrous and smooth surface without destroying the original shape of micro grooves.

• Nuclear Engineering and Technology
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• 제52권3호
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• pp.589-596
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• 2020

Many components in the assembly section of Sodium-cooled Fast Reactor are made of good corrosionresistant 316 LN Stainless Steel material. To avoid self-welding of the components with the coolant sodium at elevated temperature, hardfacing is inevitable. Ni-based colmonoy-5 is used for hardfacing due to its lower dose rate by Plasma Transferred Arc process due to its low dilution. Since Ni-Cr-B-Si alloy becomes very fluidic while depositing, the major height of the weld overlay rests inside the groove. Hardfacing is also done over the plain surface where grooving is not possible. Therefore, grooved and ungrooved hardfaced specimens were prepared at different travel speeds. Fe content at every 100 ㎛ of the weld overlay was studied by Energy Dispersive Spectroscopy and also the micro hardness was determined at those locations. A correlation between iron dilution from the base metal and the micro hardness was established. Therefore, if the Fe content of the weld overlay is known, the hardness at that location can be obtained using the correlation and vice-versa. A new correlation between micro hardness and dilution coefficient is obtained at different locations. A comparative study between those specimens is carried out to recommend the optimum travel speed for lower dilution.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.249-250
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• 2007

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.625-628
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• 2005

For precise micro-grooving and surface machining, ultrasonic cyclic elliptical cutting is proposed using two parallel piezoelectric actuators. The piezoelectric actuators are energized by sinusoidal voltages of varying phase which is essenstial to generating elliptical cutting. Experimental setup is composed of ultrasonic motor, single crystal diamond cutting tool, and precise motorized xyz stage. It is confirmed experimentally that the cutting performance, in terms of the cutting force, the burr formation, and the discontinuous chip formation is improved remarkably by applying ultrasonic elliptical vibration cutting.

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권3호
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• pp.233-236
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• 2002

Some measures are provided for the optimum design of specific on-resistance $R_{on}$ and breakdown-voltage $V_B$ of interdigitated CB (Composite Buffer) MOSFET, including introducing opposite type impurity into the P region near the $N_＋$contact, separating P region from N region with an oxide film, and a groove in the N region near the $P_＋$ contact. The new relationship between the $R_{on}$ and $V_B$, which proved by numerical device simulation, are more exact and minute than the qualitative results before.

• 한국레이저가공학회지
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• 제16권2호
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• pp.16-18
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• 2013

In this paper, we fabricated breathable films on the use of microwave oven by using UV nanosecond laser micromachining, and the number of micro-grooves on the film is controlled for different oxygen transfer rate(OTR). As different number of micro-groove, the breath films of 100,000cc, 120,000cc, and 150,000cc can be fabricated. The breath film package of 120,000cc is used for the experiment of steaming a sweet potato. At the result, the sweet potato is well-cooked with enough moisture in the package not bursted.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.165-166
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• 2006

Surface pattern of tribological applications is an attractive technology of engineered surface. Therefore, friction reduction is considered to be necessary for improved efficiency of machines. This study investigated the effect of friction property fur angles of micro-scale crosshatch grooved surface pattern on bearing steel flat mated with pin-on-disk. We obtain sample which can be fabricated by photolithography process. We discuss friction property depend on an angle of cross-hatch grooved pattern. We can verify the lubrication mechanism as a Stribeck curve, which has a relationship between the friction coefficient and a dimensionless parameter under the lubrication condition. It was found that the friction coefficient was related to angle of crosshatch on surface, even when surface pattern was the same density.

• 대한기계학회논문집B
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• 제26권1호
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• pp.12-17
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• 2002

Abstract The flow of liquid and vapor is investigated in trapezoidal grooves. The effect of variable shear stress along the interface of the liquid and vapor is studied for both co-current and counter-current flows. Velocity contours and results for the friction are obtained for both trapezoidal grooves. An approximate relation that was previously utilized for the friction for the liquid was modified to obtain accurate agreement with the results for trapezoidal grooves.