Micro V-groove Machining Using Cyclic Elliptical Cutting Motion of a Couple of Piezoelectric Material

압전소자의 미세회전운동을 이용한 초음파 미세 홈 가공

For precise micro-grooving and surface machining, ultrasonic cyclic elliptical cutting is proposed using two parallel piezoelectric actuators. The piezoelectric actuators are energized by sinusoidal voltages of varying phase which is essenstial to generating elliptical cutting. Experimental setup is composed of ultrasonic motor, single crystal diamond cutting tool, and precise motorized xyz stage. It is confirmed experimentally that the cutting performance, in terms of the cutting force, the burr formation, and the discontinuous chip formation is improved remarkably by applying ultrasonic elliptical vibration cutting.