• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.9
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• pp.1201-1207
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• 2010

In this study, a fatigue testing system capable of performing load-controlled tension-tension tests for micro-specimens was developed by using an electro-magnetic actuator. Using this system, fatigue testing as well as tensile testing can be performed over a wide range of loading frequencies. Further, a new laser interferometric strain/displacement gage was used during fatigue testing to obtain high-resolution measurements of the cyclic deformation of thin films. Since the testing machine and the displacement gage are stable and show quick responses, the displacement can be measured instantaneously and continuously during fatigue testing, and high-resolution results can be obtained.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.30 no.4
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• pp.235-240
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• 2017

The effect of particle sizes on the aerosol deposition (AD) of Cu films is investigated in order to understand the deposition behaviors of metal powder during the AD process. The Cu coatings fabricated by using $2{\mu}m$ Cu powders had a dense microstructure, a high deposition rate ($1.6{\pm}0.2{\mu}m/min$), and low resistance ($9.42{\pm}0.4{\mu}{\Omega}{\cdot}cm$) compared to that from using Cu powder with a particle size greater than $5{\mu}m$. Also, from estimating the internal micro-strain of Cu films, the Cu coatings fabricated by using $2{\mu}m$ Cu particles exhibited a high micro-strain value of $3.307{\times}10^{-3}$. On the other hand, the strain of Cu coatings fabricated with $5{\mu}m$ particles was decreased to $2.76{\times}10^{-3}$. These results seem to show that the impacted Cu particles are compressed and flattened by shock waves, and that their bonding is associated with the high internal micro-strain caused by plastic deformation.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.05a
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• pp.43-46
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• 2005

Micro molding technology is a promising mass production technology for polymer based microstructures. Mass production technologies such as the micro injection/compression molding, hot embossing, and micro reaction molding are already in use. In the present study, we have developed a numerical analysis system to simulate three-dimensional non-isothermal cavity filling for hot embossing, with a special emphasis on the free surface capturing. Precise free surface capturing has been successfully accomplished with the level set method, which is solved by means of the Runge-Kutta discontinuous Galerkin (RKDG) method. The RKDG method turns out to be excellent from the viewpoint of both numerical stability and accuracy of volume conservation. The Stokes equations are solved by the stabilized finite element method using the equal order tri-linear interpolation function. To prevent possible numerical oscillation in temperature Held we employ the streamline upwind Petrov-Galerkin (SUPG) method. With the developed code we investigated the detailed change of free surface shape in time during the mold filling. In the filling simulation of a simple rectangular cavity with repeating protruded parts, we find out that filling patterns are significantly influenced by the geometric characteristics such as the thickness of base plate and the aspect ratio and pitch of repeating microstructures. The numerical analysis system enables us to understand the basic flow and material deformation taking place during the cavity filling stage in microstructure fabrications.

• Transactions of Materials Processing
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• v.32 no.4
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• pp.180-190
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• 2023

This study deals with residual stress prediction and hardness evaluation within cross ball grooved inner race fabricated by cold upsetting process consisted of upsetting and ejection steps. A raw workpiece material of AISI 5120H (SCr420H) is first spheroidized and annealed, then phosphophyllite coated to form solid lubricant layer on its outer surface. To investigate influences of the heat treatment, uni-axial compression tests and Vickers micro-hardness measurements are conducted. Three-dimensional elasto-plastic FE simulations on the upsetting step and the ejection one are performed to visualize the residual stress and the ductile (plastic deformation) damage. External feature of the fabricated inner race is fully captured by using an optical 3D scanner, and the micro-hardness is measured on internal cross-sections. Consequently, the dimensional compatibility between the simulated inner race and the fabricated one is ensured with a difference of under 0.243mm that satisfied permissible error range of ±0.50mm on the grooved surface, and the predicted residual stress is verified to have similar distribution tendency with the measured Vickers micro-hardness.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.2004-2006
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• 1996

A thermally driven polysilicon micro actuator has been fabricated using surface micromachining techniques. It consists of P-doped polysilicon as a structural layer and TEOS (tetracthylorthosilicate) as a sacrificial layer. The polysilicon was annealed for the relaxation of residual stress which is the main cause to its deformation such as bending and buckling. And the newly developed HF VPE (vapor phase etching) process was also used as an effective release method for the elimination of sacrificial TEOS layer. The thickneas of polysilicon is $2{\mu}m$ and the lengths of active and passive polysilicon cantilevers are $500{\mu}m$ and $260{\mu}m$, respectively. The actuation is incurred by die thermal expansion due to the current flow in the active polysilicon cantilever, which motion is amplified by lever mechanism. The moving distance of polysilicon micro actuator was experimentally conformed as large as $21{\mu}m$ at the input voltage level of 10V and 50Hz square wave. The actuating characteristics are investigated by simulating the phenomena of heat transfer and thermal expansion in the polysilicon layer. The displacement of actuator is analyzed to be proportional to the square of input voltage. These micro actuator technology can be utilized for the fabrication of MEMS (microelectromechanical system) such as micro relay, which requires large displacement or contact force but relatively slow response.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.6
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• pp.703-713
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• 2011

In this study, to minimize trial and error in the design and manufacturing processes of a high-precision large-surface micro-grooving machine which is able to fabricate the molds for 42 inch LCD light guide panels, the effects of the structural deformation of the micro-grooving machine according to the positions of the X-axis, Y-axis and Z-axis feed systems were examined on the tool tip displacement errors associated with the machining accuracy. The virtual prototype (finite element model) of the micro-grooving machine was constructed to include the joint stiffnesses of the hydrostatic bearings, hydrostatic guideways and linear motors, and then the tool tip displacement errors were measured from the virtual prototype. Especially, to establish the prediction model of the tool tip displacement errors, which was constructed using the positions of the X-axis, Y-axis and Z-axis feed systems as independent variables, the response surface method based on the central composite design was introduced. The reliability of the prediction model was verified by the fact that the tool tip displacement errors obtained from the prediction model coincided well those measured from the virtual prototype. And the causes of the tool tip displacement errors were identified through the analysis of interactions between the positions of the X-axis, Y-axis and Z-axis feed systems.

• Journal of the Korean Magnetics Society
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• v.25 no.1
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• pp.16-21
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• 2015

The micro device, coil, and channel for the biosensor integrated with the GMR-SV device based on the antiferromagnetic IrMn layer was fabricated by the light lithography process. When RBCs coupled with several magnetic beads with a diameter of $1{\mu}m$ passed on the micro channel, the movement of $RBC+{\mu}Beads$ is controlled by the electrical AC input signal. The $RBC+{\mu}Beads$ having a micro-magnetic field captured above the GMR-SV device is changed as the output signals for detection status. From these results, the GMR-SV device having the width magnitude of a few micron size can be applied as the biosensor for the analysis of a new magnetic property as the membrane's deformation of RBC coupled to magnetic beads.

• Selected Papers of The Society of Naval Architects of Korea
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• v.2 no.1
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• pp.106-128
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• 1994

An elasto-plastic-damage constitutive model for ductile materials is proposed within the framework of a thermodynamic approach of continuum damage mechanics (CDM) in which internal irreversible thermodynamic changes of micro-structure of materials such as plastic deformation and damage evolution are considered as thermodynamic state variables. The new constitutive model can predict not only the elasto-plastic behaviors but also the sequential stiffness degradation process of ductile materials more rationally.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.491-492
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• 2009

• Journal of the Semiconductor & Display Technology
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• v.3 no.2
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• pp.23-26
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• 2004

Thin film is one of the most general structures used in micro-electro-mechanical systems (MEMS). To measure the mechanical properties of SU-8 film, tensile testing was adopted which offers not only elastic modulus but also yield strength and plastic deformation by load-displacement curve. Tensile testing system was constructed with linear guided servo motor for actuation, load cell for force measurement and dual microscope for strain measurement.