Journal of Aerospace System Engineering (항공우주시스템공학회지)

The Society for Aerospace System Engineering (항공우주시스템공학회)
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Fabrication of a liquid microthruster array by MEMS manufacturing process

MEMS 공정을 이용한 마이크로 액체 추력기 배열체 제작

  • 허정무 (한국과학기술원 항공우주공학과) ;
  • 권세진 (한국과학기술원 항공우주공학과)
  • Received : 2014.12.12
  • Accepted : 2015.03.11
  • Published : 2015.06.30
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Abstract

Micro planar type liquid propellant thruster was fabricated by MEMS manufacturing process for micro/nano satellites applications. 90 wt.% hydrogen peroxide was used as propellant and for propellant decomposition, Pt/Al2O3 was used as catalyst. Micro thruster structure was made by 5 photosensitive glasses patterned with thruster component profiles. Objective thrust was 50 mN and required hydrogen peroxide mass flow was 2.1 ml/min, which was supplied by syringe pump and teflon tube in experimental test. Performance test said that average steady thrust was approximately 30 mN, around 60% of objective thrust, and transient time was about 5 sec. It is estimated that extended response time was due to high thermal energy loss of micro scale thruster and low enthalpy input by propellant mass flow.

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References

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