• Title/Summary/Keyword: Micro-array

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Carbon nanotubes field emission tip for micro sized E-beam array system (초소형 전자빔 array에 적용 가능한 탄소 나노튜브 전자방출원 제작)

  • Eom, Bo-Se;Han, Chang-Ho;Chun, Kuk-Jin;Yum, Min-Hyung;Yang, Ji-Hun;Park, Chong-Yun
    • Proceedings of the IEEK Conference
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    • 2006.06a
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    • pp.541-542
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    • 2006
  • In this paper, I propose the field emission tip for the E-beam array system that is made by carbon nanotubes(CNT). CNT is one of the most expected future materials, because of its great mechanical, chemical and electrical characteristics. So CNT can be used for many applications such as electron emitter, sensor, single electron transistor and AFM tip. And CNT will be applied to our E-beam array system as field emission tip so we will improve the system's electrical characteristics.

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Fabrication of a liquid microthruster array by MEMS manufacturing process (MEMS 공정을 이용한 마이크로 액체 추력기 배열체 제작)

  • Huh, Jeongmoo;Kwon, Sejin
    • Journal of Aerospace System Engineering
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    • v.9 no.2
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    • pp.13-18
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    • 2015
  • Micro planar type liquid propellant thruster was fabricated by MEMS manufacturing process for micro/nano satellites applications. 90 wt.% hydrogen peroxide was used as propellant and for propellant decomposition, Pt/Al2O3 was used as catalyst. Micro thruster structure was made by 5 photosensitive glasses patterned with thruster component profiles. Objective thrust was 50 mN and required hydrogen peroxide mass flow was 2.1 ml/min, which was supplied by syringe pump and teflon tube in experimental test. Performance test said that average steady thrust was approximately 30 mN, around 60% of objective thrust, and transient time was about 5 sec. It is estimated that extended response time was due to high thermal energy loss of micro scale thruster and low enthalpy input by propellant mass flow.

Development of UV-molding process to fabricate functional micro-optical components (기능성 마이크로 광 부품의 성형을 위한 UV 성형 공정 기술 개발)

  • Kim, Seok-Min;Kang, Shin-Ill
    • Proceedings of the KSME Conference
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    • 2003.04a
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    • pp.1332-1336
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    • 2003
  • An experimental method is presented to maximize the replication quality of UV-molded micro-optical components. It is important to maximize the replication quality, because one can obtain the replicated micro-optical components with desired properties by accurate control of the shape. In the present study, a simple technique to avoid micro-air bubbles was first suggested. The effects of the UV-curing dose and the compression pressure on the replication quality of UV-molded structure were examined experimentally. Finally, as a practical application of the process design method, microlens arrays with diameters between 8 ${\mu}m$ and 96 ${\mu}m$ were fabricated by the present method, and the replication quality and the optical properties of the replicated microlens were measured and analyzed.

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Design and Fabrication of Micro Mirror with Staple and Pin (경첩과 핀을 사용한 가동 마이크로 미러의 설계와 제작)

  • Ji, Chang-Hyeon;Kim, Yong-Kweon;Yoon, Eui-Joon;Choi, Bum-Kyoo
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.1950-1953
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    • 1996
  • A $1\;{\times}\;4$ micro mirror array is designed and fabricated. In contrast to other micro mirrors which utilize torsional flexure hinges or cantilevers for restoring torque and supporting purpose, we have placed a substrate hinge structure under each mirror. Each micro mirror consists of address electrode, substrate hinge consisting of pin and staple, supporter post, and mirror plate. Electrical connection between mirror plate and ground electrode is established by substrate hinge. Mirror undergoes a rotational motion due to electrostatic force when voltage difference is applied between address electrode and mirror plate. Micro mirrors with two different types of staple shape and two different pin sizes are designed and fabricated. Each mirror is designed to have ${\pm}\;10^{\circ}$ of deflection angle and have $100\;{\times}\;110\;{\mu}m^2$ of size.

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Characteristics of micro-dimple formed on polyoxymethylene surface by Nd:YAG laser texturing technique (Nd:YAG 레이저를 이용한 polyoxymethylene 표면의 마이크로 딤플가공 및 특성에 관한 연구)

  • Cho, Min-Haeng;Lee, Jae-Bong;Lee, Seong-Hyuk;Kim, Joo-Han
    • Proceedings of the KSME Conference
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    • 2008.11a
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    • pp.193-197
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    • 2008
  • Array of micro-dimple on polyoxymethylene (POM) surface was fabricated using Q-switched Nd:YAG laser and its characteristics were studied in terms of heat affected zone (HAZ), dimple geometry, and the effect of specimen surface roughness. Process parameters such as lamp current, process time, and the stream of air in order to minimize HAZ and flow of molten polymer into cavity were extensively studied in this work. Dimple geometry was further investigated by 3-D optical microscopy to provide deep insight into morphological analysis near the dimples. This paper also presents the applicapability of micro-dimples in polymeric tribological system, such as a thrust bearing. Micro-dimples were expected to provide low coefficient of friction and enhanced lubricity at the sliding interface.

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A study on fabrication of a micro patterned LGP (미세 패턴 응용 도광판 제작에 관한 연구)

  • Yoo Y.E.;Kim T.H.;Kim S.G.;Seo Y.H.;Je T.J.;Choi D.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.533-534
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    • 2006
  • Micro pyramid pattern and its array are designed to enhance the brightness and its uniformity of LGP which is one of key parts in LCD. The designed micro pyramid patterns are fabricated on a Si-wafer first through MEMS process and then a Ni-stamper is electro-plated from the Si pattern master. Adopting the fabricated Ni-stamper, LGPs are injection molded at different mold temperatures and the fidelity of the pattern replication is estimated for each molding conditions and pattern locations. The replicated patterns are found to have some defect such as local short shot or micro weld line which are believed to have negative effect on the performance of the LGP.

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A Study on the Cutting Conditions of Self-Induced Chattering in Micro Shaping with Diamond Tool (다이아몬드 미세형삭가공의 자려진동 발생경향에 관한 연구)

  • 임한석;이언주;김술용;안중환
    • Journal of the Korean Society for Precision Engineering
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    • v.15 no.3
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    • pp.141-149
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    • 1998
  • Diamond shaping is one of the machining strategies to make the optical micro-groove molds, and it is especially useful when the component is an assembly of the linear micro-groove array. A mirrorlike surface and an arbitrary crose-sectional curve can be easily made by the diamond tool. However, the cutting speed of shaping is relatively lower than that of the other cutting methods, and there exist an unstable cutting conditions that generate the chatter. This study is focused on the modeling of the simplified self-induced chatter of the diamond shaping, and the machinabilities of three materials are compared by cutting experiments. From the chatter model and experiments, it is found that the unstable cutting conditions exist when the depth of cut is low and cutting speed is high. It is also found that the brass is relatively good material in micro shaping than copper or aluminium from the cutting experiments.

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Approximate Optimization of High-speed Train Shape and Tunnel Condition to Reduce the Micro-pressure Wave (미기압파 저감을 위한 고속전철 열차-터널 조건의 근사최적설계)

  • Kim, Jung-Hui;Lee, Jong-Soo;Kwon, Hyeok-Bin
    • Proceedings of the KSME Conference
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    • 2004.04a
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    • pp.1023-1028
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    • 2004
  • A micro-pressure wave is generated by the high-speed train which enters a tunnel, and it causes explosive noise and vibration at the exit. It is known that train speed, train-tunnel area ratio, nose slenderness and nose shape mainly influence on generating micro-pressure wave. So it is required to minimize it by searching optimal values of such train shape factors and tunnel condition. In this study, response surface model, one of approximation models, is used to perform optimization effectively and analyze sensitivity of design variables. Owen's randomized orthogonal array and D-optimal Design are used to construct response surface model. In order to increase accuracy of model, stepwise regression is selected. Finally SQP(Sequential Quadratic Programming) optimization algorithm is used to minimize the maximum micro-pressure wave by using built approximation model.

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Stress Induced Gigantic Piezoelectricity of PZT thin films for Actuated Mirror Array

  • Suzuki, Hisao
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.591-596
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    • 2006
  • Lead zirconate titanate(PZT) thin films have been attracting worldwide interests in exploring their potential properties [1-3] or the origins [4-6] of their excellent dielectic, ferroelectric and piezoelectric properties near the morphotropic phase boundary (MPB). PZT thin films are expected to apply to the memory devices, micro electro mechanical systems (MEMS), and display because of their superior ferroelectric, pyroelectric, piezoelectric and electron emission properties. In this study, high- performance piezoelectric PZT thin films for actuated mirror array and optical scanner were developed by controlling the several factors, such as molecular-designed precursor, seeding layer and the residual stress in films, by a chemical solution deposition (CSD).

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Micro and MacroArray Processing System Development: An Experience

  • 조환규
    • Proceedings of the Korean Society for Bioinformatics Conference
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    • 2001.10a
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    • pp.117-150
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    • 2001
  • cDNA Microarray 처리를 위한 시스템 개발에 관하여 개발시의 주요 착안점과 이전의 시스템에 비해서 개선된 몇 가지 기술에 대하여 본 연구팀의 실제적인 개발경험을 중심으로 설명한다. 렬 연구팀에서 만든 시스템의 기능은 이미지 처리부터 군집화(Clustering)에 이르는 전 과정을 통합적으로 처리될 수 있는데, 이 각 과정에 대하여 개략적으로 설명한다. 그리고 이 시스템을 활용하여 Macroarray라고 불릴 수 있는 새로운 형식의 array 실험장치에 어떻게 본 시스템이 적용되는지에 대하여도 설명을 한다.

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