• 한국항공우주학회지
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• 제37권8호
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• pp.744-750
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• 2009

본 논문에서는 압전 작동기로 구동되는 무밸브 마이크로 펌프의 펌프 성능을 계산하였다. 선행연구에서 개발된 마이크로 펌프는 4층의 경량 압전 복합재료 작동기, PDMS로 된 챔버와 2개의 디퓨져로 이루어져 있다. 유한요소 해석은 압전 영역, 구조 영역 및 유체 영역을 완전 연성하여 수행되었다. 구조 및 압전 영역의 해석은 ANSYS를 사용하였으며, 유체영역의 해석은 ANSYS CFX를 사용하여 수행하였다. 작동 주파수가 10 Hz와 40 Hz인 경우에 대한 해석을 수행하여 작동 주파수가 유동 특성에 미치는 영향을 고찰하였다. 또한 300 Hz까지의 유동 해석을 통하여 작동 주파수에 따른 유량을 계산하였다.

• Design & Manufacturing
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• 제13권4호
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• pp.10-16
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• 2019

Semiconductor chip is bonded to the substrate by melting solder bumps. In general, the chip bonding is applied by a Reflow process or a Thermo-Compression(TC) bonding process. In this paper, we introduce a Laser Assisted Thermo-Compression bonding (LATCB) process to improve the anxiety of the existing process(Reflow, TC bonding). In the LATCB process, the chip is bonded to the substrate by irradiating a laser with a uniform energy density in the same area as the chip to melt only the solder bumps and press the chip with a Transparent Compression Module (TCM). The TCM consists of a fused silica header for penetrating the laser and pressurizing the chip, and a piezoelectric actuator (P.A.) coupled to both ends of the header for micro displacement control of the header. In addition, TCM is a structure that can pressurize the chip and deliver it to the chip and solder bumps without losing the energy of the laser. Fused silica, which is brittle, is vulnerable to deformation, so the header may be damaged when an external force is applied for pressurization or a displacement differenced is caused by piezoelectric actuators at both ends. On the other hand, in order to avoid interference between the header and the adjacent chip when pressing the chip using the TCM, the header has a notch at the bottom, and breakage due to stress concentration of the notch is expected. In this study, the thickness and notch length that the header does not break when the external force (500 N) is applied to both ends of the header are optimized using structural analysis and Coulomb-Mohr failure theory. In addition, the maximum displacement difference of the P.A.s at both ends where no break occurred in the header was derived. As a result, the thickness of the header is 11 mm, and the maximum displacement difference between both ends is 8 um.

• 접착 및 계면
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• 제25권1호
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• pp.169-274
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• 2024

최근 외부 자극에 따라 팽창과 수축을 가역적으로 반복하며 형태가 변하는 소재가 주목받고 있다. 이러한 소재는 소프트 로봇, 센서, 인공근육 등 다양한 분야로의 응용가능성을 가지고 있다. 본 연구에서는 고온 물질에 감응하여 이를 보호하거나 감쌀 수 있는 새로운 소재를 제안하였다. 이를 위해, 네마틱-등방성 전이 성질을 지닌 액정 엘라스토머(liquid crystal elastomer, LCE)와 높은 기계적 강도와 고온 수치 안정성을 지닌 폴리이미드(polyimide, PI)를 이용하였다. 용액공정으로 합성된 도프 용액을 마이크로 프린팅 기법에 도입하여 mm 미만의 마이크론 선폭을 지닌 LCE/PI 이중층 구조 2차원 패턴을 개발하였다. 벌집구조로 패턴된 LCE/PI 이중층 메쉬는 PI의 기계적 강도와 LCE 고온 수축 거동의 장점을 동시에 가지고 있었고, LCE 선택적 프린팅을 통해 고온에서 원하는 방향으로의 변형을 유도할 수 있었다. 그 결과, 특정 고온 물질을 가역 반복적으로 감쌀 수 있는 기능을 구현하였다. 본 연구는 LCE 분자 변화에 따라 다양한 온도 구간에서 전기에너지 인가없이 기능을 구현할 수 있는 다양한 액추에이터 분야의 응용 가능성을 시사한다.

• 마이크로전자및패키징학회지
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• 제19권1호
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• pp.81-87
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• 2012

본 논문에서는 마이크로 BGA 패키지 내외부의 마이크로 볼의 3차원 형상을 측정하는 광학 측정 시스템을 제안하고 이를 구현한다. 대부분의 시각 검사 시스템은 마이크로 볼의 복잡한 반사 특성 때문에 검사에 어려움을 겪고 있다. 정확한 형상의 측정을 위해서, 특별히 설계된 시각 센서 시스템을 제안하고, 위상이송 모아레 간섭계의 측정원리에 기반한 형상측정 알고리즘을 제안한다. 센서 시스템은 4개의 서브시스템을 보유한 패턴 투사 시스템과 영상획득 시스템으로 구성된다. 패턴 투사용 서브시스템은 공간상으로 서로 상이한 투사 방향을 가지며, 이는 측정 물체에 각기 다른 입사 방향을 가지는 패턴 조명이 투사될 수 있도록 하는 것을 목적으로 한다. 위상이송 모아레 간섭계의 구현을 위한 정밀 위상이송을 위해서, 각 서브시스템의 패턴 격자는 PZT 구동기를 이용하여 일정 간격으로 이송한다. 최종적으로 측정되는 마이크로 볼의 경면반사와 그림자 영역을 효과적으로 제거하기 위해서, 다중 패턴 투사 시스템과 영상획득 시스템을 구현하고, 이를 테스트한다. 특히, 다중 프로젝션을 이용하여 획득되는 다중 높이 정보를 효과적으로 융합하기 위하여, 베이지안 센서 융합 이론을 기반으로한 센서 융합 알고리즘이 제안된다. 제안되는 시스템의 원리검증과 성능확인을 위해, 마이크로 BGA볼과 기판 범프의 측정대상물에 대해서, 측정 반복성을 중심으로 실험이 수행되었으며, 획득된 실험 결과를 분석하고 논의한다.

• 대한기계학회논문집B
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• 제30권2호
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• pp.110-116
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• 2006

A syringe pump or a device using high electric voltage has been used for controlling flows inside a LOC (lab-on-a-chip). Compared to LOC, however, these microfluidic devices are large and heavy that they are burdensome for a portable ${\mu}-TAS$ (micro total analysis system). In this study, a new flow control technique employing pressure regulators and pressure chambers was developed. This technique utilizes compressed air to control the micro-scale flow inside a LOC, instead of a mechanical actuator or an electric power supply. The pressure regulator controls the output air pressure by adjusting the variable resistor attached. We checked the feasibility of this system by measuring the flow rate inside a capillary tube of $100{\mu}m$ diameter in the Re numbers ranged from 0.5 to 50. In addition, the performance of this flow control system was compared with that of a conventional syringe pump. The developed flow control system was found to show superior performance, compared with the syringe pump. It maintains automatically the: air pressure inside a pressure chamber whether the flow inside the capillary tube is on or off. Since the flow rate is nearly proportional to the resistance, we can control flow in multiple microchannels precisely. However, the syringe pump shows large variation of flow rate when the fluid flow is blocked in the microchannel.

• Transactions on Electrical and Electronic Materials
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• 제17권2호
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• pp.92-97
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• 2016

This paper presents design and simulation of wide band RF microswitch that uses electrostatic actuation for its operation. RF MEMS devices exhibit superior high frequency performance in comparison to conventional devices. Similar techniques that are used in Very Large Scale Integration (VLSI) can be employed to design and fabricate MEMS devices and traditional batch-processing methods can be used for its manufacturing. The proposed switch presents a novel design approach to handle reliability concerns in MEMS switches like dielectric charging effect, micro welding and stiction. The shape has been optimized at actuation voltage of 14-16 V. The switch has an improved restoring force of 20.8 μN. The design of the proposed switch is very elemental and primarily composed of electrostatic actuator, a bridge membrane and coplanar waveguide which are suspended over the substrate. The simple design of the switch makes it easy for fabrication. Typical insertion and isolation of the switch at 1 GHz is -0.03 dB and -71 dB and at 85 GHz it is -0.24 dB and -29.8 dB respectively. The isolation remains more than - 20 db even after 120 GHz. To our knowledge this is the first demonstration of a metal contact switch that shows such a high and sustained isolation and performance at W-band frequencies with an excellent figure-of merit (fc=1/2.pi.Ron.Cu =1,900 GHz). This figure of merit is significantly greater than electronic switching devices. The switch would find extensive application in wideband operations and areas where reliability is a major concern.

• 한국항공우주학회지
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• 제38권8호
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• pp.767-773
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• 2010

본 논문에서는 위성 본체에 장착된 탑제체를 위성으로부터 분리하기 위한 비폭발식 분리 메커니즘을 제안하였다. 작동기로서 경제적이고 신뢰성 있는 유성기어가 통합된 소형 직류모터를 채택하였다. 제안된 분리장치는 별도의 지그나 구조물 없이도 재장전이 용이 하도록 하였으며, 단순한 구조로 제작이 수월한 장점이 있다. 완성된 분리장치는 분리반응속도 측정시험, 최대분리가능하중 측정 시험, 최대발생충격 측정 시험을 통하여 그 성능을 입증하였고, 진동시험, 열진공 시험을 통하여 우주 환경에서 사용 가능함을 보여주었다. 개발된 인공위성용 비폭발식 분리장치를 통하여 그동안 사용되었던 폭발식 분리장치 등의 해외위성용 분리장치를 대체 할 수 있을 것으로 기대된다.

• Journal of Mechanical Science and Technology
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• 제20권1호
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• pp.51-58
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• 2006

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was $2.4\;{\mu}m$, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to $0.12{\mu}m$ and 0.20 arcsec, which were about $1/15^{th}$ and $1/6^{th}$ of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.

• 한국소음진동공학회논문집
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• 제21권12호
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• pp.1185-1191
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• 2011

The kinematic characteristics of cutting device significantly affects cutting performance in 2-dimensional elliptical vibration cutting(EVC) where the cutting tool cuts workpiece, traversing a micro-scale elliptical trajectory in a trochoidal motion. In this study, kinematical characteristics of EVC device constructed with two parallel stacked piezoelectric actuators were analytically modeled and compared with the experimental results. The EVC device was subjected to step and low-frequency(0.1 Hz) sinusoidal inputs to reveal only its kinematical displacement characteristics. Hysteresis in the motion of the device was observed in the thrust direction and distinctive skew of the major axis of the elliptical trajectory of the cutting tool was also noticed. Discrepancy in the voltage-to-displacement characteristics of the piezoelectric actuators was found to largely contribute to the skew of the major axis of the elliptical trajectory of the cutting tool. Analytical kinematical model predicted the cutting direction displacement within 10 % error in magnitude with no phase error, but in estimating the thrust direction displacement, it showed a $27^{\circ}$ of phase-lag compared with the measured displacement with no magnitude error.

• 제어로봇시스템학회논문지
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• 제8권9호
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• pp.736-746
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• 2002

There has been a great demand for smart actuators in the field of micro-machines. However, the control accuracy of smart actuators, e.g., a shape memory alloy(SMA) and a piezoceramic actuator, is limited due to the inherent hysteresis nonlinearity. The Preisach hysteresis model has emerged as an appropriate model f3r the behavior of those smart actuators. Yet it is still not easy to construct a practical model of hysteresis using the classical Preisach model. Accordingly, in this paper, we propose a new simple method for modeling of the hysteresis nonlinearity of SMA. Using only the proportional relation of the major loop of hysteresis, the proposed method makes the computation of the Preisach model easy. We prove the efficacy of the proposed model through the comparative the experimentation with the classical Preisach model.